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log20241017.txt

log20241017.txt 41 KB
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  1. <==  [Save Log Job] 2024-10-17 13:30:31.930 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2. 

  2. [Save Log Job] 2024-10-17 13:30:32.887 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    3. 

  3. [Save Log Job] 2024-10-17 13:30:32.887 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    4. 

  4. [Save Log Job] 2024-10-17 13:30:32.894 LOG.INFO EventService.cs Line:60 Register() - 客户端e5aff66e-5352-447d-b23a-cd3410288d2b已连接
    5. 

  5. [Save Log Job] 2024-10-17 13:30:32.894 LOG.INFO EventService.cs Line:60 Register() - 客户端e5aff66e-5352-447d-b23a-cd3410288d2b已连接
    6. 

  6. [Save Log Job] 2024-10-17 13:30:32.956 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    7. 

  7. [Save Log Job] 2024-10-17 13:30:34.115 LOG.ERROR LOG.cs Line:51 Write() - 
    8. 

  8. System.IO.DirectoryNotFoundException: Could not find a part of the path 'D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Recipes\System'.
    9. 

  9.    在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
    10. 

  10.    在 System.IO.FileSystemEnumerableIterator`1.CommonInit()
    11. 

  11.    在 System.IO.FileSystemEnumerableIterator`1..ctor(String path, String originalUserPath, String searchPattern, SearchOption searchOption, SearchResultHandler`1 resultHandler, Boolean checkHost)
    12. 

  12.    在 System.IO.DirectoryInfo.InternalGetFiles(String searchPattern, SearchOption searchOption)
    13. 

  13.    在 System.IO.DirectoryInfo.GetFiles(String searchPattern, SearchOption searchOption)
    14. 

  14.    在 Aitex.RT.Module.RtRecipeFileContext.GetRecipes(String chamberId, Boolean includingUsedRecipe) 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\Module\RtRecipeFileContext.cs:行号 273
    15. 

  15. [Save Log Job] 2024-10-17 13:30:43.054 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
    16. 

  16. [Save Log Job] 2024-10-17 13:30:47.738 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software is expired. Can not login。
    17. 

  17. <==  [Save Log Job] 2024-10-17 13:31:23.940 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    18. 

  18. [Save Log Job] 2024-10-17 13:31:24.974 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    19. 

  19. [Save Log Job] 2024-10-17 13:31:24.974 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    20. 

  20. [Save Log Job] 2024-10-17 13:31:24.984 LOG.INFO EventService.cs Line:60 Register() - 客户端1286e6dc-dce5-4b2d-9aef-710d55912328已连接
    21. 

  21. [Save Log Job] 2024-10-17 13:31:25.043 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    22. 

  22. [Save Log Job] 2024-10-17 13:31:26.155 LOG.ERROR LOG.cs Line:51 Write() - 
    23. 

  23. System.IO.DirectoryNotFoundException: Could not find a part of the path 'D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Recipes\System'.
    24. 

  24.    在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
    25. 

  25.    在 System.IO.FileSystemEnumerableIterator`1.CommonInit()
    26. 

  26.    在 System.IO.FileSystemEnumerableIterator`1..ctor(String path, String originalUserPath, String searchPattern, SearchOption searchOption, SearchResultHandler`1 resultHandler, Boolean checkHost)
    27. 

  27.    在 System.IO.DirectoryInfo.InternalGetFiles(String searchPattern, SearchOption searchOption)
    28. 

  28.    在 System.IO.DirectoryInfo.GetFiles(String searchPattern, SearchOption searchOption)
    29. 

  29.    在 Aitex.RT.Module.RtRecipeFileContext.GetRecipes(String chamberId, Boolean includingUsedRecipe) 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\Module\RtRecipeFileContext.cs:行号 273
    30. 

  30. [Save Log Job] 2024-10-17 13:31:30.688 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    31. 

  31. [Save Log Job] 2024-10-17 13:31:30.715 LOG.ERROR LOG.cs Line:51 Write() - 
    32. 

