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@@ -131,12 +131,18 @@ namespace FurnaceRT.Equipments.PMs
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{
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if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
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{
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+ if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
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+ {
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+ return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
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+
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+ }
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return _n2PurgeData;
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}
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if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
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{
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return _n2ToAirData;
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}
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+
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return ConcentrationO2.Value;
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}
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private void SetN2PurgeModeAction(string selectN2PurgeMode)
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