 chenkui
|
2bf0be7542
update loader waferSize
|
2 mesi fa |
|
chenkui
|
1993396b13
update install crs routine
|
2 mesi fa |
|
chenkui
|
3e276c414d
update System.sccfg
|
2 mesi fa |
 niuyx
|
003e0db28b
Modify GalilSimualtor and Loader InstallCRS；
|
3 mesi fa |
|
chenkui
|
4c2922bfe9
update puf interlock
|
3 mesi fa |
|
niuyx
|
715c26c896
Revise LoaderInstallCRS and LoaderRotationAxisInterLock;
|
4 mesi fa |
|
niuyx
|
ca10919375
Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine;
|
4 mesi fa |
|
chenkui
|
e4fd0ff15a
update swing to shuttle
|
4 mesi fa |
|
chenkui
|
31c26804e6
add Festo Communication Protocol
|
4 mesi fa |
|
chenkui
|
f7533a737b
Initialize
|
5 mesi fa |