  32. System.IO.FileNotFoundException: 未能找到文件“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”。
    33. 

  33. 文件名:“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”
    34. 

  34.    在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
    35. 

  35.    在 System.IO.FileStream.Init(String path, FileMode mode, FileAccess access, Int32 rights, Boolean useRights, FileShare share, Int32 bufferSize, FileOptions options, SECURITY_ATTRIBUTES secAttrs, String msgPath, Boolean bFromProxy, Boolean useLongPath, Boolean checkHost)
    36. 

  36.    在 System.IO.FileStream..ctor(String path, FileMode mode, FileAccess access, FileShare share, Int32 bufferSize)
    37. 

  37.    在 System.Xml.XmlDownloadManager.GetStream(Uri uri, ICredentials credentials, IWebProxy proxy, RequestCachePolicy cachePolicy)
    38. 

  38.    在 System.Xml.XmlUrlResolver.GetEntity(Uri absoluteUri, String role, Type ofObjectToReturn)
    39. 

  39.    在 System.Xml.XmlTextReaderImpl.OpenUrlDelegate(Object xmlResolver)
    40. 

  40.    在 System.Threading.CompressedStack.runTryCode(Object userData)
    41. 

  41.    在 System.Runtime.CompilerServices.RuntimeHelpers.ExecuteCodeWithGuaranteedCleanup(TryCode code, CleanupCode backoutCode, Object userData)
    42. 

  42.    在 System.Threading.CompressedStack.Run(CompressedStack compressedStack, ContextCallback callback, Object state)
    43. 

  43.    在 System.Xml.XmlTextReaderImpl.OpenUrl()
    44. 

  44.    在 System.Xml.XmlTextReaderImpl.Read()
    45. 

  45.    在 System.Xml.XmlLoader.Load(XmlDocument doc, XmlReader reader, Boolean preserveWhitespace)
    46. 

  46.    在 System.Xml.XmlDocument.Load(XmlReader reader)
    47. 

  47.    在 System.Xml.XmlDocument.Load(String filename)
    48. 

  48.    在 Aitex.Core.Util.FileSigner.IsValid(String fileName) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\FileSigner.cs:行号 140
    49. 

  49.    在 Aitex.Core.Account.AccountManager.GetAccountList() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Account\AccountManager.cs:行号 599
    50. 

  50. [Save Log Job] 2024-10-17 13:31:30.723 LOG.ERROR LOG.cs Line:56 Write() - 获取账号列表发生异常
    51. 

  51. System.IO.FileNotFoundException: 未能找到文件“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”。
    52. 

  52. 文件名:“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”
    53. 

  53.    在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
    54. 

  54.    在 System.IO.FileStream.Init(String path, FileMode mode, FileAccess access, Int32 rights, Boolean useRights, FileShare share, Int32 bufferSize, FileOptions options, SECURITY_ATTRIBUTES secAttrs, String msgPath, Boolean bFromProxy, Boolean useLongPath, Boolean checkHost)
    55. 

  55.    在 System.IO.FileStream..ctor(String path, FileMode mode, FileAccess access, FileShare share, Int32 bufferSize)
    56. 

  56.    在 System.Xml.XmlDownloadManager.GetStream(Uri uri, ICredentials credentials, IWebProxy proxy, RequestCachePolicy cachePolicy)
    57. 

  57.    在 System.Xml.XmlUrlResolver.GetEntity(Uri absoluteUri, String role, Type ofObjectToReturn)
    58. 

  58.    在 System.Xml.XmlTextReaderImpl.OpenUrlDelegate(Object xmlResolver)
    59. 

  59.    在 System.Threading.CompressedStack.runTryCode(Object userData)
    60. 

  60.    在 System.Runtime.CompilerServices.RuntimeHelpers.ExecuteCodeWithGuaranteedCleanup(TryCode code, CleanupCode backoutCode, Object userData)
    61. 

