 lixiang
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 year ago |
 zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
818383115c
UI优化
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1 year ago |
 sangwq
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75314148f5
Added Auto Pump/vent option.
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2 years ago |
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sangwq
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2694bdc96c
Enhance the Pre-rotation function
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2 years ago |
|
sangwq
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baeae1636e
TM Robot PreRotation function for particle and throughput issues.
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2 years ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
|
lixiang
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9c33424896
解决冲突
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2 years ago |
|
lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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2 years ago |
|
sangwq
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3f1379ff57
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
|
sangwq
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d49b8f65dd
fix the RouteManager instance initialize bug.
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2 years ago |
|
lixiang
|
1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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2 years ago |
|
sangwq
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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2 years ago |
|
lixiang
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46aa26403c
优化压差开siltdoor功能
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2 years ago |
|
zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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2 years ago |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
 Intern01
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261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
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2 years ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
|
sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
|
2 years ago |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
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2 years ago |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
2 years ago |
