 sangwq
|
c9282deeeb
EFEM Driver and simulator functions.
|
1 year ago |
 Intern01
|
8a99234204
1.增加prcocessdatahistory 页面GridSplitter，excel导出等功能，增加FA界面
|
1 year ago |
 lixiang
|
3be4fea304
优化传片动画
|
1 year ago |
|
lixiang
|
9231cab4b9
1.修改topView ui
|
1 year ago |
|
lixiang
|
7419cea99a
添加TMCycle动画（部分）
|
1 year ago |
|
sangwq
|
16f00701e5
Redesign Recipe module.
|
1 year ago |
|
Intern01
|
f61d947399
1.增加侧边参数选择与recipe选择下拉框
|
1 year ago |
|
lixiang
|
acbb0f745b
efem报错不能运行
|
1 year ago |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
1 year ago |
|
sangwq
|
5fc13b3f0c
New Efem design
|
1 year ago |
|
sangwq
|
09de87bdab
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 year ago |
|
sangwq
|
f211c4242f
Efem module raw design.
|
1 year ago |
|
lixiang
|
fce40bc900
1.解决分子泵/chiller在线显示bug
|
1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 year ago |
|
Intern01
|
cd8d139b3e
1.添加PrecessHistory界面与读取process_data表批次信息对应数据值信息线性图展示功能
|
1 year ago |
|
lixiang
|
e9951fa64d
1.添加efem/sequence等界面
|
2 years ago |
|
lixiang
|
ec1eeba67c
添加数据分析界面
|
2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
2 years ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
2 years ago |
|
sangwq
|
0443cfe386
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
39dd3fa41f
Enable Com debug log.
|
2 years ago |
|
lixiang
|
2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
|
2 years ago |
|
sangwq
|
2663cfc1d9
Add place/pick delay.
|
2 years ago |
|
sangwq
|
9d44ff32a7
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
2 years ago |
|
lixiang
|
54ce578158
添加新版本recipe edit界面
|
2 years ago |
|
sangwq
|
b741650da1
TM Cycle ready.
|
2 years ago |
|
lixiang
|
24fac8d71d
recipe edit新界面制作
|
2 years ago |
|
sangwq
|
dff905345f
增加PMB的兼容
|
2 years ago |
|
lixiang
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 years ago |
