log20241017.txt 41 KB

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  1. <== [Save Log Job] 2024-10-17 13:30:31.930 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  2. [Save Log Job] 2024-10-17 13:30:32.887 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  3. [Save Log Job] 2024-10-17 13:30:32.887 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  4. [Save Log Job] 2024-10-17 13:30:32.894 LOG.INFO EventService.cs Line:60 Register() - 客户端e5aff66e-5352-447d-b23a-cd3410288d2b已连接
  5. [Save Log Job] 2024-10-17 13:30:32.894 LOG.INFO EventService.cs Line:60 Register() - 客户端e5aff66e-5352-447d-b23a-cd3410288d2b已连接
  6. [Save Log Job] 2024-10-17 13:30:32.956 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  7. [Save Log Job] 2024-10-17 13:30:34.115 LOG.ERROR LOG.cs Line:51 Write() -
  8. System.IO.DirectoryNotFoundException: Could not find a part of the path 'D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Recipes\System'.
  9. 在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
  10. 在 System.IO.FileSystemEnumerableIterator`1.CommonInit()
  11. 在 System.IO.FileSystemEnumerableIterator`1..ctor(String path, String originalUserPath, String searchPattern, SearchOption searchOption, SearchResultHandler`1 resultHandler, Boolean checkHost)
  12. 在 System.IO.DirectoryInfo.InternalGetFiles(String searchPattern, SearchOption searchOption)
  13. 在 System.IO.DirectoryInfo.GetFiles(String searchPattern, SearchOption searchOption)
  14. 在 Aitex.RT.Module.RtRecipeFileContext.GetRecipes(String chamberId, Boolean includingUsedRecipe) 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\Module\RtRecipeFileContext.cs:行号 273
  15. [Save Log Job] 2024-10-17 13:30:43.054 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
  16. [Save Log Job] 2024-10-17 13:30:47.738 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software is expired. Can not login。
  17. <== [Save Log Job] 2024-10-17 13:31:23.940 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  18. [Save Log Job] 2024-10-17 13:31:24.974 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  19. [Save Log Job] 2024-10-17 13:31:24.974 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  20. [Save Log Job] 2024-10-17 13:31:24.984 LOG.INFO EventService.cs Line:60 Register() - 客户端1286e6dc-dce5-4b2d-9aef-710d55912328已连接
  21. [Save Log Job] 2024-10-17 13:31:25.043 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  22. [Save Log Job] 2024-10-17 13:31:26.155 LOG.ERROR LOG.cs Line:51 Write() -
  23. System.IO.DirectoryNotFoundException: Could not find a part of the path 'D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Recipes\System'.
  24. 在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
  25. 在 System.IO.FileSystemEnumerableIterator`1.CommonInit()
  26. 在 System.IO.FileSystemEnumerableIterator`1..ctor(String path, String originalUserPath, String searchPattern, SearchOption searchOption, SearchResultHandler`1 resultHandler, Boolean checkHost)
  27. 在 System.IO.DirectoryInfo.InternalGetFiles(String searchPattern, SearchOption searchOption)
  28. 在 System.IO.DirectoryInfo.GetFiles(String searchPattern, SearchOption searchOption)
  29. 在 Aitex.RT.Module.RtRecipeFileContext.GetRecipes(String chamberId, Boolean includingUsedRecipe) 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\Module\RtRecipeFileContext.cs:行号 273
  30. [Save Log Job] 2024-10-17 13:31:30.688 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  31. [Save Log Job] 2024-10-17 13:31:30.715 LOG.ERROR LOG.cs Line:51 Write() -
  32. System.IO.FileNotFoundException: 未能找到文件“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”。
  33. 文件名:“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”
  34. 在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
  35. 在 System.IO.FileStream.Init(String path, FileMode mode, FileAccess access, Int32 rights, Boolean useRights, FileShare share, Int32 bufferSize, FileOptions options, SECURITY_ATTRIBUTES secAttrs, String msgPath, Boolean bFromProxy, Boolean useLongPath, Boolean checkHost)
  36. 在 System.IO.FileStream..ctor(String path, FileMode mode, FileAccess access, FileShare share, Int32 bufferSize)
  37. 在 System.Xml.XmlDownloadManager.GetStream(Uri uri, ICredentials credentials, IWebProxy proxy, RequestCachePolicy cachePolicy)
  38. 在 System.Xml.XmlUrlResolver.GetEntity(Uri absoluteUri, String role, Type ofObjectToReturn)
  39. 在 System.Xml.XmlTextReaderImpl.OpenUrlDelegate(Object xmlResolver)
  40. 在 System.Threading.CompressedStack.runTryCode(Object userData)