  61.    在 System.Threading.CompressedStack.Run(CompressedStack compressedStack, ContextCallback callback, Object state)
    62. 

  62.    在 System.Xml.XmlTextReaderImpl.OpenUrl()
    63. 

  63.    在 System.Xml.XmlTextReaderImpl.Read()
    64. 

  64.    在 System.Xml.XmlLoader.Load(XmlDocument doc, XmlReader reader, Boolean preserveWhitespace)
    65. 

  65.    在 System.Xml.XmlDocument.Load(XmlReader reader)
    66. 

  66.    在 System.Xml.XmlDocument.Load(String filename)
    67. 

  67.    在 Aitex.Core.Util.FileSigner.IsValid(String fileName) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\FileSigner.cs:行号 140
    68. 

  68.    在 Aitex.Core.Account.AccountManager.GetAccountList() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Account\AccountManager.cs:行号 599
    69. 

  69. [Save Log Job] 2024-10-17 13:31:30.738 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    70. 

  70. [Save Log Job] 2024-10-17 13:31:30.746 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    71. 

  71. [Save Log Job] 2024-10-17 13:31:30.747 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    72. 

  72. [Save Log Job] 2024-10-17 13:31:30.758 LOG.INFO LOG.cs Line:61 Write() - 创建账号admin
    73. 

  73. [Save Log Job] 2024-10-17 13:31:30.767 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    74. 

  74. [Save Log Job] 2024-10-17 13:31:30.774 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    75. 

  75. [Save Log Job] 2024-10-17 13:31:30.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 用户帐号''admin''已被创建。
    76. 

  76. [Save Log Job] 2024-10-17 13:31:30.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    77. 

  77. [Save Log Job] 2024-10-17 13:31:30.921 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    78. 

  78. [Save Log Job] 2024-10-17 13:31:34.718 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_Language, 2)
    79. 

  79. [Save Log Job] 2024-10-17 13:31:35.143 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
    80. 

  80. [Save Log Job] 2024-10-17 13:31:46.139 LOG.ERROR LOG.cs Line:56 Write() - Communication failed with PLC 192.168.10.10:9600
    81. 

  81. System.Net.Sockets.SocketException (0x80004005): 由于连接方在一段时间后没有正确答复或连接的主机没有反应，连接尝试失败。 192.168.10.10:9600
    82. 

  82.    在 System.Net.Sockets.TcpClient..ctor(String hostname, Int32 port)
    83. 

  83.    在 Aitex.Core.RT.PLC.FinsDataDevice.Open() 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\PLC\FinsDataDevice.cs:行号 180
    84. 

  84. <==  [Save Log Job] 2024-10-17 13:32:36.441 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    85. 

  85. [Save Log Job] 2024-10-17 13:32:37.463 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    86. 

  86. [Save Log Job] 2024-10-17 13:32:37.464 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    87. 

  87. [Save Log Job] 2024-10-17 13:32:37.539 LOG.INFO EventService.cs Line:60 Register() - 客户端87c5737c-b71e-4392-a298-a7924a4a6d10已连接
    88. 

  88. [Save Log Job] 2024-10-17 13:32:37.540 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    89. 

  89. [Save Log Job] 2024-10-17 13:32:47.610 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
    90. 

  90. <==  [Save Log Job] 2024-10-17 13:33:38.286 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    91. 

  91. [Save Log Job] 2024-10-17 13:33:39.161 LOG.INFO EventService.cs Line:60 Register() - 客户端79e8873b-90e8-4bd3-a05f-c16aa9590281已连接
    92. 

  92. [Save Log Job] 2024-10-17 13:33:39.283 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    93. 

  93. [Save Log Job] 2024-10-17 13:33:39.284 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    94. 

  94. [Save Log Job] 2024-10-17 13:33:39.328 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    95. 

  95. [Save Log Job] 2024-10-17 13:33:45.444 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    96. 

  96. [Save Log Job] 2024-10-17 13:33:45.445 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    97. 

