 lixiang
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52e8bd8f7a
1.优化Home断开重连
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11 months ago |
 hecl
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0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
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11 months ago |
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hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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11 months ago |
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hecl
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9d28f8ee7d
1.Add Tru match
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11 months ago |
 sangwq
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2826cd9348
Enhance the duplicated wafer function.
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11 months ago |
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sangwq
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2de3872723
duplicated wafer function.
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11 months ago |
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lixiang
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01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
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sangwq
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52349cad2b
Duplicated wafer functions.
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1 year ago |
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hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
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lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
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lixiang
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4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
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lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
 zhouhr
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ea68c5c25d
add clean for Venus SE.
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1 year ago |
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lixiang
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166a9ab00e
VenusSE UI 打不开bug，配置文件确实Name
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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sangwq
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e8ae7ee302
fix the Loadlock path bug while fixed slot mode.
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1 year ago |
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hecl
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0b8a98a845
IoDevice IoMagnet Add
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1 year ago |
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sangwq
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408e8f0786
enhance the throughput while loadlock is fixed slot pattern.
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1 year ago |
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sangwq
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89d1b63b12
fix the bug which missing calling RouteTo on Vac side.
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1 year ago |
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sangwq
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9cdf232cb1
Fix the routing bug for fixed slot Loadlock.
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1 year ago |
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sangwq
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2a6a20fefc
fix the wrong position for singleArm Option definition while upper in lower out.
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1 year ago |
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sangwq
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746ece5800
restore System.Name configure item
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1 year ago |
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zhouhr
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c3c6427c4d
show names from Gas 9 to Gas 12 in recipe.
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1 year ago |
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sangwq
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b11dfcec1e
Load configure value for Loadlock slot in out option.
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1 year ago |
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sangwq
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a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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1 year ago |
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lixiang
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87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
|
hecl
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8b0b067448
Add chamber ISO valve status
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1 year ago |
|
hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
|
lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
