 lixiang
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 years ago |
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lixiang
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
 sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
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lixiang
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62f1a16025
1.添加PartialPressure界面
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2 years ago |
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lixiang
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e867b47d0c
1.添加VAT VATPerformance和PartialPressure界面及数据对比图标
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2 years ago |
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sangwq
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e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
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lixiang
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7a6556869f
1.整理主界面UI
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2 years ago |
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sangwq
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096c873956
Sequence SPEC update.
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2 years ago |
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lixiang
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e30c3e7c9c
现场调试 ，添加match c1/c2下发功能
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2 years ago |
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lixiang
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1759ebd070
修改rf ui
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2 years ago |
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sangwq
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3e5adf7db8
update rf match adtech.
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2 years ago |
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lixiang
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7c817b8450
将钟摆阀最大值设到1000
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2 years ago |
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sangwq
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6187ad5b4f
Interlock 优化
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2 years ago |
|
lixiang
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1f1fb71be3
1.2023/02/17现场rt代码修改
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2 years ago |
|
lixiang
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78e40e1681
合并
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2 years ago |
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lixiang
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7b919ee3ef
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
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sangwq
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155e2ecfe1
hv update
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2 years ago |
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lixiang
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c2cfe61019
解决安装包会覆盖config等文件夹的问题
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2 years ago |
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sangwq
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3d066278f5
HV update.
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2 years ago |
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sangwq
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75710d35d8
RF Match.
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2 years ago |
|
lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
|
sangwq
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3f8df8cade
DEVICE UPDATE
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2 years ago |
|
lixiang
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b17ae64e6b
1.添加topview LOG显示功能
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2 years ago |
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sangwq
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c4864f5546
debug gas verification.
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2 years ago |
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lixiang
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60d08c1285
1.ui与rt联动功能添加
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2 years ago |
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sangwq
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
