 sangwq
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5469baaa63
Parallel cycle mode
|
il y a 10 mois |
 zhouhr
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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il y a 10 mois |
 lixiang
|
465f0690e7
Cooling功能bug修复
|
il y a 10 mois |
|
lixiang
|
9fdde379d4
cooling加条件限制
|
il y a 10 mois |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
il y a 10 mois |
|
sangwq
|
8a8ff0ced1
Fixed the cycle blocking bug with one wafer per cycle.
|
il y a 10 mois |
 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
il y a 11 mois |
|
kuangzl
|
7631216206
Improve the animation of SE Robot, modify Venus SE UI, complete casette load animation.
|
il y a 11 mois |
 chenkui
|
83714d769e
add vce module SafeLoad/SafeUnload/Map function
|
il y a 11 mois |
|
kuangzl
|
f56adfe739
Upload missing code and remove the PM pressure display.
|
il y a 11 mois |
|
chenkui
|
25954d684c
update EquipmentVariables.xml and Secsgem dll
|
il y a 11 mois |
|
kuangzl
|
a971969e35
Modify the UI of VenusDE and fix the ReturnWafer Button.
|
il y a 11 mois |
|
kuangzl
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
il y a 11 mois |
|
sangwq
|
3b1932fced
Add Loadport loaded check while manual transfer wafer.
|
il y a 11 mois |
|
sangwq
|
ed2162b82c
Fix the PreClean/PostClean disorder bug.
|
il y a 11 mois |
|
sangwq
|
09e8c5db30
Fix the post clean not running bug.
|
il y a 11 mois |
|
sangwq
|
260120e0d5
Change the PreClean/PostClean design.
|
il y a 11 mois |
|
zhouhr
|
4269c343ba
upload missing files..
|
il y a 11 mois |
|
zhouhr
|
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
|
il y a 11 mois |
|
zhouhr
|
eff7f8a03e
upload missing files
|
il y a 11 mois |
|
zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
il y a 11 mois |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
il y a 11 mois |
 hecl
|
4b1a37ee73
fix bugs
|
il y a 11 mois |
|
hecl
|
f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
|
il y a 11 mois |
|
hecl
|
31019683d7
1.Venus MFCVerification UI enhance
|
il y a 11 mois |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
il y a 11 mois |
|
sangwq
|
1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.
|
il y a 11 mois |
|
zhouhr
|
01f4eaa5de
fix the bug in SEMFSwapRoutine
|
il y a 11 mois |
|
sangwq
|
da0e19a78e
enhance the error handling routine while PM offline.
|
il y a 11 mois |
|
sangwq
|
1d60dcb593
Fix the bugs about Exclude/Include feature.
|
il y a 11 mois |
