 chenzk
|
5df7250a7f
add efem lock UI， add gold power set simulator
|
5 months ago |
 chenkui
|
2d871310d2
update top/operation over view UI
|
5 months ago |
|
chenkui
|
be3b324847
update EFEM UI;
|
5 months ago |
|
chenkui
|
6b3c82ab53
add gold power supplier
|
5 months ago |
|
chenkui
|
0b609ee2cd
add EFEM DoorLocked signal
|
6 months ago |
|
chenkui
|
f9b098dace
update job cycle null point issue
|
6 months ago |
|
chenkui
|
29c96242de
add gold power supplier
|
6 months ago |
|
chenkui
|
90d84749d5
add gold powersupplier
|
6 months ago |
 niuyx
|
6550cc0e88
Add Manual KeepWet LotTrack;
|
6 months ago |
|
niuyx
|
0552a2280b
Add LotTrack in KeepWet; Revise LS Type display Bug in SequenceRecipeView;
|
6 months ago |
|
chenkui
|
2facb74aa2
add QDR Prewet function;
|
6 months ago |
|
chenzk
|
8324f5d834
add X12 Update to X8
|
6 months ago |
|
chenkui
|
2a9a5325f5
modify error code
|
6 months ago |
|
chenkui
|
0d497c6f55
PUF/Loader/Transport check all axis is homed then enter idle state
|
6 months ago |
|
chenzk
|
a26e8b105c
revise log language to english
|
6 months ago |
|
chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
6 months ago |
|
niuyx
|
df512361d7
Add PlatType selectedItem in SequenceRecipeView;
|
6 months ago |
|
chenkui
|
3c2229df11
add SchedulerAligner plat type
|
6 months ago |
|
chenkui
|
81f8544042
add Aligner plat type
|
6 months ago |
 guojun
|
19baa37c08
DER增加化学液Au配置项
|
6 months ago |
|
guojun
|
6a380710f4
修改exhaust风机范围
|
6 months ago |
|
chenzk
|
3a1e04c83d
add reservoir safety high monitor
|
6 months ago |
|
niuyx
|
197aa5b250
Revise SRD chuckVacuum and liftup precondition;
|
6 months ago |
|
niuyx
|
872e30ee95
Add Metal Animation; Modify several UI displays;
|
6 months ago |
|
chenkui
|
171e04deeb
update efem
|
6 months ago |
|
chenzk
|
ad0f7a04a5
revise reservoir low level bug
|
6 months ago |
|
niuyx
|
6bd8541e2b
Modify LoaderLotTrack; Modify Thornton simulator;
|
6 months ago |
|
chenkui
|
8982c26465
update logManager and remove GalilControllerCfgManager simulator log
|
6 months ago |
|
chenzk
|
ccde2b587e
revise metal loop run recipe ，add TC monitor，revise pump flow scaling
|
6 months ago |
|
chenzk
|
2446ffa7f9
revise metal ui bug
|
6 months ago |
