【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
SFC240912810/EFC241014689/,22,CACB,,10/31/2024 2:04:47 PM,,0.2832595,50000,0
SFC240912810/EFC241014689/,22,CACB,,,,0.2832595,50000,0
SFC240912810/EFC241014689/,22,CACB,,,,0.3581434,35003,0
SFC240912810/EFC241014689/,22,CACB,,,,0.9930853,25000,0
SFC240912810/EFC241014689/,22,CACB,,,,0.9856463,10001,0
SFC240912810/EFC241014689/,22,CACB,,,,0.3244569,106,0
SFC240912810/EFC241014689/,22,CACB,,,,41.54526,93,0
SFC240912810/EFC241014689/,22,CACB,,,,45.28458,105,0
SFC240912810/EFC241014689/,22,CACB,,,,45.22615,98,0
SFC240912810/EFC241014689/,22,CACB,,,10/31/2024 2:06:04 PM,45.30274,109,18