FIMSUnloadRoutine.cs 6.4 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191
  1. using Aitex.Core.RT.Event;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using FurnaceRT.Equipments.PMs;
  6. using FurnaceRT.Equipments.Systems;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. namespace FurnaceRT.Equipments.FIMSs
  11. {
  12. public class FIMSUnloadRoutine : ModuleRoutine, IRoutine
  13. {
  14. enum RoutineStep
  15. {
  16. Unload,
  17. Delay,
  18. CheckUnloadFinish,
  19. }
  20. private int _timeout;
  21. private FIMSModule _fimsModule;
  22. private PMModule _pmModule;
  23. private bool _isNeedN2Purge;
  24. public FIMSUnloadRoutine(FIMSModule fimsModule)
  25. {
  26. Module = fimsModule.Module.ToString();
  27. _fimsModule = fimsModule;
  28. Name = "Unload";
  29. _pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  30. }
  31. public Result Init(bool isNeedN2Purge)
  32. {
  33. _isNeedN2Purge = isNeedN2Purge;
  34. return Result.DONE;
  35. }
  36. public Result Start(params object[] objs)
  37. {
  38. Reset();
  39. _timeout = SC.GetValue<int>($"FIMS.{Module}.MotionTimeout");
  40. if (_fimsModule.FIMSDevice.IsUnloadCompleted)
  41. {
  42. EV.PostInfoLog(Module, $"{Module} already at unload position");
  43. _fimsModule.FIMSDevice.IsLoadCompleted = false;
  44. _fimsModule.FIMSDevice.IsUnloadCompleted = true;
  45. return Result.DONE;
  46. }
  47. if (!Singleton<EquipmentManager>.Instance.IsAutoMode && !Singleton<EquipmentManager>.Instance.IsReturnWafer)
  48. {
  49. if (!_fimsModule.SensorWaferRobotEX1AxisHomePosition.Value)
  50. {
  51. _fimsModule.UnloadFailAlarm.Set($"wafer robot EX1 axis not at home position");
  52. return Result.FAIL;
  53. }
  54. if (!_fimsModule.SensorWaferRobotEX2AxisHomePosition.Value)
  55. {
  56. _fimsModule.UnloadFailAlarm.Set($"wafer robot EX2 axis not at home position");
  57. return Result.FAIL;
  58. }
  59. }
  60. //if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Open && _fimsModule.IsWaferOnRobot)
  61. //{
  62. // _fimsModule.UnloadFailAlarm.Set($"wafer robot inside {Module}");
  63. // return Result.FAIL;
  64. //}
  65. Notify($"{_fimsModule.Name} {Name} start");
  66. _fimsModule.FIMSDevice.IsLoadCompleted = false;
  67. _fimsModule.FIMSDevice.IsUnloadCompleted = false;
  68. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
  69. {
  70. _timeout = (int)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  71. }
  72. if (_fimsModule.IsWaferOnRobot)
  73. {
  74. _fimsModule.UnloadFailAlarm.Set($"The wafer on {Module} has shifted");
  75. return Result.FAIL;
  76. }
  77. if (_isNeedN2Purge)
  78. _pmModule?.SetN2PurgeParameters();
  79. return Result.RUN;
  80. }
  81. public override Result Monitor()
  82. {
  83. try
  84. {
  85. PauseRountine(_fimsModule.FIMSDevice.IsPause);
  86. if (_fimsModule.FIMSDevice.IsPause)
  87. return Result.RUN;
  88. Unload((int)RoutineStep.Unload, _timeout);
  89. Delay((int)RoutineStep.Delay, 3);
  90. CheckUnloadFinish((int)RoutineStep.CheckUnloadFinish, _timeout);
  91. }
  92. catch (RoutineBreakException)
  93. {
  94. return Result.RUN;
  95. }
  96. catch (RoutineFaildException)
  97. {
  98. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
  99. _fimsModule.Stop();
  100. return Result.FAIL;
  101. }
  102. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
  103. _fimsModule.FIMSDevice.IsUnloadCompleted = true;
  104. _fimsModule.Stop();
  105. Notify($"{_fimsModule.Name} {Name} finished");
  106. return Result.DONE;
  107. }
  108. public void Abort()
  109. {
  110. _fimsModule.Stop();
  111. }
  112. private void Unload(int id, int timeout)
  113. {
  114. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  115. {
  116. Notify($"{Module} unload");
  117. if (!_fimsModule.FIMSDevice.Unload(out string reason))
  118. {
  119. Stop(reason);
  120. return false;
  121. }
  122. return true;
  123. }, () =>
  124. {
  125. return true;
  126. }, timeout * 1000);
  127. if (ret.Item1)
  128. {
  129. if (ret.Item2 == Result.FAIL)
  130. {
  131. throw (new RoutineFaildException());
  132. }
  133. else if (ret.Item2 == Result.TIMEOUT) //timeout
  134. {
  135. _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
  136. throw (new RoutineFaildException());
  137. }
  138. else
  139. throw (new RoutineBreakException());
  140. }
  141. }
  142. private void CheckUnloadFinish(int id, int timeout)
  143. {
  144. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  145. {
  146. Notify($"Check {Module} unload finish");
  147. return true;
  148. }, () =>
  149. {
  150. return _fimsModule.FIMSDevice.IsPLCUnloadCompleted && !_fimsModule.FIMSDevice.IsRunning;
  151. }, timeout * 1000);
  152. if (ret.Item1)
  153. {
  154. if (ret.Item2 == Result.FAIL)
  155. {
  156. throw (new RoutineFaildException());
  157. }
  158. else if (ret.Item2 == Result.TIMEOUT) //timeout
  159. {
  160. _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
  161. throw (new RoutineFaildException());
  162. }
  163. else
  164. throw (new RoutineBreakException());
  165. }
  166. }
  167. }
  168. }