PMN2Purge.cs 28 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Extraction;
  13. using MECF.Framework.Common.CommonData.SorterDefines;
  14. using MECF.Framework.Common.Equipment;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  16. using System;
  17. using System.Collections.Generic;
  18. using System.Diagnostics;
  19. namespace FurnaceRT.Equipments.PMs
  20. {
  21. /// <summary>
  22. /// 分布类 定义N2Purge的执行逻辑
  23. /// </summary>
  24. public partial class PMModule
  25. {
  26. private R_TRIG _trigN2UpRD = new R_TRIG();
  27. private R_TRIG _trigN2DownRD = new R_TRIG();
  28. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  29. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  30. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  31. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  32. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  33. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  34. private Dictionary<string, R_TRIG> _rTrigDict;
  35. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  36. private double _n2PurgeData = 20;
  37. private double _n2ToAirData = 185000;
  38. private N2PurgeModeEnum _currentPhase;
  39. private double _manualPhase2StabilityTime = 0;
  40. private double _manualPhase4StabilityTime = 0;
  41. private bool _enableAbortN2purge = true;
  42. private int _phase1CycleCount = 0;
  43. private int _phase1CycleCountSC = 0;
  44. private bool _canSwitchToPhase2 = true;
  45. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  46. private void InitN2PurgeData()
  47. {
  48. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  49. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  50. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  51. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  52. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  53. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  54. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  55. {
  56. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  57. {
  58. SetN2PurgeModeAction(selectN2PurgeMode);
  59. }
  60. }
  61. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  62. if (!string.IsNullOrEmpty(currentPhase))
  63. {
  64. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  65. _currentPhase = enumCurrentPhase;
  66. }
  67. }
  68. private void InitN2PurgeConfigData()
  69. {
  70. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  71. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  72. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  73. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  74. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  75. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  76. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  77. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  78. {
  79. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  80. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  81. {"AIR",()=> GetN2PurgeAIRStatus()},
  82. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  83. {"Foup1",()=> GetN2PurgeFoup1Status()},
  84. {"Foup2",()=> GetN2PurgeFoup2Status()},
  85. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  86. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  87. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  88. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  89. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  90. };
  91. _allTimeDict = new Dictionary<string, Stopwatch>()
  92. {
  93. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  94. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  95. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  96. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  97. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  98. };
  99. _rTrigDict = new Dictionary<string, R_TRIG>();
  100. }
  101. private void MonitorN2Purge()
  102. {
  103. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  104. if (string.IsNullOrEmpty(selectN2PurgeMode))
  105. {
  106. return;
  107. }
  108. SetN2PurgeModeAction(selectN2PurgeMode);
  109. }
  110. private double GetN2PurgeLimitData()
  111. {
  112. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  113. {
  114. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  115. {
  116. return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
  117. }
  118. return _n2PurgeData;
  119. }
  120. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  121. {
  122. return _n2ToAirData;
  123. }
  124. return ConcentrationO2.Value;
  125. }
  126. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  127. {
  128. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  129. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  130. {
  131. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  132. {
  133. if (CheckN2PurgePhase2() && _canSwitchToPhase2)
  134. {
  135. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  136. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  137. }
  138. }
  139. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  140. {
  141. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  142. {
  143. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  144. }
  145. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  146. if (second >= _manualPhase2StabilityTime)
  147. {
  148. if (CheckN2PurgePhase1())
  149. {
  150. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  151. N2PurgeFaileAlarm.Set();
  152. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  153. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  154. _canSwitchToPhase2 = false;
  155. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  156. }
  157. if (CheckN2PurgePhase2())
  158. {
  159. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  160. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  161. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  162. _canSwitchToPhase2 = false;
  163. }
  164. }
  165. }
  166. else
  167. {
  168. if (CheckN2PurgePhase1())
  169. {
  170. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  171. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  172. }
  173. else if (CheckN2PurgePhase2())
  174. {