  97. [Save Log Job] 2024-10-17 13:33:45.451 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    98. 

  98. [Save Log Job] 2024-10-17 13:33:45.600 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    99. 

  99. [Save Log Job] 2024-10-17 13:33:47.795 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    100. 

  100. [Save Log Job] 2024-10-17 13:33:47.795 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    101. 

  101. [Save Log Job] 2024-10-17 13:33:49.392 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
    102. 

  102. [Save Log Job] 2024-10-17 13:33:56.954 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    103. 

  103. [Save Log Job] 2024-10-17 13:33:56.954 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    104. 

  104. [Save Log Job] 2024-10-17 13:33:58.960 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    105. 

  105. [Save Log Job] 2024-10-17 13:33:58.960 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    106. 

  106. [Save Log Job] 2024-10-17 13:34:00.416 LOG.ERROR LOG.cs Line:56 Write() - Communication failed with PLC 192.168.10.10:9600
    107. 

  107. System.Net.Sockets.SocketException (0x80004005): 由于连接方在一段时间后没有正确答复或连接的主机没有反应，连接尝试失败。 192.168.10.10:9600
    108. 

  108.    在 System.Net.Sockets.TcpClient..ctor(String hostname, Int32 port)
    109. 

  109.    在 Aitex.Core.RT.PLC.FinsDataDevice.Open() 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\PLC\FinsDataDevice.cs:行号 180
    110. 

  110. [Save Log Job] 2024-10-17 13:34:08.637 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    111. 

  111. [Save Log Job] 2024-10-17 13:34:08.637 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    112. 

  112. <==  [Save Log Job] 2024-10-17 13:35:10.623 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    113. 

  113. [Save Log Job] 2024-10-17 13:35:11.665 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    114. 

  114. [Save Log Job] 2024-10-17 13:35:11.666 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    115. 

  115. [Save Log Job] 2024-10-17 13:35:11.710 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    116. 

  116. [Save Log Job] 2024-10-17 13:35:11.737 LOG.INFO EventService.cs Line:60 Register() - 客户端37906079-7e22-44b0-97b9-741b77f9e9c5已连接
    117. 

  117. [Save Log Job] 2024-10-17 13:35:11.737 LOG.INFO EventService.cs Line:60 Register() - 客户端37906079-7e22-44b0-97b9-741b77f9e9c5已连接
    118. 

  118. [Save Log Job] 2024-10-17 13:35:13.817 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    119. 

  119.  ==> <==  [Save Log Job] 2024-10-17 13:35:41.193 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    120. 

  120. [Save Log Job] 2024-10-17 13:35:42.157 LOG.INFO EventService.cs Line:60 Register() - 客户端384dd23d-0918-4138-9fc4-db1004865727已连接
    121. 

  121. [Save Log Job] 2024-10-17 13:35:42.314 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    122. 

  122. [Save Log Job] 2024-10-17 13:35:42.314 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    123. 

  123. [Save Log Job] 2024-10-17 13:35:42.358 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    124. 

  124. [Save Log Job] 2024-10-17 13:35:51.907 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    125. 

  125. [Save Log Job] 2024-10-17 13:36:13.348 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
    126. 

  126. [Save Log Job] 2024-10-17 13:36:17.265 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    127. 

  127. [Save Log Job] 2024-10-17 13:36:17.266 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    128. 

  128. [Save Log Job] 2024-10-17 13:36:17.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    129. 

  129. [Save Log Job] 2024-10-17 13:36:17.390 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    130. 

  130. [Save Log Job] 2024-10-17 13:36:24.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 菜单文件\\123保存成功
    131. 

  131. [Save Log Job] 2024-10-17 13:36:24.642 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    132. 

  132. [Save Log Job] 2024-10-17 13:36:40.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 菜单文件123保存成功
    133. 

  133. [Save Log Job] 2024-10-17 13:36:40.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    134. 

  134. [Save Log Job] 2024-10-17 13:36:41.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 菜单文件123保存成功
    135. 

