 sangwq
|
0af5bc1e75
throughput enhancement.
|
9 months ago |
 lixiang
|
99d939492e
1.加登出界面
|
9 months ago |
|
sangwq
|
5687e44ebc
Enhance routing algorithm.
|
9 months ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
10 months ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
10 months ago |
|
lixiang
|
9faf7dc26a
拉取代码软件报警，去除默认Aligner1
|
11 months ago |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
11 months ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 months ago |
|
sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 year ago |
|
sangwq
|
2de3872723
duplicated wafer function.
|
1 year ago |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
sangwq
|
236244c8a0
redesign wtw clean function and fix auto vent bug.
|
1 year ago |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
 zhouhr
|
37bbeb95df
Add the configuration item QueryAWCOption to determine whether TMRobot AWC collects data && Add TMRobot Pick query AWC
|
1 year ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
1 year ago |
|
lixiang
|
072e5d0d01
ui Module TM 名变TMRobot
|
1 year ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
1 year ago |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
2 years ago |
|
sangwq
|
b741650da1
TM Cycle ready.
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