  175. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  176. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  177. }
  178. }
  179. }
  180. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  181. {
  182. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  183. {
  184. var checkResult = CheckN2PurgePhase4();
  185. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  186. {
  187. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  188. }
  189. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  190. if (second >= _manualPhase4StabilityTime && checkResult)
  191. {
  192. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  193. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  194. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  195. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  196. }
  197. }
  198. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  199. {
  200. if (CheckN2PurgePhase5())
  201. {
  202. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  203. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  204. }
  205. //if (CheckN2PurgePhase3( ))
  206. //{
  207. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  208. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  209. //}
  210. }
  211. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  212. {
  213. if (CheckN2PurgePhase4())
  214. {
  215. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  216. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  217. }
  218. //if (CheckN2PurgePhase3( ))
  219. //{
  220. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  221. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  222. //}
  223. }
  224. else
  225. {
  226. if (CheckN2PurgePhase3())
  227. {
  228. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  229. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  230. return;
  231. }
  232. if (CheckN2PurgePhase5())
  233. {
  234. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  235. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  236. return;
  237. }
  238. if (CheckN2PurgePhase4())
  239. {
  240. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  241. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  242. return;
  243. }
  244. }
  245. }
  246. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  247. {
  248. _currentPhase = _N2PurgeMode;
  249. }
  250. //switch (_N2PurgeMode)
  251. //{
  252. // case N2PurgeModeEnum.Auto:
  253. // // 自动模式下的操作
  254. // break;
  255. // case N2PurgeModeEnum.ManualMode:
  256. // break;
  257. // case N2PurgeModeEnum.N2PurgeMode:
  258. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  259. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  260. // break;
  261. // case N2PurgeModeEnum.ATMMode:
  262. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  263. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  264. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  265. // break;
  266. //}
  267. }
  268. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  269. {
  270. var stopwatch = _allTimeDict[modeKey];
  271. if (!_allTimeDict[modeKey].IsRunning)
  272. {
  273. _allTimeDict[modeKey].Restart();
  274. }
  275. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  276. {
  277. if (!_allTimeDict[modeKey].IsRunning)
  278. {
  279. return true;
  280. }
  281. if (!condition())
  282. {
  283. _allTimeDict[modeKey].Stop();
  284. _allTimeDict[modeKey].Reset();
  285. return false;
  286. }
  287. }
  288. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  289. {
  290. _allTimeDict[modeKey].Stop();
  291. _allTimeDict[modeKey].Reset();
  292. }
  293. return true;
  294. }
  295. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  296. {
  297. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  298. if (r_TRIG.Q)
  299. {
  300. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  301. SetN2PurgeValveData(modeKey);
  302. _allTimeDict[modeKey].Stop();
  303. _allTimeDict[modeKey].Reset();
  304. }
  305. }
  306. public void RestAllN2PrugeRD()
  307. {
  308. _trigN2AirDownRD.RST = false;
  309. _trigN2AirUpRD.RST = false;
  310. _trigN2DownRD.RST = false;
  311. _trigN2UpRD.RST = false;
  312. foreach (var item in _allTimeDict)
  313. {
  314. item.Value.Stop();
  315. item.Value.Reset();
  316. }
  317. _canSwitchToPhase2 = true;
  318. }
  319. private void SetN2PurgeValveData(string mode, string msg = "")
  320. {
  321. var value = _n2PurgeSequenceAction[mode];
  322. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  323. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  324. {
  325. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  326. }
  327. foreach (var operateItem in value.Item2)
  328. {
  329. if (operateItem.Item1 is IoMFC)
  330. {
  331. var ioMFc = (operateItem.Item1 as IoMFC);
  332. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  333. }
  334. if (operateItem.Item1 is IoValve)
  335. {
  336. var ioValve = (operateItem.Item1 as IoValve);
  337. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  338. }
  339. if (operateItem.Item1 is IoTrigger)
  340. {
  341. var ioTrigger = (operateItem.Item1 as IoTrigger);
  342. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  343. }
  344. }
  345. }
  346. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  347. {
  348. reason = string.Empty;
  349. var mode = param[0].ToString();
  350. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  351. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  352. {
  353. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  354. }
  355. RestAllN2PrugeRD();
  356. return true;
  357. }
  358. /// <summary>
  359. /// 获取当前O2检测位置的设定值
  360. /// </summary>
  361. /// <returns></returns>
  362. private string GetO2SetCheckSetPoint()
  363. {
  364. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  365. {
  366. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  367. if (SC.ContainsItem(key))
  368. return SC.GetValue<double>(key).ToString("f3");
  369. }
  370. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  371. {
  372. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  373. if (SC.ContainsItem(key))
  374. return SC.GetValue<double>(key).ToString("f3");
  375. }
  376. return "";
  377. }
  378. /// <summary>