  135. [Save Log Job] 2024-10-17 13:36:41.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    136. 

  136. [Save Log Job] 2024-10-17 13:36:49.664 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 SetAutoMode()
    137. 

  137. [Save Log Job] 2024-10-17 13:36:49.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    138. 

  138. [Save Log Job] 2024-10-17 13:36:49.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to 自动模式
    139. 

  139. [Save Log Job] 2024-10-17 13:36:51.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 RunRecipe(123, )
    140. 

  140. [Save Log Job] 2024-10-17 13:36:51.118 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241017133651-123
    141. 

  141. [Save Log Job] 2024-10-17 13:36:51.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    142. 

  142. [Save Log Job] 2024-10-17 13:36:51.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：检查门的状态。
    143. 

  143. [Save Log Job] 2024-10-17 13:36:51.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：检查腔体门是否关闭。
    144. 

  144. [Save Log Job] 2024-10-17 13:36:51.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：检查背板门是否关闭。
    145. 

  145. [Save Log Job] 2024-10-17 13:36:51.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：检查泵的状态。
    146. 

  146. [Save Log Job] 2024-10-17 13:36:51.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：关闭所有阀门。
    147. 

  147. [Save Log Job] 2024-10-17 13:36:51.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：打开抽气阀门。
    148. 

  148. [Save Log Job] 2024-10-17 13:36:51.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    149. 

  149. [Save Log Job] 2024-10-17 13:36:53.238 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    150. 

  150. [Save Log Job] 2024-10-17 13:36:54.070 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：检查腔体压力。
    151. 

  151. [Save Log Job] 2024-10-17 13:37:32.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：抽气到100毫托。
    152. 

  152. [Save Log Job] 2024-10-17 13:37:32.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess 操作完成，用时0.7分钟。
    153. 

  153. [Save Log Job] 2024-10-17 13:37:32.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    154. 

  154. [Save Log Job] 2024-10-17 13:37:32.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241017133651-123
    155. 

  155. [Save Log Job] 2024-10-17 13:37:32.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241017133651-123''
    156. 

  156. [Save Log Job] 2024-10-17 13:37:33.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017133651-123'' start run step 1：initial。
    157. 

  157. [Save Log Job] 2024-10-17 13:37:33.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    158. 

  158. [Save Log Job] 2024-10-17 13:37:33.023 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    159. 

  159. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    160. 

  160. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    161. 

  161. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    162. 

  162. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    163. 

  163. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    164. 

  164. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    165. 

  165. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    166. 

  166. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    167. 

  167. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    168. 

  168. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 100sccm。
    169. 

  169. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 100sccm。
    170. 

  170. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 0sccm。
    171. 

  171. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 0sccm。
    172. 

  172. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 0sccm。
    173. 

  173. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    174. 

  174. [Save Log Job] 2024-10-17 13:37:33.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    175. 

  175. [Save Log Job] 2024-10-17 13:38:03.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017133651-123'' end step 1
    176. 

  176. [Save Log Job] 2024-10-17 13:38:03.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    177. 

  177. [Save Log Job] 2024-10-17 13:38:03.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，菜单文件：20241017133651-123
    178. 

  178. 开始时间：2024/10/17 13:37:32
    179. 

  179. 结束时间：2024/10/17 13:38:03
    180. 

  180. 总时间：0:0:30
    181. 

  181. [Save Log Job] 2024-10-17 13:38:03.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 工艺运行结束
    182. 

  182. [Save Log Job] 2024-10-17 13:38:03.158 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 等待10秒钟
    183. 

  183. [Save Log Job] 2024-10-17 13:38:05.119 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    184. 

  184. [Save Log Job] 2024-10-17 13:38:05.119 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    185. 

  185. [Save Log Job] 2024-10-17 13:38:05.120 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    186. 

  186. [Save Log Job] 2024-10-17 13:38:13.229 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 关闭射频
    187. 

  187. [Save Log Job] 2024-10-17 13:38:13.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 停止流气
    188. 

