202410311406095336—SFC240912810-EFC241014689.csv 740 B

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  1. 【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
  2. SFC240912810/EFC241014689/,22,CACB,,10/31/2024 2:04:47 PM,,0.2832595,50000,0
  3. SFC240912810/EFC241014689/,22,CACB,,,,0.2832595,50000,0
  4. SFC240912810/EFC241014689/,22,CACB,,,,0.3581434,35003,0
  5. SFC240912810/EFC241014689/,22,CACB,,,,0.9930853,25000,0
  6. SFC240912810/EFC241014689/,22,CACB,,,,0.9856463,10001,0
  7. SFC240912810/EFC241014689/,22,CACB,,,,0.3244569,106,0
  8. SFC240912810/EFC241014689/,22,CACB,,,,41.54526,93,0
  9. SFC240912810/EFC241014689/,22,CACB,,,,45.28458,105,0
  10. SFC240912810/EFC241014689/,22,CACB,,,,45.22615,98,0
  11. SFC240912810/EFC241014689/,22,CACB,,,10/31/2024 2:06:04 PM,45.30274,109,18