  379. /// 获取当前O2检测位置
  380. /// </summary>
  381. /// <returns></returns>
  382. private string GetCheckO2Location()
  383. {
  384. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  385. return SensorO2DetectSideLA.Display;
  386. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  387. return SensorO2DetectSideFIMS1.Display;
  388. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  389. return SensorO2DetectSideFIMS2.Display;
  390. return "";
  391. }
  392. /// <summary>
  393. /// 获取当前O2浓度
  394. /// </summary>
  395. /// <returns></returns>
  396. private bool CheckN2PurgePhase1()
  397. {
  398. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus();
  399. }
  400. private bool CheckN2PurgePhase2()
  401. {
  402. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus();
  403. }
  404. private bool CheckN2PurgePhase3()
  405. {
  406. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus();
  407. }
  408. private bool CheckN2PurgePhase5()
  409. {
  410. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus();
  411. }
  412. private bool CheckN2PurgePhase4()
  413. {
  414. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus();
  415. }
  416. private bool GetN2PurgeAIRTo20PPMStatus()
  417. {
  418. return ValveAV202.DOOpen.Value;
  419. }
  420. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  421. {
  422. return ConcentrationO2.Value < value;
  423. }
  424. private bool GetN2PurgeAIRStatus()
  425. {
  426. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  427. }
  428. private bool GetLADoorOpenStatus()
  429. {
  430. return (bool)(SensorLADoorSw1?.Value);
  431. }
  432. private bool GetN2PurgeDoorOpenStatus()
  433. {
  434. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  435. }
  436. private bool GetN2PurgeFoup1Status()
  437. {
  438. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  439. }
  440. private bool GetN2PurgeFoup2Status()
  441. {
  442. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  443. }
  444. public bool IsAbortN2purge()
  445. {
  446. if (!_enableAbortN2purge)
  447. {
  448. return false;
  449. }
  450. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  451. {
  452. return true;
  453. }
  454. return false;
  455. }
  456. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  457. {
  458. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  459. {
  460. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  461. }
  462. }
  463. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  464. {
  465. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  466. {
  467. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  468. }
  469. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  470. {
  471. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  472. }
  473. }
  474. public void SetN2PurgeProcess(bool isEable)
  475. {
  476. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  477. {
  478. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  479. }
  480. }
  481. public void SetN2PurgeLAO2CheckSV(float value)
  482. {
  483. if (TrigN2PurgeLAO2CheckSV != null)
  484. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  485. }
  486. public void SetN2PurgeFOUPO2CheckSV(float value)
  487. {
  488. if (TrigN2PurgeFOUPO2CheckSV != null)
  489. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  490. }
  491. public bool FIMSLoadCheckLAO2(out string reason)
  492. {
  493. var scLAO2 = (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV");
  494. reason = $"LA O2 concentration has not reached below {scLAO2}ppm";
  495. if (SensorO2DetectSideLA == null || !SensorO2DetectSideLA.Value)
  496. {
  497. reason = $"Oxygen analyzer not switched to LA";
  498. return false;
  499. }
  500. return ((int)(ConcentrationO2.Value)) < scLAO2;
  501. }
  502. public void SetAVParameter(ModuleName fims, bool isEable)
  503. {
  504. if (fims == ModuleName.FIMS1)
  505. {
  506. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  507. avValve58?.TurnValve(isEable, out _);
  508. }
  509. if (fims == ModuleName.FIMS2)
  510. {
  511. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  512. avValve59?.TurnValve(isEable, out _);
  513. }
  514. }
  515. /// <summary>
  516. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  517. /// </summary>
  518. public void SetN2PurgeParameters()
  519. {
  520. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  521. {
  522. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  523. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  524. }
  525. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  526. {
  527. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  528. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  529. }
  530. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  531. {
  532. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  533. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  534. }
  535. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  536. {
  537. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  538. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  539. }
  540. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  541. {
  542. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  543. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  544. }
  545. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  546. {
  547. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  548. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  549. }
  550. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  551. {
  552. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  553. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  554. }
  555. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  556. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  557. }
  558. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  559. {
  560. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  561. {
  562. if (!isN2Purge)
  563. {
  564. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  565. }
  566. else
  567. {
  568. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  569. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  570. }
  571. RestAllN2PrugeRD();
  572. }
  573. }
  574. }
  575. }