 sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
1 year ago |
 lixiang
|
b6acfe2e29
优化TM leak check功能
|
1 year ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
1 year ago |
 Intern01
|
aaff066e93
EFEM Align UI RT 更新
|
1 year ago |
|
sangwq
|
68c484e4c3
兼容去胶机使用的Endpoint.
|
1 year ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
1 year ago |
|
Intern01
|
c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
|
1 year ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
1 year ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
|
1 year ago |
|
lixiang
|
530ddcbae7
优化topview界面
|
1 year ago |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
1 year ago |
|
sangwq
|
f211c4242f
Efem module raw design.
|
1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 year ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
sangwq
|
e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
lixiang
|
a268651d10
1.添加configview和部分mfcverificationview
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
|
sangwq
|
a244b205b9
Gas Flow and RF Power routine.
|
2 years ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
lixiang
|
3b8277256c
1.recipeHead添加expand
|
2 years ago |
|
sangwq
|
4e8a55f733
Endpoint Module.
|
2 years ago |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
sangwq
|
0050803370
update process Module
|
2 years ago |
