 lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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hai 9 meses |
 zhouhr
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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hai 9 meses |
|
lixiang
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5ce110574e
1，添加cooling功能
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hai 9 meses |
|
zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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hai 10 meses |
|
lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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hai 1 ano |
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lixiang
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caba8d94c6
Duplicated Wafer UI显示
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hai 1 ano |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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hai 1 ano |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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hai 1 ano |
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lixiang
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cfed419b0a
解决ValueTuple版本冲突
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hai 1 ano |
|
lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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hai 1 ano |
|
lixiang
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f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列，避免数据包丢失
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hai 1 ano |
|
lixiang
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894ff76d5e
online/offline tobview状态颜色变化
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hai 1 ano |
 sangwq
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2694bdc96c
Enhance the Pre-rotation function
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hai 1 ano |
|
sangwq
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baeae1636e
TM Robot PreRotation function for particle and throughput issues.
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hai 1 ano |
|
zhouhr
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0ed42d17d1
fix bugs for WaferOffset
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hai 1 ano |
|
zhouhr
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b2e38c8ff3
Add unuploaded files
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hai 1 ano |
|
zhouhr
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ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
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hai 1 ano |
|
lixiang
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46aa26403c
优化压差开siltdoor功能
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hai 1 ano |
 Intern01
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261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
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hai 1 ano |
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sangwq
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c223835b1e
enhance AutoCycle module.
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hai 1 ano |
|
lixiang
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bdec2c0d74
1.修改TM robot模拟器
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hai 1 ano |
|
sangwq
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f6ac5e975e
Siasun robot new line chars are "\r\n"
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hai 1 ano |
|
lixiang
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93b4531b7b
robot 不能home问题提交
|
hai 1 ano |
|
sangwq
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8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
hai 1 ano |
|
sangwq
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44ec74603f
TM Transfer
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
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241a8a2f5d
UPDATE 20230324
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
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e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
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5b037046f9
Add TM/LL modules.
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%!s(int64=2) %!d(string=hai) anos |
