FIMSModule.cs 21 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Device.Unit;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.Fsm;
  7. using Aitex.Core.RT.Log;
  8. using Aitex.Core.RT.OperationCenter;
  9. using Aitex.Core.RT.Routine;
  10. using Aitex.Core.RT.SCCore;
  11. using Aitex.Core.Util;
  12. using Aitex.Core.Utilities;
  13. using Aitex.Sorter.Common;
  14. using FurnaceRT.Equipments.PMs;
  15. using FurnaceRT.Equipments.Systems;
  16. using MECF.Framework.Common.Alarms;
  17. using MECF.Framework.Common.Device.Bases;
  18. using MECF.Framework.Common.Equipment;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using System;
  22. using System.Collections.Generic;
  23. using System.Linq;
  24. using System.Text;
  25. using System.Threading.Tasks;
  26. namespace FurnaceRT.Equipments.FIMSs
  27. {
  28. public partial class FIMSModule : FIMSModuleBase
  29. {
  30. public enum STATE
  31. {
  32. NotInstall,
  33. NotConnected,
  34. Idle,
  35. Error,
  36. Init,
  37. Homing,
  38. Unloading,
  39. Loading,
  40. Cycle,
  41. InTransfer,
  42. }
  43. public enum MSG
  44. {
  45. Home,
  46. Disconnected,
  47. Connected,
  48. Reset,
  49. Abort,
  50. Error,
  51. InTransfer,
  52. Cycle,
  53. TransferComplete,
  54. Load,
  55. Unload,
  56. LoadRetry,
  57. UnloadRetry,
  58. }
  59. public override bool IsReady
  60. {
  61. get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
  62. }
  63. public override bool IsError
  64. {
  65. get
  66. {
  67. return FsmState == (int)STATE.Error;
  68. }
  69. }
  70. public override bool IsInit
  71. {
  72. get { return false; }
  73. }
  74. public bool IsFoupExist => FIMSDevice != null ? FIMSDevice.IsFoupExist : false;
  75. public bool IsLoading
  76. {
  77. get
  78. {
  79. return FsmState == (int)STATE.Loading;
  80. }
  81. }
  82. private bool _isOnline;
  83. public override bool IsOnline
  84. {
  85. get
  86. {
  87. return _isOnline;
  88. }
  89. set
  90. {
  91. _isOnline = value;
  92. SC.SetItemValue($"FIMS.{Name}.IsOnline", value);
  93. }
  94. }
  95. #region fields
  96. private FIMSHomeRoutine _homeRoutine;
  97. private FIMSLoadRoutine _loadRoutine;
  98. private FIMSUnloadRoutine _unloadRoutine;
  99. private FIMSCycleTest _moveCycleTest;
  100. private List<AITWaterMappingData> _mappingData;
  101. #endregion
  102. public FIMSModule(ModuleName module) : base(SC.GetValue<int>("System.CassetteSlotCount"))
  103. {
  104. Name = module.ToString();
  105. Module = module.ToString();
  106. IsOnline = SC.GetValue<bool>($"FIMS.{Name}.IsOnline");
  107. }
  108. public override bool Initialize()
  109. {
  110. InitRoutine();
  111. InitDevice();
  112. InitFsm();
  113. InitOp();
  114. InitData();
  115. InitAlarmEvent();
  116. Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
  117. return base.Initialize();
  118. }
  119. private void Instance_OnAlarmEvent(EventItem item)
  120. {
  121. if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
  122. {
  123. DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
  124. LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
  125. PostMsg(MSG.Error);
  126. }
  127. }
  128. private void InitRoutine()
  129. {
  130. _homeRoutine = new FIMSHomeRoutine(this);
  131. _loadRoutine = new FIMSLoadRoutine(this);
  132. _unloadRoutine = new FIMSUnloadRoutine(this);
  133. _moveCycleTest = new FIMSCycleTest(this);
  134. }
  135. private void InitData()
  136. {
  137. DATA.Subscribe($"{Module}.MappingData", () => new List<AITWaterMappingData>()
  138. {
