 sangwq
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f211c4242f
Efem module raw design.
|
2 years ago |
 lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
sangwq
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
sangwq
|
e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
lixiang
|
a268651d10
1.添加configview和部分mfcverificationview
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
|
sangwq
|
a244b205b9
Gas Flow and RF Power routine.
|
2 years ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
lixiang
|
3b8277256c
1.recipeHead添加expand
|
2 years ago |
|
sangwq
|
4e8a55f733
Endpoint Module.
|
2 years ago |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
sangwq
|
0050803370
update process Module
|
2 years ago |
|
lixiang
|
ee80e1676c
解决冲突
|
2 years ago |
|
sangwq
|
0606b882bc
process module 1215
|
2 years ago |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
lixiang
|
96e7a181a9
修改数据库无法连接的bug
|
3 years ago |
|
sangwq
|
3f9c41937a
update for event module enhancement
|
3 years ago |
|
lixiang
|
782eafc783
1.添加log配置文件功能
|
3 years ago |
|
lixiang
|
896c7407de
优化log功能
|
3 years ago |
|
sangwq
|
9760d40cf7
port simulator
|
3 years ago |