  188. [Save Log Job] 2024-10-17 13:38:22.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 关闭所有阀门
    189. 

  189. [Save Log Job] 2024-10-17 13:38:23.013 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 开始吹扫, Loop 1
    190. 

  190. [Save Log Job] 2024-10-17 13:38:23.014 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 压力抽到100毫托
    191. 

  191. [Save Log Job] 2024-10-17 13:38:26.780 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 抽气等待10秒
    192. 

  192. [Save Log Job] 2024-10-17 13:38:28.751 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    193. 

  193. [Save Log Job] 2024-10-17 13:38:35.853 LOG.INFO LOG.cs Line:61 Write() - user login server
    194. 

  194. [Save Log Job] 2024-10-17 13:38:36.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 充气压力到700000毫托
    195. 

  195. [Save Log Job] 2024-10-17 13:38:52.977 LOG.INFO LOG.cs Line:61 Write() - user login server
    196. 

  196. [Save Log Job] 2024-10-17 13:40:36.926 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System 工艺程序收尾处理错误：Can not purge to purge pressure 700000 in purge time 120。
    197. 

  197. [Save Log Job] 2024-10-17 13:40:36.927 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System 工艺收尾失败
    198. 

  198. [Save Log Job] 2024-10-17 13:40:36.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    199. 

  199. [Save Log Job] 2024-10-17 13:40:36.934 LOG.WARN StateMachine.cs Line:163 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。
    200. 

  200. [Save Log Job] 2024-10-17 13:40:37.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    201. 

  201. [Save Log Job] 2024-10-17 13:40:38.973 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber purge valveClose失败，原因：Valve keep open。
    202. 

  202. [Save Log Job] 2024-10-17 13:40:38.973 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    203. 

  203. [Save Log Job] 2024-10-17 13:41:34.681 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    204. 

  204. [Save Log Job] 2024-10-17 13:41:34.682 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    205. 

  205. [Save Log Job] 2024-10-17 13:41:40.039 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    206. 

  206. [Save Log Job] 2024-10-17 13:41:40.039 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    207. 

  207. [Save Log Job] 2024-10-17 14:15:08.499 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    208. 

  208. [Save Log Job] 2024-10-17 14:30:24.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 SetConfig(System_Language, 1)
    209. 

  209. [Save Log Job] 2024-10-17 14:30:56.705 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_Language, 2)
    210. 

  210. [Save Log Job] 2024-10-17 14:31:12.905 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    211. 

  211. [Save Log Job] 2024-10-17 14:31:12.905 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    212. 

  212. [Save Log Job] 2024-10-17 14:31:20.371 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    213. 

  213. [Save Log Job] 2024-10-17 14:31:20.372 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    214. 

  214. [Save Log Job] 2024-10-17 14:31:25.095 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    215. 

  215. [Save Log Job] 2024-10-17 14:31:25.095 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    216. 

  216. <==  [Save Log Job] 2024-10-17 17:05:46.754 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    217. 

  217. [Save Log Job] 2024-10-17 17:05:47.608 LOG.INFO EventService.cs Line:60 Register() - 客户端72d40692-44ab-4d84-b37a-292f2db80e83已连接
    218. 

  218. [Save Log Job] 2024-10-17 17:05:47.608 LOG.INFO EventService.cs Line:60 Register() - 客户端72d40692-44ab-4d84-b37a-292f2db80e83已连接
    219. 

  219. [Save Log Job] 2024-10-17 17:05:47.728 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    220. 

  220. [Save Log Job] 2024-10-17 17:05:47.728 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    221. 

  221. [Save Log Job] 2024-10-17 17:05:47.820 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    222. 

  222. [Save Log Job] 2024-10-17 17:05:49.241 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    223. 

  223. [Save Log Job] 2024-10-17 17:05:52.833 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
    224. 

  224. [Save Log Job] 2024-10-17 17:06:21.481 LOG.INFO LOG.cs Line:61 Write() - 用户amin尝试登录系统
    225. 

