 lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
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lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
 sangwq
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7b98756c26
兼容新旧 Endpoint, 未完成
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
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lixiang
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a5813eb09d
1.修改chamber wafer样式
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2 years ago |
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lixiang
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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lixiang
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072e5d0d01
ui Module TM 名变TMRobot
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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ec1eeba67c
添加数据分析界面
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2 years ago |
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sangwq
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39dd3fa41f
Enable Com debug log.
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2 years ago |
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sangwq
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2663cfc1d9
Add place/pick delay.
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2 years ago |
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sangwq
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dff905345f
增加PMB的兼容
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2 years ago |
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sangwq
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66557b65bb
TMCycle not finished.
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2 years ago |
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sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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2 years ago |
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lixiang
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62f1a16025
1.添加PartialPressure界面
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2 years ago |
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sangwq
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241a8a2f5d
UPDATE 20230324
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
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sangwq
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4ae8734407
PendulumValve pressure full range.
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2 years ago |
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sangwq
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6187ad5b4f
Interlock 优化
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2 years ago |
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lixiang
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a268651d10
1.添加configview和部分mfcverificationview
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2 years ago |
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sangwq
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c4864f5546
debug gas verification.
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2 years ago |
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sangwq
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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lixiang
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b2c09224e9
代码合并
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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0606b882bc
process module 1215
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 years ago |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 years ago |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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lixiang
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782eafc783
1.添加log配置文件功能
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3 years ago |
