 chenzk
|
ccde2b587e
revise metal loop run recipe ，add TC monitor，revise pump flow scaling
|
2 months ago |
|
chenzk
|
c0bc387d9f
revise TC connect judgement
|
2 months ago |
|
chenzk
|
a2948247a7
revise reservoir pump structure
|
2 months ago |
 chenkui
|
76a2644a3d
update scheduler issue
|
2 months ago |
|
chenzk
|
06957818cb
revise reservoir ph bug
|
2 months ago |
|
chenkui
|
1993396b13
update install crs routine
|
3 months ago |
|
chenzk
|
e2dd985b02
reverse reservoir initialize routine
|
3 months ago |
|
chenzk
|
2b887d9e15
add reservoir regulate pump
|
3 months ago |
|
chenzk
|
8714d1f457
revise reservoir config
|
3 months ago |
|
chenzk
|
dce33ff7d5
revise reservoir/metal
|
3 months ago |
|
chenzk
|
f34c069c2e
revise UI
|
3 months ago |
|
chenkui
|
abb9a9350a
update scheduler puf parameter
|
3 months ago |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
3 months ago |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
3 months ago |
|
chenzk
|
278d4fa71e
revise wago simulator bug
|
3 months ago |
|
chenkui
|
0aabb32d23
update galil axis
|
3 months ago |
|
chenkui
|
4c2922bfe9
update puf interlock
|
3 months ago |
|
chenkui
|
478aa5ec7f
update puf view
|
3 months ago |
|
chenkui
|
63d3440eab
update SunWayRobot
|
4 months ago |
|
chenkui
|
56c86c7a9c
update Efem MapRoutine
|
4 months ago |
|
chenkui
|
f7533a737b
Initialize
|
5 months ago |
