 lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 year ago |
|
lixiang
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9163903164
Kepler2200优化
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1 year ago |
 hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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1 year ago |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
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1 year ago |
|
lixiang
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d33079596b
1.优化新版跑片动画
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1 year ago |
|
hecl
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ca830385e4
Fix bug
|
1 year ago |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
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1 year ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 year ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
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1 year ago |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
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1 year ago |
|
hecl
|
9d28f8ee7d
1.Add Tru match
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1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
|
lixiang
|
87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
feed6f1c8e
修复手动流气bug
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1 year ago |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
|
lixiang
|
6f2b23125b
再次提交解决Tolerance bug
|
1 year ago |
|
lixiang
|
8cea3a0063
修复流气tolerance bug
|
1 year ago |
|
lixiang
|
e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
f8c50b602a
修复Tolerance对流气不开阀的bug
|
1 year ago |
