 hecl
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1a56dd552c
fix bugs
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10 months ago |
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hecl
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e2836bfbda
1.Chamber DE process enhance
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10 months ago |
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hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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10 months ago |
 zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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10 months ago |
 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 months ago |
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hecl
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0f361d7301
1.Fix SETM robot ArmExtend bugs
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11 months ago |
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hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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11 months ago |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 months ago |
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hecl
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aed602cdc9
1.Add Tru rf/match Reconnect function
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11 months ago |
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hecl
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996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
|
zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 months ago |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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11 months ago |
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hecl
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09a72490a8
1.enhance Tru match logical
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11 months ago |
|
zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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11 months ago |
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zhouhr
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273e8dcfae
fix bug in ShareChiller.
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11 months ago |
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hecl
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7fe748b93a
1.Add Venus DE processdefine content
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11 months ago |
|
zhouhr
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 year ago |
|
hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
|
hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
|
lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
|
lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
|
hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
|
hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
|
hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
|
hecl
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d331213da1
1.SETM Pressure Control update
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1 year ago |
|
hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
|
zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
