 chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
hai 1 mes |
|
chenkui
|
81f8544042
add Aligner plat type
|
hai 2 meses |
|
chenkui
|
171e04deeb
update efem
|
hai 2 meses |
|
chenkui
|
fd18176c06
update galil axis
|
hai 2 meses |
|
chenkui
|
c525a0bcf3
update efem vacuum
|
hai 2 meses |
|
chenkui
|
1fba73d760
update axis run judger
|
hai 3 meses |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
hai 3 meses |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
hai 3 meses |
|
chenkui
|
e9e0bd7d47
update robot cycle
|
hai 3 meses |
 chenzk
|
3c848ec44f
revise robotcycle bug,add efem simulator
|
hai 3 meses |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
hai 3 meses |
|
chenkui
|
371876b350
add robot map routine
|
hai 4 meses |
|
chenkui
|
f7533a737b
Initialize
|
hai 5 meses |