  225. [Save Log Job] 2024-10-17 17:06:21.482 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息amin
    226. 

  226. [Save Log Job] 2024-10-17 17:06:38.340 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    227. 

  227. [Save Log Job] 2024-10-17 17:06:38.340 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    228. 

  228. [Save Log Job] 2024-10-17 17:06:38.352 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    229. 

  229. [Save Log Job] 2024-10-17 17:06:38.486 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    230. 

  230. [Save Log Job] 2024-10-17 17:07:08.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 SetConfig(System_Language, 1)
    231. 

  231. [Save Log Job] 2024-10-17 17:10:03.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  123  save completed
    232. 

  232. [Save Log Job] 2024-10-17 17:10:03.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    233. 

  233. [Save Log Job] 2024-10-17 17:11:29.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    234. 

  234. [Save Log Job] 2024-10-17 17:11:29.795 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    235. 

  235. [Save Log Job] 2024-10-17 17:11:29.795 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    236. 

  236. [Save Log Job] 2024-10-17 17:12:11.661 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    237. 

  237. [Save Log Job] 2024-10-17 17:12:11.674 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241017171211-123
    238. 

  238. [Save Log Job] 2024-10-17 17:12:11.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    239. 

  239. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    240. 

  240. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    241. 

  241. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    242. 

  242. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    243. 

  243. [Save Log Job] 2024-10-17 17:12:11.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    244. 

  244. [Save Log Job] 2024-10-17 17:12:11.790 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    245. 

  245. [Save Log Job] 2024-10-17 17:12:11.831 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    246. 

  246. [Save Log Job] 2024-10-17 17:12:13.835 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    247. 

  247. [Save Log Job] 2024-10-17 17:12:14.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    248. 

  248. [Save Log Job] 2024-10-17 17:13:20.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    249. 

  249. [Save Log Job] 2024-10-17 17:13:20.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 1.1 minitues。
    250. 

  250. [Save Log Job] 2024-10-17 17:13:20.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    251. 

  251. [Save Log Job] 2024-10-17 17:13:20.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241017171211-123
    252. 

  252. [Save Log Job] 2024-10-17 17:13:20.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241017171211-123''
    253. 

  253. [Save Log Job] 2024-10-17 17:13:20.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017171211-123'' start run step 1：initial。
    254. 

  254. [Save Log Job] 2024-10-17 17:13:20.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    255. 

  255. [Save Log Job] 2024-10-17 17:13:20.500 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    256. 

  256. [Save Log Job] 2024-10-17 17:13:20.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    257. 

  257. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    258. 

  258. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    259. 

  259. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    260. 

  260. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    261. 

  261. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    262. 

  262. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    263. 

  263. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    264. 

  264. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    265. 

  265. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    266. 

  266. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 100sccm。
    267. 

  267. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 0sccm。
    268. 

  268. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 0sccm。
    269. 

  269. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 0sccm。
    270. 

  270. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    271. 

  271. [Save Log Job] 2024-10-17 17:13:20.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    272. 

  272. [Save Log Job] 2024-10-17 17:13:50.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017171211-123'' end step 1
    273. 

  273. [Save Log Job] 2024-10-17 17:13:50.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    274. 

  274. [Save Log Job] 2024-10-17 17:13:50.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241017171211-123
    275. 

  275. Start time：2024/10/17 17:13:20
    276. 

  276. End time：2024/10/17 17:13:50
    277. 

  277. Total time：0:0:30
    278. 

  278. [Save Log Job] 2024-10-17 17:13:50.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    279. 

  279. [Save Log Job] 2024-10-17 17:13:50.648 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    280. 

  280. [Save Log Job] 2024-10-17 17:13:52.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    281. 

  281. [Save Log Job] 2024-10-17 17:13:52.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    282. 

  282. [Save Log Job] 2024-10-17 17:13:52.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    283. 

  283. [Save Log Job] 2024-10-17 17:14:00.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    284. 

