 zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
10 月之前 |
 lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
11 月之前 |
|
lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
11 月之前 |
 hecl
|
0390869f30
1.Add recipe save as/rename function Messagebox and invalid recipename Messagebox
|
11 月之前 |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
11 月之前 |
|
hecl
|
1a56dd552c
fix bugs
|
11 月之前 |
|
hecl
|
e2836bfbda
1.Chamber DE process enhance
|
11 月之前 |
|
hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 月之前 |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
|
11 月之前 |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 月之前 |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 月之前 |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 年之前 |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
1 年之前 |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
|
1 年之前 |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
1 年之前 |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
1 年之前 |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
1 年之前 |
|
hecl
|
09a72490a8
1.enhance Tru match logical
|
1 年之前 |
|
zhouhr
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
|
1 年之前 |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
|
1 年之前 |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
1 年之前 |
|
zhouhr
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
|
1 年之前 |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 年之前 |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
1 年之前 |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 年之前 |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 年之前 |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 年之前 |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 年之前 |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 年之前 |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 年之前 |
