fix N2purge模式下进行 fims load展示foup limitData

Furnace/FurnaceRT/Equipments/PMs/PMN2Purge.cs

@@ -131,12 +131,18 @@ namespace FurnaceRT.Equipments.PMs
         {
             if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
             {
+                if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
+                {
+                    return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
+
+                }
                 return _n2PurgeData;
             }
             if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
             {
                 return _n2ToAirData;
             }
+       
             return ConcentrationO2.Value;
         }
         private void SetN2PurgeModeAction(string selectN2PurgeMode)