 lixiang
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 year ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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1 year ago |
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lixiang
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8d613c7d1f
奈思UI 新版动画
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1 year ago |
 hecl
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f501000473
1.Fix Tru RF/match bugs
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1 year ago |
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hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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1 year ago |
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lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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08e85396fc
1.添加eventview分页功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
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lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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2 years ago |
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lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
 zhouhr
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c71aa92a49
add time on Topview
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2 years ago |
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zhouhr
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4ed3a26b1b
add Combox Style for TM/LoadLock Operation
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2 years ago |
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zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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2 years ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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2 years ago |
 Intern01
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265a3b67bc
TMInterlock update
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2 years ago |
|
Intern01
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aa9669d263
修改TM界面，更新PM IO
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2 years ago |
|
lixiang
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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2 years ago |
|
lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
|
lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
|
lixiang
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1a9114214b
robot place 删除测试代码
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
