 lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
il y a 11 mois |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
il y a 11 mois |
 hecl
|
1a56dd552c
fix bugs
|
il y a 11 mois |
|
lixiang
|
9163903164
Kepler2200优化
|
il y a 11 mois |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
il y a 11 mois |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
il y a 1 an |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
il y a 1 an |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
il y a 1 an |
|
hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
il y a 1 an |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
il y a 1 an |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
il y a 1 an |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
il y a 1 an |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
il y a 1 an |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
il y a 1 an |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
il y a 1 an |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
il y a 1 an |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
il y a 1 an |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
il y a 1 an |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
il y a 1 an |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
il y a 1 an |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
|
il y a 1 an |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
il y a 1 an |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
il y a 1 an |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
il y a 1 an |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
il y a 1 an |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
|
il y a 1 an |
|
lixiang
|
f8026cadbc
控压结束动作bug修复
|
il y a 1 an |
|
lixiang
|
967f6b6b9c
添加控压结束，保持一秒流气功能
|
il y a 1 an |
 chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
|
il y a 1 an |
