 lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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11 mēneši atpakaļ |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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11 mēneši atpakaļ |
|
lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mēneši atpakaļ |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 mēneši atpakaļ |
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lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 gadu atpakaļ |
|
lixiang
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52e8bd8f7a
1.优化Home断开重连
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1 gadu atpakaļ |
|
lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 gadu atpakaļ |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 gadu atpakaļ |
 hecl
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8b0b067448
Add chamber ISO valve status
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1 gadu atpakaļ |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 gadu atpakaļ |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 gadu atpakaļ |
|
lixiang
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 gadu atpakaļ |
|
lixiang
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0f905564d0
加入登录界面和权限管理
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1 gadu atpakaļ |
|
lixiang
|
9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 gadu atpakaļ |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
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1 gadu atpakaļ |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 gadu atpakaļ |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 gadu atpakaļ |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 gadu atpakaļ |
|
lixiang
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f8026cadbc
控压结束动作bug修复
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1 gadu atpakaļ |
|
lixiang
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967f6b6b9c
添加控压结束，保持一秒流气功能
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1 gadu atpakaļ |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
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1 gadu atpakaļ |
|
lixiang
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818383115c
UI优化
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1 gadu atpakaļ |
|
lixiang
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e511d1f387
1.添加PM控压功能
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1 gadu atpakaļ |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 gadu atpakaļ |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 gadu atpakaļ |
|
lixiang
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a2426eb90b
Recipe 添加bias step ramp设值功能
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1 gadu atpakaļ |
|
lixiang
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b1e6a9ce63
bug提交
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1 gadu atpakaļ |
|
lixiang
|
649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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1 gadu atpakaļ |
 sangwq
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271930f900
minor change.
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1 gadu atpakaļ |
|
lixiang
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 gadu atpakaļ |