  41. 在 System.Runtime.CompilerServices.RuntimeHelpers.ExecuteCodeWithGuaranteedCleanup(TryCode code, CleanupCode backoutCode, Object userData)
  42. 在 System.Threading.CompressedStack.Run(CompressedStack compressedStack, ContextCallback callback, Object state)
  43. 在 System.Xml.XmlTextReaderImpl.OpenUrl()
  44. 在 System.Xml.XmlTextReaderImpl.Read()
  45. 在 System.Xml.XmlLoader.Load(XmlDocument doc, XmlReader reader, Boolean preserveWhitespace)
  46. 在 System.Xml.XmlDocument.Load(XmlReader reader)
  47. 在 System.Xml.XmlDocument.Load(String filename)
  48. 在 Aitex.Core.Util.FileSigner.IsValid(String fileName) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\FileSigner.cs:行号 140
  49. 在 Aitex.Core.Account.AccountManager.GetAccountList() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Account\AccountManager.cs:行号 599
  50. [Save Log Job] 2024-10-17 13:31:30.723 LOG.ERROR LOG.cs Line:56 Write() - 获取账号列表发生异常
  51. System.IO.FileNotFoundException: 未能找到文件“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”。
  52. 文件名:“D:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Account\Account.xml”
  53. 在 System.IO.__Error.WinIOError(Int32 errorCode, String maybeFullPath)
  54. 在 System.IO.FileStream.Init(String path, FileMode mode, FileAccess access, Int32 rights, Boolean useRights, FileShare share, Int32 bufferSize, FileOptions options, SECURITY_ATTRIBUTES secAttrs, String msgPath, Boolean bFromProxy, Boolean useLongPath, Boolean checkHost)
  55. 在 System.IO.FileStream..ctor(String path, FileMode mode, FileAccess access, FileShare share, Int32 bufferSize)
  56. 在 System.Xml.XmlDownloadManager.GetStream(Uri uri, ICredentials credentials, IWebProxy proxy, RequestCachePolicy cachePolicy)
  57. 在 System.Xml.XmlUrlResolver.GetEntity(Uri absoluteUri, String role, Type ofObjectToReturn)
  58. 在 System.Xml.XmlTextReaderImpl.OpenUrlDelegate(Object xmlResolver)
  59. 在 System.Threading.CompressedStack.runTryCode(Object userData)
  60. 在 System.Runtime.CompilerServices.RuntimeHelpers.ExecuteCodeWithGuaranteedCleanup(TryCode code, CleanupCode backoutCode, Object userData)
  61. 在 System.Threading.CompressedStack.Run(CompressedStack compressedStack, ContextCallback callback, Object state)
  62. 在 System.Xml.XmlTextReaderImpl.OpenUrl()
  63. 在 System.Xml.XmlTextReaderImpl.Read()
  64. 在 System.Xml.XmlLoader.Load(XmlDocument doc, XmlReader reader, Boolean preserveWhitespace)
  65. 在 System.Xml.XmlDocument.Load(XmlReader reader)
  66. 在 System.Xml.XmlDocument.Load(String filename)
  67. 在 Aitex.Core.Util.FileSigner.IsValid(String fileName) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Utilities\FileSigner.cs:行号 140
  68. 在 Aitex.Core.Account.AccountManager.GetAccountList() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\Account\AccountManager.cs:行号 599
  69. [Save Log Job] 2024-10-17 13:31:30.738 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  70. [Save Log Job] 2024-10-17 13:31:30.746 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
  71. [Save Log Job] 2024-10-17 13:31:30.747 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  72. [Save Log Job] 2024-10-17 13:31:30.758 LOG.INFO LOG.cs Line:61 Write() - 创建账号admin
  73. [Save Log Job] 2024-10-17 13:31:30.767 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  74. [Save Log Job] 2024-10-17 13:31:30.774 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  75. [Save Log Job] 2024-10-17 13:31:30.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 用户帐号''admin''已被创建。
  76. [Save Log Job] 2024-10-17 13:31:30.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
  77. [Save Log Job] 2024-10-17 13:31:30.921 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  78. [Save Log Job] 2024-10-17 13:31:34.718 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_Language, 2)
  79. [Save Log Job] 2024-10-17 13:31:35.143 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
  80. [Save Log Job] 2024-10-17 13:31:46.139 LOG.ERROR LOG.cs Line:56 Write() - Communication failed with PLC 192.168.10.10:9600
  81. System.Net.Sockets.SocketException (0x80004005): 由于连接方在一段时间后没有正确答复或连接的主机没有反应,连接尝试失败。 192.168.10.10:9600
  82. 在 System.Net.Sockets.TcpClient..ctor(String hostname, Int32 port)
  83. 在 Aitex.Core.RT.PLC.FinsDataDevice.Open() 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\PLC\FinsDataDevice.cs:行号 180
