 lixiang
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27fe4c7e97
1.添加TMP Water Flow与Lid Water Flow 报警
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7 mesi fa |
|
lixiang
|
54c8557dd6
调度优化
|
7 mesi fa |
|
lixiang
|
f92e6abb17
1.添加Kepler2300 功能代码
|
8 mesi fa |
|
lixiang
|
6ec37ea42c
1.与Venus分开，删除冗余代码
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8 mesi fa |
|
lixiang
|
6447434c5b
Venus代码删除
|
9 mesi fa |
|
lixiang
|
2cdc13a01b
1.Venus与Kepler 代码分开
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9 mesi fa |
|
lixiang
|
38b40b702d
1.修复all in all out 不做cooling bug
|
9 mesi fa |
|
lixiang
|
1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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10 mesi fa |
 zhouhr
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82d289e21c
1. add the function of WTWClean by WTWInterval
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10 mesi fa |
|
zhouhr
|
b8540e3e4c
1. fix the bug in VenusRecipeSequenceSelectView
|
10 mesi fa |
|
zhouhr
|
dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
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10 mesi fa |
|
zhouhr
|
79d5e939e3
1. show the choice of AutoUnLoad
|
10 mesi fa |
|
zhouhr
|
9e1a79673e
1. add the item of AutoUnLoad for Job
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10 mesi fa |
|
lixiang
|
b113f691ee
添加Carrier ID
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10 mesi fa |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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10 mesi fa |
|
zhouhr
|
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
|
10 mesi fa |
|
zhouhr
|
149c7ce2e9
add AutoPump before StartJob && AutoUnLoad after JobDone && VCELoad Without PumpDown
|
10 mesi fa |
|
zhouhr
|
b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
|
10 mesi fa |
|
zhouhr
|
4666252058
补充recipe界面不显示heliumpump的问题
|
10 mesi fa |
|
zhouhr
|
fd27ba4304
handle some bug.
|
10 mesi fa |
|
zhouhr
|
b6309f712c
upload for Venus SE/DE
|
10 mesi fa |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
11 mesi fa |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
11 mesi fa |
|
lixiang
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
1 anno fa |
 chenkui
|
9ffd49dd2d
update pp-select object[] to string[] bug
|
1 anno fa |
 sangwq
|
bcb1461e22
Routing bug while single PM and double arm running.
|
1 anno fa |
|
sangwq
|
3a49881f33
fix the typing error.
|
1 anno fa |
|
sangwq
|
81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
|
1 anno fa |
|
sangwq
|
e12c5e5a93
fixed the blocking bug while return wafers.
|
1 anno fa |
|
chenkui
|
4edd963b4b
update S2F13 ECID
|
1 anno fa |
