| .. |
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LoaderCRSAxisInterLock.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderCommonDevice.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderCommonWaferHolderSideClampRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderDeviceTimer.cs
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e4fd0ff15a
update swing to shuttle
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5 months ago |
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LoaderFlowTestRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderInstallCRSRoutine.cs
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715c26c896
Revise LoaderInstallCRS and LoaderRotationAxisInterLock;
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4 months ago |
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LoaderLeakFirstFlowTestRoutine.cs
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f7533a737b
Initialize
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5 months ago |
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LoaderLoadRoutine.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderLotTrackUtil.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderPreTransferUnclampRoutine.cs
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f7533a737b
Initialize
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5 months ago |
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LoaderReLeakFlowTestRoutine.cs
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f7533a737b
Initialize
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5 months ago |
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LoaderRotationAxisInterLock.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderShuttleAxisInterLock.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderSideBernoulliBladderRoutine.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderSideBernoulliN2PressureRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderSideCycleRoutine.cs
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f7533a737b
Initialize
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5 months ago |
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LoaderSideDevice.cs
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d1f3ab2204
Revise BernoulliN2 action
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4 months ago |
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LoaderSideDoorLockRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderSideTransBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderSideTransHighRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderSideUnloadVacuumLevelCheckRoutine.cs
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f7533a737b
Initialize
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5 months ago |
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LoaderSideVacuumAndLevelCheckRoutineRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderSideVacuumLevelCheckRoutine.cs
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7cd95698ba
Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine;
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4 months ago |
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LoaderSideVacuumRoutine.cs
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31c26804e6
add Festo Communication Protocol
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5 months ago |
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LoaderSideWhBladderRoutine.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderTiltAxisInterLock.cs
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6551c6c1b7
update galil axis
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4 months ago |
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LoaderUnloadRoutine.cs
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ca10919375
Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine;
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5 months ago |
