 zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
hai 1 ano |
|
zhouhr
|
cf4cf64edc
Optimize SEView.
|
hai 1 ano |
 hecl
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1b4faf274b
Improve VenusSE pm viewmodel and vent function
|
hai 1 ano |
|
zhouhr
|
904ca94945
fix bug in VenusSE PM valve.
|
hai 1 ano |
|
zhouhr
|
e8e04e07b5
Change cast way by Enum Name for SEPMView.
|
hai 1 ano |
 lixiang
|
c0ff9f251e
1.添加kepler2200B
|
hai 1 ano |
|
zhouhr
|
bcbe6b2cbe
fix bug in PM SlitDoorClosed
|
hai 1 ano |
|
zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
hai 1 ano |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
hai 1 ano |
 sangwq
|
ec2f97e62d
enhance log.
|
hai 1 ano |
|
zhouhr
|
03aefe84d8
enhance configitem search
|
hai 1 ano |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
hai 1 ano |
|
zhouhr
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
hai 1 ano |
 intern02
|
dc8303196b
Added config search function, updated SystemConfigView.xmal and SystemConfigViewModel.cs .
|
hai 1 ano |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
hai 1 ano |
|
hecl
|
b277487716
1.Venuse PM Viewmodel update
|
hai 1 ano |
|
zhouhr
|
724b0ca304
add ReturnWafer for Venus SE.
|
hai 1 ano |
|
sangwq
|
6ac9eafd1d
FIX minor bug for log.
|
hai 1 ano |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
hai 1 ano |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
hai 1 ano |
|
lixiang
|
e511d1f387
1.添加PM控压功能
|
hai 1 ano |
|
zhouhr
|
cc3f68a0f1
enhance the check in MoveWafer
|
hai 1 ano |
|
zhouhr
|
5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
|
hai 1 ano |
|
sangwq
|
faa496c2b0
fix a routing bug for single PM sequence.
|
hai 1 ano |
|
lixiang
|
6910d4754e
代码合并
|
hai 1 ano |
|
lixiang
|
12bf5aaba7
高温heater功能添加
|
hai 1 ano |
|
zhouhr
|
187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
|
hai 1 ano |
|
zhouhr
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
|
hai 1 ano |
|
sangwq
|
88b91b4ea3
fix routing bugs.
|
hai 1 ano |
|
sangwq
|
19499bd319
fix a routing bug.
|
hai 1 ano |
