lixiang
|
38b40b702d
1.修复all in all out 不做cooling bug
|
7 months ago |
zhouhr
|
b6309f712c
upload for Venus SE/DE
|
8 months ago |
lixiang
|
8e660cd7a8
1.去除carrierid ;字符
|
10 months ago |
lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
10 months ago |
lixiang
|
a9d8e56970
1.扩展alarm list
|
10 months ago |
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
11 months ago |
lixiang
|
99d939492e
1.加登出界面
|
11 months ago |
lixiang
|
5ce110574e
1,添加cooling功能
|
1 year ago |
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号,手臂进腔前check
|
1 year ago |
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造,六路变八路
|
1 year ago |
hecl
|
1a56dd552c
fix bugs
|
1 year ago |
lixiang
|
9163903164
Kepler2200优化
|
1 year ago |
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
1 year ago |
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
1 year ago |
hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
1 year ago |
hecl
|
fedcc95273
1.Venus DE process enhance
|
1 year ago |
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
1 year ago |
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
1 year ago |
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 year ago |
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 year ago |
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码(Venus样机独有功能)
|
1 year ago |
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
lixiang
|
af631c4aaa
1.添加RF Calibration功能
|
1 year ago |
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |