LoaderLeakFirstFlowTestRoutine.cs 7.0 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.RT.SCCore;
  5. using MECF.Framework.Common.CommonData.Loader;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Routine;
  8. using CyberX8_Core;
  9. using CyberX8_RT.Devices.AXIS.CANOpen;
  10. using CyberX8_RT.Devices.Loader;
  11. using CyberX8_RT.Modules.Loader;
  12. using System;
  13. using System.Collections.Generic;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. namespace CyberX8_RT.Devices.Loader
  18. {
  19. public class LoaderLeakFirstFlowTestRoutine : RoutineBase, IRoutine
  20. {
  21. private enum LeakFlowTestStep
  22. {
  23. FlowClampOn,
  24. VacuumOn,
  25. Delay,
  26. CheckFlow,
  27. ReadFlow,
  28. FlowClampOff,
  29. VacuumOff,
  30. End
  31. }
  32. #region 内部变量
  33. private LoaderCommonDevice _loaderCommon;
  34. private LoaderSideDevice _loaderSideA;
  35. private LoaderSideDevice _loaderSideB;
  36. private int _checkFlowTime = 10000;
  37. private int _delayms = 100;
  38. private double _major = 400;
  39. private double _minor = 50;
  40. private DateTime _dt = DateTime.Now;
  41. private List<LoaderFlowLotTrackData> _flowDatas = new List<LoaderFlowLotTrackData>();
  42. #endregion
  43. #region 属性
  44. /// <summary>
  45. /// Flow LotTrackData
  46. /// </summary>
  47. public List<LoaderFlowLotTrackData> FlowLotTrackDatas { get { return _flowDatas; } }
  48. #endregion
  49. public LoaderLeakFirstFlowTestRoutine(string module) : base(module)
  50. {
  51. }
  52. public void Abort()
  53. {
  54. Runner.Stop("Manual Abort");
  55. }
  56. public RState Monitor()
  57. {
  58. Runner.Run(LeakFlowTestStep.FlowClampOn, FlowClampOn, _delay_1ms)
  59. .Run(LeakFlowTestStep.VacuumOn, VacuumOn, _delay_1ms)
  60. .Delay(LeakFlowTestStep.Delay,_delayms)
  61. .Run(LeakFlowTestStep.CheckFlow,CheckFirstFlow,100)
  62. .Run(LeakFlowTestStep.ReadFlow,NullFun,CheckComplete,_checkFlowTime,false)
  63. .Run(LeakFlowTestStep.FlowClampOff, FlowClampOff, _delay_1ms)
  64. .Run(LeakFlowTestStep.VacuumOff, VacuumOff, _delay_1ms)
  65. .End(LeakFlowTestStep.End,NullFun);
  66. return Runner.Status;
  67. }
  68. /// <summary>
  69. /// Flow Clamp off
  70. /// </summary>
  71. /// <returns></returns>
  72. private bool FlowClampOff()
  73. {
  74. return _loaderCommon.LeakFlowClampOffAction();
  75. }
  76. /// <summary>
  77. /// Flow Clamp On
  78. /// </summary>
  79. /// <returns></returns>
  80. private bool FlowClampOn()
  81. {
  82. return _loaderCommon.LeakFlowClampOnAction();
  83. }
  84. /// <summary>
  85. /// Vacuum On
  86. /// </summary>
  87. /// <returns></returns>
  88. private bool VacuumOn()
  89. {
  90. return _loaderCommon.LeakVacuumOnAction();
  91. }
  92. /// <summary>
  93. /// Vacuum Off
  94. /// </summary>
  95. /// <returns></returns>
  96. private bool VacuumOff()
  97. {
  98. return _loaderCommon.LeakVacuumOffAction();
  99. }
  100. /// <summary>
  101. /// 确认结束状态
  102. /// </summary>
  103. /// <returns></returns>
  104. private bool CheckEndState()
  105. {