  84. <== [Save Log Job] 2024-10-17 13:32:36.441 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  85. [Save Log Job] 2024-10-17 13:32:37.463 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  86. [Save Log Job] 2024-10-17 13:32:37.464 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  87. [Save Log Job] 2024-10-17 13:32:37.539 LOG.INFO EventService.cs Line:60 Register() - 客户端87c5737c-b71e-4392-a298-a7924a4a6d10已连接
  88. [Save Log Job] 2024-10-17 13:32:37.540 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  89. [Save Log Job] 2024-10-17 13:32:47.610 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
  90. <== [Save Log Job] 2024-10-17 13:33:38.286 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  91. [Save Log Job] 2024-10-17 13:33:39.161 LOG.INFO EventService.cs Line:60 Register() - 客户端79e8873b-90e8-4bd3-a05f-c16aa9590281已连接
  92. [Save Log Job] 2024-10-17 13:33:39.283 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  93. [Save Log Job] 2024-10-17 13:33:39.284 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  94. [Save Log Job] 2024-10-17 13:33:39.328 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  95. [Save Log Job] 2024-10-17 13:33:45.444 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
  96. [Save Log Job] 2024-10-17 13:33:45.445 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  97. [Save Log Job] 2024-10-17 13:33:45.451 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
  98. [Save Log Job] 2024-10-17 13:33:45.600 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  99. [Save Log Job] 2024-10-17 13:33:47.795 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  100. [Save Log Job] 2024-10-17 13:33:47.795 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  101. [Save Log Job] 2024-10-17 13:33:49.392 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒
  102. [Save Log Job] 2024-10-17 13:33:56.954 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  103. [Save Log Job] 2024-10-17 13:33:56.954 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  104. [Save Log Job] 2024-10-17 13:33:58.960 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  105. [Save Log Job] 2024-10-17 13:33:58.960 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  106. [Save Log Job] 2024-10-17 13:34:00.416 LOG.ERROR LOG.cs Line:56 Write() - Communication failed with PLC 192.168.10.10:9600
  107. System.Net.Sockets.SocketException (0x80004005): 由于连接方在一段时间后没有正确答复或连接的主机没有反应,连接尝试失败。 192.168.10.10:9600
  108. 在 System.Net.Sockets.TcpClient..ctor(String hostname, Int32 port)
  109. 在 Aitex.Core.RT.PLC.FinsDataDevice.Open() 位置 D:\jet.plasma\trunk\Triton160\Triton160RT\PLC\FinsDataDevice.cs:行号 180
  110. [Save Log Job] 2024-10-17 13:34:08.637 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  111. [Save Log Job] 2024-10-17 13:34:08.637 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  112. <== [Save Log Job] 2024-10-17 13:35:10.623 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  113. [Save Log Job] 2024-10-17 13:35:11.665 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  114. [Save Log Job] 2024-10-17 13:35:11.666 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  115. [Save Log Job] 2024-10-17 13:35:11.710 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  116. [Save Log Job] 2024-10-17 13:35:11.737 LOG.INFO EventService.cs Line:60 Register() - 客户端37906079-7e22-44b0-97b9-741b77f9e9c5已连接
  117. [Save Log Job] 2024-10-17 13:35:11.737 LOG.INFO EventService.cs Line:60 Register() - 客户端37906079-7e22-44b0-97b9-741b77f9e9c5已连接
  118. [Save Log Job] 2024-10-17 13:35:13.817 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  119. ==> <== [Save Log Job] 2024-10-17 13:35:41.193 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  120. [Save Log Job] 2024-10-17 13:35:42.157 LOG.INFO EventService.cs Line:60 Register() - 客户端384dd23d-0918-4138-9fc4-db1004865727已连接
  121. [Save Log Job] 2024-10-17 13:35:42.314 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  122. [Save Log Job] 2024-10-17 13:35:42.314 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  123. [Save Log Job] 2024-10-17 13:35:42.358 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  124. [Save Log Job] 2024-10-17 13:35:51.907 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  125. [Save Log Job] 2024-10-17 13:36:13.348 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
  126. [Save Log Job] 2024-10-17 13:36:17.265 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
  127. [Save Log Job] 2024-10-17 13:36:17.266 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  128. [Save Log Job] 2024-10-17 13:36:17.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