  139. new AITWaterMappingData(){Slot = 1,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  140. new AITWaterMappingData(){Slot = 2,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  141. new AITWaterMappingData(){Slot = 3,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  142. new AITWaterMappingData(){Slot = 4,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  143. new AITWaterMappingData(){Slot = 5,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  144. new AITWaterMappingData(){Slot = 6,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  145. new AITWaterMappingData(){Slot = 7,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  146. new AITWaterMappingData(){Slot = 8,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  147. new AITWaterMappingData(){Slot = 9,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  148. new AITWaterMappingData(){Slot = 10,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  149. new AITWaterMappingData(){Slot = 11,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  150. new AITWaterMappingData(){Slot = 12,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  151. new AITWaterMappingData(){Slot = 13,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  152. new AITWaterMappingData(){Slot = 14,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  153. new AITWaterMappingData(){Slot = 15,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  154. new AITWaterMappingData(){Slot = 16,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  155. new AITWaterMappingData(){Slot = 17,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  156. new AITWaterMappingData(){Slot = 18,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  157. new AITWaterMappingData(){Slot = 19,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  158. new AITWaterMappingData(){Slot = 20,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  159. new AITWaterMappingData(){Slot = 21,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  160. new AITWaterMappingData(){Slot = 22,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  161. new AITWaterMappingData(){Slot = 23,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  162. new AITWaterMappingData(){Slot = 24,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  163. new AITWaterMappingData(){Slot = 25,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  164. });
  165. DATA.Subscribe($"{Module}.SlotNo1Distance", () => 100.0f);
  166. DATA.Subscribe($"{Module}.SlotPitchDistance", () => 100f);
  167. DATA.Subscribe($"{Module}.ThicknessReferenceValue", () => 5f);
  168. DATA.Subscribe($"{Module}.ThicknessPermissions", () => 8f);
  169. DATA.Subscribe($"{Module}.MappingResult", () => "Normal Complete");
  170. DATA.Subscribe($"{Module}.Status", () => StringFsmStatus);
  171. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
  172. DATA.Subscribe($"{Module}.IsError", () => IsError);
  173. DATA.Subscribe($"{Module}.FIMSCycledCount", () => _moveCycleTest.LoopCounter);
  174. //DATA.Subscribe(Module, "CassettePresent", () => _diStationCassettePresent.Value);
  175. //DATA.Subscribe($"{Module}.StageValveState", () => StageValveState.ToString());
  176. }
  177. private void InitOp()
  178. {
  179. OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));
  180. OP.Subscribe($"{Module}.Home", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Home));
  181. OP.Subscribe($"{Module}.Load", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Load, args));
  182. OP.Subscribe($"{Module}.Unload", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Unload, args));
  183. OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
  184. OP.Subscribe($"{Module}.Cycle", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Cycle));
  185. OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) =>
  186. {
  187. IsOnline = true;
  188. return true;
  189. });
  190. OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) =>
  191. {
  192. IsOnline = false;
  193. return true;
  194. });
  195. OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
  196. {
  197. Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
  198. string eventName = null;
  199. if (args.Length > 1)
  200. eventName = args[1].ToString();
  201. if (eventName != null)
  202. {
  203. EV.ClearAlarmEvent(eventName);
  204. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
  205. if (item != null)
  206. {
  207. item.Reset();
  208. _triggeredAlarmList.Remove(item);
  209. }
  210. if (item != null)
  211. {
  212. switch (alarmAction)
  213. {
  214. case AlarmAction.Retry:
  215. {
  216. CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
  217. }
  218. break;
  219. case AlarmAction.Abort:
  220. {
  221. CheckToPostMessage((int)MSG.Abort);
  222. }
