 hecl
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df4447c2d2
PMhomeRoutine add VenusDE chambertype
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1 rok temu |
 lixiang
|
feed6f1c8e
修复手动流气bug
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1 rok temu |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 rok temu |
|
lixiang
|
6f2b23125b
再次提交解决Tolerance bug
|
1 rok temu |
|
lixiang
|
8cea3a0063
修复流气tolerance bug
|
1 rok temu |
|
lixiang
|
e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 rok temu |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 rok temu |
|
lixiang
|
8b2a01fcc3
kepler2200配置文件也添加IsEnableEthercat
|
1 rok temu |
|
lixiang
|
d744d950e1
配置文件添加Ethercat开关功能
|
1 rok temu |
|
lixiang
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 rok temu |
|
lixiang
|
08ec6feef2
1.优化数据分析界面颜色选择bug
|
1 rok temu |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 rok temu |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 rok temu |
|
hecl
|
db7e4fc9d5
PMProcessRoutine naming conventions & Lot id record adjustment
|
1 rok temu |
|
hecl
|
2aa8eecc79
Enhancement of PMProcessRoutine recipe processing flow
|
1 rok temu |
|
lixiang
|
fd2d6f9a5c
解决冲突
|
1 rok temu |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 rok temu |
|
hecl
|
fa67219b9f
1.Add automatically update database column codes
|
1 rok temu |
|
hecl
|
56d9a355a8
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 rok temu |
|
hecl
|
091efd8f64
1.enhance PMdataRecord about waferstatus update
|
1 rok temu |
 zhouhr
|
8436daeb68
Eliminate SE generation warning.
|
1 rok temu |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
|
1 rok temu |
|
zhouhr
|
57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
|
1 rok temu |
 sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 rok temu |
|
hecl
|
e2c4a51efe
1.Add VenusDE JetVenusDEPM control
|
1 rok temu |
|
sangwq
|
b71003a42d
Fix the increasing aligner angle out of range bug.
|
1 rok temu |
|
sangwq
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
|
1 rok temu |
|
zhouhr
|
e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
|
1 rok temu |
|
lixiang
|
020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
|
1 rok temu |
|
lixiang
|
fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
|
1 rok temu |