  106. return _loaderCommon.Status == RState.End;
  107. }
  108. /// <summary>
  109. /// 确认第一条数据
  110. /// </summary>
  111. /// <returns></returns>
  112. private bool CheckFirstFlow()
  113. {
  114. if (_loaderCommon.CommonData.LeakFlow < _major)
  115. {
  116. LOG.WriteLog(eEvent.ERR_LOADER, Module.ToString(), $"Flow {_loaderCommon.CommonData.LeakFlow} is less limit {_major}");
  117. return false;
  118. }
  119. else
  120. {
  121. _dt = DateTime.Now;
  122. _flowDatas.Clear();
  123. AddLotTrackData();
  124. return true;
  125. }
  126. }
  127. /// <summary>
  128. /// 获取Lot Track数据
  129. /// </summary>
  130. /// <returns></returns>
  131. private void AddLotTrackData()
  132. {
  133. LoaderFlowLotTrackData data = new LoaderFlowLotTrackData();
  134. data.TimeStamp = DateTime.Now;
  135. data.Time = data.TimeStamp.ToString("mm:ss");
  136. data.LoaderWHClamped = _loaderCommon.CommonData.WaferHolderClamp;
  137. data.LoaderACRSVacuum=_loaderSideA.SideData.CRSVacuum;
  138. data.LoaderACRSVacuumAnlg = _loaderSideA.SideData.CRSVacuumValue;
  139. data.LoaderBCRSVacuum = _loaderSideB.SideData.CRSVacuum;
  140. data.LoaderBCRSVacuumAnlg = _loaderSideB.SideData.CRSVacuumValue;
  141. data.EnableFlowClamp = _loaderCommon.CommonData.LeakFlowClamp;
  142. data.EnableVacuum = _loaderCommon.CommonData.LeakVacuum;
  143. data.FlowValue = _loaderCommon.CommonData.LeakFlow;
  144. _flowDatas.Add(data);
  145. }
  146. /// <summary>
  147. ///
  148. /// </summary>
  149. /// <returns></returns>
  150. private bool CheckComplete()
  151. {
  152. if (DateTime.Now.Subtract(_dt).TotalMilliseconds >= 1000)
  153. {
  154. double flow = _loaderCommon.CommonData.LeakFlow;
  155. _dt = DateTime.Now;
  156. AddLotTrackData();
  157. if (flow < _minor)
  158. {
  159. _loaderCommon.CommonData.FlowValues.AddRange(_flowDatas);
  160. _loaderCommon.ExportFlowLotTrackDatas(_flowDatas);
  161. return true;
  162. }
  163. else
  164. {
  165. return false;
  166. }
  167. }
  168. return false;
  169. }
  170. /// <summary>
  171. /// 启动
  172. /// </summary>
  173. /// <param name="objs"></param>
  174. /// <returns></returns>
  175. public RState Start(params object[] objs)
  176. {
  177. _loaderCommon = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");
  178. _loaderSideA = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideA");
  179. _loaderSideB = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideB");
  180. _loaderCommon.CommonData.FlowValues = new List<LoaderFlowLotTrackData>();
  181. if (SC.ContainsItem($"{Module}.LeakTestCutOffTime"))
  182. {
  183. _checkFlowTime = SC.GetValue<int>($"{Module}.LeakTestCutOffTime");
  184. }
  185. if (SC.ContainsItem($"{Module}.LeakTestLSOKLimit"))
  186. {
  187. _major = SC.GetValue<double>($"{Module}.LeakTestLSOKLimit");
  188. }
  189. if (SC.ContainsItem($"{Module}.LeakTestCutOffValue"))
  190. {
  191. _minor = SC.GetValue<double>($"{Module}.LeakTestCutOffValue");
  192. }
  193. Runner.Start(Module, "LeakFirstFlowTest");
  194. return RState.Running;
  195. }
  196. }
  197. }