  284. [Save Log Job] 2024-10-17 17:14:00.782 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    285. 

  285. [Save Log Job] 2024-10-17 17:14:10.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    286. 

  286. [Save Log Job] 2024-10-17 17:14:10.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Start cycle purge, Loop 1
    287. 

  287. [Save Log Job] 2024-10-17 17:14:10.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, pumping pressure to 100 mTor
    288. 

  288. [Save Log Job] 2024-10-17 17:14:25.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, pump delay 10 seconds
    289. 

  289. [Save Log Job] 2024-10-17 17:14:27.751 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    290. 

  290. [Save Log Job] 2024-10-17 17:14:35.879 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent pressure to 700000 mtor
    291. 

  291. [Save Log Job] 2024-10-17 17:15:55.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    292. 

  292. [Save Log Job] 2024-10-17 17:15:55.967 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in PostProcess，can not do SetManualMode。
    293. 

  293. [Save Log Job] 2024-10-17 17:16:26.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    294. 

  294. [Save Log Job] 2024-10-17 17:16:26.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    295. 

  295. [Save Log Job] 2024-10-17 17:16:26.774 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    296. 

  296. [Save Log Job] 2024-10-17 17:16:32.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    297. 

  297. [Save Log Job] 2024-10-17 17:16:32.453 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    298. 

  298. [Save Log Job] 2024-10-17 17:16:32.453 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    299. 

  299. [Save Log Job] 2024-10-17 17:21:52.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  123  save completed
    300. 

  300. [Save Log Job] 2024-10-17 17:21:52.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    301. 

  301. [Save Log Job] 2024-10-17 17:26:09.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    302. 

  302. [Save Log Job] 2024-10-17 17:26:09.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    303. 

  303. [Save Log Job] 2024-10-17 17:26:09.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    304. 

  304. [Save Log Job] 2024-10-17 17:29:43.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    305. 

  305. [Save Log Job] 2024-10-17 17:29:43.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    306. 

  306. [Save Log Job] 2024-10-17 17:29:43.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    307. 

  307. [Save Log Job] 2024-10-17 17:30:05.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    308. 

  308. [Save Log Job] 2024-10-17 17:30:05.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    309. 

  309. [Save Log Job] 2024-10-17 17:30:05.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 100)
    310. 

  310. [Save Log Job] 2024-10-17 17:30:05.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 120)
    311. 

  311. [Save Log Job] 2024-10-17 17:30:05.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    312. 

  312. [Save Log Job] 2024-10-17 17:30:05.739 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    313. 

  313. [Save Log Job] 2024-10-17 17:30:05.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Check door status。
    314. 

  314. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：check chamber door。
    315. 

  315. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：check backpanel door。
    316. 

  316. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Check pump status。
    317. 

  317. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Close all the valves。
    318. 

  318. [Save Log Job] 2024-10-17 17:30:05.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    319. 

  319. [Save Log Job] 2024-10-17 17:30:05.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Open pumping valve。
    320. 

  320. [Save Log Job] 2024-10-17 17:30:06.380 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Wait chamber pressure until below 100。
    321. 

  321. [Save Log Job] 2024-10-17 17:30:10.793 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    322. 

  322. [Save Log Job] 2024-10-17 17:30:10.793 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    323. 

  323. [Save Log Job] 2024-10-17 17:30:10.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 50)
    324. 

  324. [Save Log Job] 2024-10-17 17:30:10.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 50 mTorr。
    325. 

  325. [Save Log Job] 2024-10-17 17:31:54.384 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Pump below 100mTorr。
    326. 

  326. [Save Log Job] 2024-10-17 17:31:54.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气：Pump Finished in 1.8 minitues。
    327. 

  327. [Save Log Job] 2024-10-17 17:31:54.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    328. 

  328. [Save Log Job] 2024-10-17 17:31:54.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    329. 

  329. [Save Log Job] 2024-10-17 17:31:54.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    330. 

  330.  ==> 
    331.