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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.CommonData.Loader;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS.CANOpen;
- using CyberX8_RT.Devices.Loader;
- using CyberX8_RT.Modules.Loader;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Devices.Loader
- {
- public class LoaderLeakFirstFlowTestRoutine : RoutineBase, IRoutine
- {
- private enum LeakFlowTestStep
- {
- FlowClampOn,
- VacuumOn,
- Delay,
- CheckFlow,
- ReadFlow,
- FlowClampOff,
- VacuumOff,
- End
- }
- #region 内部变量
- private LoaderCommonDevice _loaderCommon;
- private LoaderSideDevice _loaderSideA;
- private LoaderSideDevice _loaderSideB;
- private int _checkFlowTime = 10000;
- private int _delayms = 100;
- private double _major = 400;
- private double _minor = 50;
- private DateTime _dt = DateTime.Now;
- private List<LoaderFlowLotTrackData> _flowDatas = new List<LoaderFlowLotTrackData>();
- #endregion
- #region 属性
- /// <summary>
- /// Flow LotTrackData
- /// </summary>
- public List<LoaderFlowLotTrackData> FlowLotTrackDatas { get { return _flowDatas; } }
- #endregion
- public LoaderLeakFirstFlowTestRoutine(string module) : base(module)
- {
- }
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- public RState Monitor()
- {
- Runner.Run(LeakFlowTestStep.FlowClampOn, FlowClampOn, _delay_1ms)
- .Run(LeakFlowTestStep.VacuumOn, VacuumOn, _delay_1ms)
- .Delay(LeakFlowTestStep.Delay,_delayms)
- .Run(LeakFlowTestStep.CheckFlow,CheckFirstFlow,100)
- .Run(LeakFlowTestStep.ReadFlow,NullFun,CheckComplete,_checkFlowTime,false)
- .Run(LeakFlowTestStep.FlowClampOff, FlowClampOff, _delay_1ms)
- .Run(LeakFlowTestStep.VacuumOff, VacuumOff, _delay_1ms)
- .End(LeakFlowTestStep.End,NullFun);
- return Runner.Status;
- }
- /// <summary>
- /// Flow Clamp off
- /// </summary>
- /// <returns></returns>
- private bool FlowClampOff()
- {
- return _loaderCommon.LeakFlowClampOffAction();
- }
- /// <summary>
- /// Flow Clamp On
- /// </summary>
- /// <returns></returns>
- private bool FlowClampOn()
- {
- return _loaderCommon.LeakFlowClampOnAction();
- }
- /// <summary>
- /// Vacuum On
- /// </summary>
- /// <returns></returns>
- private bool VacuumOn()
- {
- return _loaderCommon.LeakVacuumOnAction();
- }
- /// <summary>
- /// Vacuum Off
- /// </summary>
- /// <returns></returns>
- private bool VacuumOff()
- {
- return _loaderCommon.LeakVacuumOffAction();
- }
- /// <summary>
- /// 确认结束状态
- /// </summary>
- /// <returns></returns>
- private bool CheckEndState()
- {
- return _loaderCommon.Status == RState.End;
- }
- /// <summary>
- /// 确认第一条数据
- /// </summary>
- /// <returns></returns>
- private bool CheckFirstFlow()
- {
- if (_loaderCommon.CommonData.LeakFlow < _major)
- {
- LOG.WriteLog(eEvent.ERR_LOADER, Module.ToString(), $"Flow {_loaderCommon.CommonData.LeakFlow} is less limit {_major}");
- return false;
- }
- else
- {
- _dt = DateTime.Now;
- _flowDatas.Clear();
- AddLotTrackData();
- return true;
- }
- }
- /// <summary>
- /// 获取Lot Track数据
- /// </summary>
- /// <returns></returns>
- private void AddLotTrackData()
- {
-
- LoaderFlowLotTrackData data = new LoaderFlowLotTrackData();
- data.TimeStamp = DateTime.Now;
- data.Time = data.TimeStamp.ToString("mm:ss");
- data.LoaderWHClamped = _loaderCommon.CommonData.WaferHolderClamp;
- data.LoaderACRSVacuum=_loaderSideA.SideData.CRSVacuum;
- data.LoaderACRSVacuumAnlg = _loaderSideA.SideData.CRSVacuumValue;
-
- data.LoaderBCRSVacuum = _loaderSideB.SideData.CRSVacuum;
- data.LoaderBCRSVacuumAnlg = _loaderSideB.SideData.CRSVacuumValue;
- data.EnableFlowClamp = _loaderCommon.CommonData.LeakFlowClamp;
- data.EnableVacuum = _loaderCommon.CommonData.LeakVacuum;
- data.FlowValue = _loaderCommon.CommonData.LeakFlow;
- _flowDatas.Add(data);
- }
- /// <summary>
- ///
- /// </summary>
- /// <returns></returns>
- private bool CheckComplete()
- {
- if (DateTime.Now.Subtract(_dt).TotalMilliseconds >= 1000)
- {
- double flow = _loaderCommon.CommonData.LeakFlow;
- _dt = DateTime.Now;
- AddLotTrackData();
- if (flow < _minor)
- {
- _loaderCommon.CommonData.FlowValues.AddRange(_flowDatas);
- _loaderCommon.ExportFlowLotTrackDatas(_flowDatas);
- return true;
- }
- else
- {
- return false;
- }
- }
- return false;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _loaderCommon = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");
- _loaderSideA = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideA");
- _loaderSideB = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideB");
- _loaderCommon.CommonData.FlowValues = new List<LoaderFlowLotTrackData>();
- if (SC.ContainsItem($"{Module}.LeakTestCutOffTime"))
- {
- _checkFlowTime = SC.GetValue<int>($"{Module}.LeakTestCutOffTime");
- }
- if (SC.ContainsItem($"{Module}.LeakTestLSOKLimit"))
- {
- _major = SC.GetValue<double>($"{Module}.LeakTestLSOKLimit");
- }
- if (SC.ContainsItem($"{Module}.LeakTestCutOffValue"))
- {
- _minor = SC.GetValue<double>($"{Module}.LeakTestCutOffValue");
- }
- Runner.Start(Module, "LeakFirstFlowTest");
- return RState.Running;
- }
- }
- }
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