 chenkui
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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1 maand geleden |
|
chenkui
|
81f8544042
add Aligner plat type
|
2 maanden geleden |
|
chenkui
|
171e04deeb
update efem
|
2 maanden geleden |
|
chenkui
|
fd18176c06
update galil axis
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2 maanden geleden |
|
chenkui
|
c525a0bcf3
update efem vacuum
|
2 maanden geleden |
|
chenkui
|
1fba73d760
update axis run judger
|
3 maanden geleden |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
3 maanden geleden |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
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3 maanden geleden |
|
chenkui
|
e9e0bd7d47
update robot cycle
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3 maanden geleden |
 chenzk
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3c848ec44f
revise robotcycle bug,add efem simulator
|
3 maanden geleden |
|
chenzk
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9aa3738300
add robot cycle(exclude srd)
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3 maanden geleden |
|
chenkui
|
371876b350
add robot map routine
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4 maanden geleden |
|
chenkui
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f7533a737b
Initialize
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5 maanden geleden |
