 hecl
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996eacc709
VenusDE recipe tolerance enhance
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1 year ago |
 lixiang
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01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
|
lixiang
|
0f905564d0
加入登录界面和权限管理
|
1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
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1 year ago |
|
lixiang
|
feed6f1c8e
修复手动流气bug
|
1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
|
lixiang
|
34bdc228de
Datalog添加高温Heater温度显示
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
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1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
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1 year ago |
|
lixiang
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
2 years ago |
 Intern01
|
261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
|
2 years ago |
|
lixiang
|
4992e94a4e
代码提交
|
2 years ago |
 zhouhr
|
586b0de7a3
修改alignroutine、AdTecRF、DBModel
|
2 years ago |
|
lixiang
|
546436c2c7
模拟器读取chamber bug修改
|
2 years ago |
|
lixiang
|
7fe847dfd8
1.分开Venus/Kepler OverView界面，之前公用一个Overview界面
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
lixiang
|
e867b47d0c
1.添加VAT VATPerformance和PartialPressure界面及数据对比图标
|
2 years ago |
 sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
cc17390336
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
096c873956
Sequence SPEC update.
|
2 years ago |
|
lixiang
|
fdec3cda1a
现场提交
|
2 years ago |
|
lixiang
|
e30c3e7c9c
现场调试 ，添加match c1/c2下发功能
|
2 years ago |
|
lixiang
|
d56749cbf3
合并代码
|
2 years ago |
|
sangwq
|
57661c7f78
adtech
|
2 years ago |