  223. break;
  224. case AlarmAction.Clear:
  225. {
  226. int alarmCount = 0;
  227. var alarms = EV.GetAlarmEvent();
  228. foreach (var alarm in alarms)
  229. {
  230. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  231. alarmCount++;
  232. }
  233. if (alarmCount == 0)
  234. CheckToPostMessage((int)MSG.Reset);
  235. }
  236. break;
  237. case AlarmAction.Continue:
  238. {
  239. int alarmCount = 0;
  240. var alarms = EV.GetAlarmEvent();
  241. foreach (var alarm in alarms)
  242. {
  243. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  244. alarmCount++;
  245. }
  246. if (alarmCount == 0)
  247. CheckToPostMessage((int)MSG.Reset);
  248. }
  249. break;
  250. }
  251. }
  252. }
  253. return true;
  254. });
  255. }
  256. private void InitFsm()
  257. {
  258. EnumLoop<STATE>.ForEach((item) =>
  259. {
  260. MapState((int)item, item.ToString());
  261. });
  262. EnumLoop<MSG>.ForEach((item) =>
  263. {
  264. MapMessage((int)item, item.ToString());
  265. });
  266. EnableFsm(100, STATE.Init);
  267. Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
  268. Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
  269. Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
  270. Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
  271. Transition(STATE.Homing, MSG.Error, null, STATE.Init);
  272. Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
  273. Transition(STATE.Idle, MSG.Disconnected, null, STATE.NotConnected);
  274. Transition(STATE.Idle, MSG.InTransfer, null, STATE.InTransfer);
  275. Transition(STATE.InTransfer, MSG.TransferComplete, null, STATE.Idle);
  276. Transition(STATE.InTransfer, MSG.Abort, null, STATE.Idle);
  277. Transition(STATE.NotConnected, MSG.Connected, null, STATE.Idle);
  278. //Error
  279. AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
  280. Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
  281. Transition(STATE.Init, MSG.Reset, FsmReset, STATE.Init);
  282. Transition(STATE.Idle, MSG.Reset, FsmReset, STATE.Idle);
  283. //load
  284. Transition(STATE.Error, MSG.LoadRetry, FsmStartLoad, STATE.Loading);
  285. Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
  286. Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorLoadTask, STATE.Idle);
  287. Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
  288. //unload
  289. Transition(STATE.Error, MSG.UnloadRetry, FsmStartUnload, STATE.Unloading);
  290. Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
  291. Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorUnloadTask, STATE.Idle);
  292. Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
  293. Transition(STATE.Idle, MSG.Cycle, FsmStartMoveTest, STATE.Cycle);
  294. Transition(STATE.Cycle, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  295. Transition(STATE.Cycle, MSG.Abort, FsmAbortTask, STATE.Idle);
  296. }
  297. #region Service Functions
  298. private bool FsmStartHome(object[] param)
  299. {
  300. Result ret = StartRoutine(_homeRoutine);
  301. if (ret == Result.FAIL || ret == Result.DONE)
  302. return false;
  303. return ret == Result.RUN;
  304. }
  305. private bool FsmAbortTask(object[] param)
  306. {
  307. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule)?.SetN2PurgeProcess(false);
  308. return true;
  309. }
  310. private bool FsmMonitorHomeTask(object[] param)
  311. {
  312. Result ret = MonitorRoutine();
  313. if (ret == Result.FAIL)
  314. {
  315. PostMsg(MSG.Error);
  316. return false;
  317. }
  318. if (ret == Result.DONE)
  319. {
  320. return true;
  321. }
  322. return false;
  323. }
  324. private bool FsmStartMoveTest(object[] param)
  325. {
  326. Result ret = StartRoutine(_moveCycleTest);
  327. if (ret == Result.FAIL || ret == Result.DONE)
  328. return false;
  329. return ret == Result.RUN;
  330. }
  331. private bool FsmStartLoad(object[] param)
  332. {
  333. bool isNeedN2Purge = false;
  334. if(param.Length > 0)
  335. {
  336. bool.TryParse(param[0].ToString(), out isNeedN2Purge);
  337. }
  338. _loadRoutine.Init(isNeedN2Purge);
  339. QueueRoutine.Clear();
  340. QueueRoutine.Enqueue(_loadRoutine);
  341. Result ret = QueueRoutine.Peek().Start();
