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Buffer
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8c811f7802
update double wafers scheduler
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hai 4 semanas |
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Dryer
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6497945cbe
Revise jobcreate and lottrack bugs;
|
hai 3 semanas |
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Dummy
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f7533a737b
Initialize
|
hai 2 meses |
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EFEM
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171e04deeb
update efem
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hai 1 semana |
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LPs
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c695867e44
update loadport status
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hai 3 semanas |
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Loader
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6bd8541e2b
Modify LoaderLotTrack; Modify Thornton simulator;
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hai 1 semana |
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Metal
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ccde2b587e
revise metal loop run recipe ，add TC monitor，revise pump flow scaling
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hai 1 semana |
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PUF
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2bf0be7542
update loader waferSize
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hai 1 semana |
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Prewet
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d637aec5ae
Revise SRDHome, PrewetKeepwet;
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hai 1 semana |
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Reservoir
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69039a19fc
revise reservoir/metal initialize usage monitro
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hai 1 semana |
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Rinse
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2bf0be7542
update loader waferSize
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hai 1 semana |
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SRD
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72f614e1ff
Add SRD Flipper Animation;
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hai 1 semana |
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Transporter
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4e761b030f
update async scheduler
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hai 3 semanas |
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Autotransfer_LP_FA.cs
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f7533a737b
Initialize
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hai 2 meses |
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DVIDName.cs
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f7533a737b
Initialize
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hai 2 meses |
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EntityTaskBase.cs
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f7533a737b
Initialize
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hai 2 meses |
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FaModuleNotifier.cs
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f7533a737b
Initialize
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hai 2 meses |
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FaRemoteManager.cs
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371876b350
add robot map routine
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hai 2 meses |
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ManualTransfer.cs
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f7533a737b
Initialize
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hai 2 meses |
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ModuleHomeAllRoutine.cs
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7849fa3cd1
update scheduler
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hai 1 mes |
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ReservoirMetalHomeRoutine.cs
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f7533a737b
Initialize
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hai 2 meses |
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ResourceMonitor.cs
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f7533a737b
Initialize
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hai 2 meses |
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RouteManager.cs
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4feb75325b
update ui log
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hai 1 semana |
chenkui
171e04deeb
update efem