 lixiang
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17793fef54
kepler2300 PM界面添加Include/Exclude功能
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1 year ago |
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lixiang
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
 chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
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lixiang
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f09d7d1b15
分开所有系列配置文件
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
 sangwq
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c3ef1d5a6e
Wafer loadlock delay function.
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1 year ago |
 hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
|
chenkui
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a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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1 year ago |
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sangwq
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db34e04302
missing SystemDispatcher.cs
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1 year ago |
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sangwq
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20606c1ffb
check in new routing algorithm code.
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1 year ago |
|
lixiang
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
|
hecl
|
d331213da1
1.SETM Pressure Control update
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1 year ago |
|
hecl
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e1a8bb6663
1.remove SETM mbar to mtor
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 year ago |
|
hecl
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49401d4b6e
1.Fix busgs
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1 year ago |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 year ago |
|
hecl
|
4c8cdc5b4a
1.Update Venus SE IO
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1 year ago |
|
hecl
|
dbe33e8d29
Venus DE ui&viewmodel update
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1 year ago |
|
hecl
|
c188b4cbbc
GasLeakCheckViewModel Update
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1 year ago |
|
lixiang
|
95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 year ago |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
|
lixiang
|
6a4c179557
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
|
hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
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1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
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1 year ago |
|
hecl
|
bb939f4cb1
Venus DE he flow update
|
1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
