 zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
пре 1 година |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
пре 1 година |
 lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
пре 1 година |
 hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
пре 1 година |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
пре 1 година |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
пре 1 година |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
пре 1 година |
|
zhouhr
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
пре 1 година |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
пре 1 година |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
пре 1 година |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
пре 1 година |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
пре 1 година |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
пре 1 година |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
пре 1 година |
|
hecl
|
d331213da1
1.SETM Pressure Control update
|
пре 1 година |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
пре 1 година |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
пре 1 година |
|
hecl
|
4c8cdc5b4a
1.Update Venus SE IO
|
пре 1 година |
|
hecl
|
dbe33e8d29
Venus DE ui&viewmodel update
|
пре 1 година |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
пре 1 година |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
пре 1 година |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
пре 1 година |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
пре 1 година |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
пре 1 година |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
пре 1 година |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
пре 1 година |
|
zhouhr
|
57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
|
пре 1 година |
|
zhouhr
|
e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
|
пре 1 година |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
пре 1 година |
|
zhouhr
|
904ca94945
fix bug in VenusSE PM valve.
|
пре 1 година |
