 chenkui
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31a961b749
update Secs-I dlls
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1 year ago |
 hecl
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d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
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1 year ago |
 zhouhr
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7fec2e1d8e
Enhance LOG Module && fix bug in SE UI.
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1 year ago |
 sangwq
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02efc78270
fix the WTWClean bug while PM Swap wafer.
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1 year ago |
|
sangwq
|
dbb753dd44
Pause functionality.
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1 year ago |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 year ago |
|
chenkui
|
0baedd2eb3
更新了Secs-I QueryAllSvids返回SmifData变量
|
1 year ago |
|
chenkui
|
3356cc0e74
增加了Secs-I的类库
|
1 year ago |
|
sangwq
|
a80b5af3fd
enhance manual return wafer algorithm.
|
1 year ago |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 year ago |
 lixiang
|
818383115c
UI优化
|
1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
zhouhr
|
cf4cf64edc
Optimize SEView.
|
1 year ago |
|
hecl
|
1b4faf274b
Improve VenusSE pm viewmodel and vent function
|
1 year ago |
|
zhouhr
|
904ca94945
fix bug in VenusSE PM valve.
|
1 year ago |
|
zhouhr
|
e8e04e07b5
Change cast way by Enum Name for SEPMView.
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
|
zhouhr
|
bcbe6b2cbe
fix bug in PM SlitDoorClosed
|
1 year ago |
|
zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
sangwq
|
ec2f97e62d
enhance log.
|
1 year ago |
|
zhouhr
|
03aefe84d8
enhance configitem search
|
1 year ago |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
1 year ago |
|
zhouhr
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
1 year ago |
 intern02
|
dc8303196b
Added config search function, updated SystemConfigView.xmal and SystemConfigViewModel.cs .
|
1 year ago |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
1 year ago |
|
hecl
|
b277487716
1.Venuse PM Viewmodel update
|
1 year ago |
|
zhouhr
|
724b0ca304
add ReturnWafer for Venus SE.
|
1 year ago |
|
sangwq
|
6ac9eafd1d
FIX minor bug for log.
|
1 year ago |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
1 year ago |