  342. if (ret == Result.FAIL || ret == Result.DONE)
  343. return false;
  344. return ret == Result.RUN;
  345. }
  346. private bool FsmStartUnload(object[] param)
  347. {
  348. bool isNeedN2Purge = false;
  349. if (param.Length > 0)
  350. {
  351. bool.TryParse(param[0].ToString(), out isNeedN2Purge);
  352. }
  353. _unloadRoutine.Init(isNeedN2Purge);
  354. QueueRoutine.Clear();
  355. Result ret = StartRoutine(_unloadRoutine);
  356. if (ret == Result.FAIL || ret == Result.DONE)
  357. return false;
  358. return ret == Result.RUN;
  359. }
  360. private bool FsmMonitorLoadTask(object[] param)
  361. {
  362. Result ret = MonitorRoutine();
  363. if (ret == Result.FAIL)
  364. {
  365. PostMsg(MSG.Error);
  366. return false;
  367. }
  368. if (ret == Result.DONE)
  369. IsOnline = true;
  370. return ret == Result.DONE;
  371. }
  372. private bool FsmMonitorTask(object[] param)
  373. {
  374. Result ret = MonitorRoutine();
  375. if (ret == Result.FAIL)
  376. {
  377. PostMsg(MSG.Error);
  378. return false;
  379. }
  380. return ret == Result.DONE;
  381. }
  382. private bool FsmMonitorUnloadTask(object[] param)
  383. {
  384. Result ret = MonitorRoutine();
  385. if (ret == Result.FAIL)
  386. {
  387. PostMsg(MSG.Error);
  388. return false;
  389. }
  390. return ret == Result.DONE;
  391. }
  392. public override bool Home(out string reason)
  393. {
  394. CheckToPostMessage((int)MSG.Home);
  395. reason = string.Empty;
  396. return true;
  397. }
  398. private bool FsmOnError(object[] param)
  399. {
  400. if (FsmState == (int)STATE.Error)
  401. {
  402. return false;
  403. }
  404. if (FsmState != (int)STATE.Init && FsmState != (int)STATE.Idle)
  405. AbortRoutine();
  406. return true;
  407. }
  408. public override void Reset()
  409. {
  410. if (IsError)
  411. {
  412. CheckToPostMessage((int)MSG.Reset);
  413. }
  414. }
  415. private bool FsmReset(object[] param)
  416. {
  417. FIMSDevice.SetAlarmReset();
  418. return true;
  419. }
  420. public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  421. {
  422. reason = string.Empty;
  423. return true;
  424. }
  425. public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  426. {
  427. reason = string.Empty;
  428. return true;
  429. }
  430. public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  431. {
  432. reason = string.Empty;
  433. return true;
  434. }
  435. public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
  436. out string reason)
  437. {
  438. reason = string.Empty;
  439. if (!IsReady)
  440. {
  441. reason = $"{Module} status={StringFsmStatus} is busy";
  442. return false;
  443. }
  444. if (robot == ModuleName.WaferRobot)
  445. {
  446. if (!FIMSDevice.IsLoadCompleted)
  447. {
  448. reason = $"{Module} is not loaded";
  449. return false;
  450. }
  451. if (!IsDoorOpen)
  452. {
  453. reason = $"{Module} door is not open";
  454. }
  455. }
  456. if (robot == ModuleName.CarrierRobot)
  457. {
  458. if (!FIMSDevice.IsUnloadCompleted)
  459. {
  460. reason = $"{Module} is not unloaded";
  461. return false;
  462. }
  463. if (transferType == EnumTransferType.Pick)
  464. {
  465. if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
  466. {
  467. reason = $"{Module} carrier not present";
  468. return false;
  469. }
  470. }
  471. if (transferType == EnumTransferType.Place)
  472. {
  473. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  474. {
  475. reason = $"{Module} carrier present";
  476. return false;
  477. }
  478. }
  479. }
  480. return true;
  481. }
  482. public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  483. {
  484. CheckToPostMessage(MSG.InTransfer);
  485. }
  486. public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  487. {
  488. if (FsmState == (int)STATE.InTransfer)
  489. CheckToPostMessage(MSG.TransferComplete);
  490. }
  491. public void InvokeLoad(bool isNeedN2Purge)
  492. {
  493. CheckToPostMessage((int)MSG.Load, isNeedN2Purge);
  494. }
  495. public void InvokeUnload(bool isNeedN2Purge)
  496. {
  497. CheckToPostMessage((int)MSG.Unload, isNeedN2Purge);
  498. }
  499. #endregion
  500. }
  501. }