  129. [Save Log Job] 2024-10-17 13:36:17.390 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  130. [Save Log Job] 2024-10-17 13:36:24.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 菜单文件\\123保存成功
  131. [Save Log Job] 2024-10-17 13:36:24.642 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
  132. [Save Log Job] 2024-10-17 13:36:40.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 菜单文件123保存成功
  133. [Save Log Job] 2024-10-17 13:36:40.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
  134. [Save Log Job] 2024-10-17 13:36:41.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 菜单文件123保存成功
  135. [Save Log Job] 2024-10-17 13:36:41.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
  136. [Save Log Job] 2024-10-17 13:36:49.664 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 SetAutoMode()
  137. [Save Log Job] 2024-10-17 13:36:49.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
  138. [Save Log Job] 2024-10-17 13:36:49.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to 自动模式
  139. [Save Log Job] 2024-10-17 13:36:51.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 RunRecipe(123, )
  140. [Save Log Job] 2024-10-17 13:36:51.118 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241017133651-123
  141. [Save Log Job] 2024-10-17 13:36:51.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
  142. [Save Log Job] 2024-10-17 13:36:51.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:检查门的状态。
  143. [Save Log Job] 2024-10-17 13:36:51.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:检查腔体门是否关闭。
  144. [Save Log Job] 2024-10-17 13:36:51.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:检查背板门是否关闭。
  145. [Save Log Job] 2024-10-17 13:36:51.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:检查泵的状态。
  146. [Save Log Job] 2024-10-17 13:36:51.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:关闭所有阀门。
  147. [Save Log Job] 2024-10-17 13:36:51.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:打开抽气阀门。
  148. [Save Log Job] 2024-10-17 13:36:51.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  149. [Save Log Job] 2024-10-17 13:36:53.238 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
  150. [Save Log Job] 2024-10-17 13:36:54.070 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:检查腔体压力。
  151. [Save Log Job] 2024-10-17 13:37:32.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:抽气到100毫托。
  152. [Save Log Job] 2024-10-17 13:37:32.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess 操作完成,用时0.7分钟。
  153. [Save Log Job] 2024-10-17 13:37:32.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
  154. [Save Log Job] 2024-10-17 13:37:32.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241017133651-123
  155. [Save Log Job] 2024-10-17 13:37:32.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241017133651-123''
  156. [Save Log Job] 2024-10-17 13:37:33.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017133651-123'' start run step 1:initial。
  157. [Save Log Job] 2024-10-17 13:37:33.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
  158. [Save Log Job] 2024-10-17 13:37:33.023 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
  159. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
  160. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
  161. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
  162. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
  163. [Save Log Job] 2024-10-17 13:37:33.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
  164. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
  165. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
  166. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
  167. [Save Log Job] 2024-10-17 13:37:33.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
  168. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 100sccm。
  169. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 100sccm。
  170. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 0sccm。
  171. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 0sccm。
  172. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 0sccm。
  173. [Save Log Job] 2024-10-17 13:37:33.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
  174. [Save Log Job] 2024-10-17 13:37:33.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
  175. [Save Log Job] 2024-10-17 13:38:03.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017133651-123'' end step 1
  176. [Save Log Job] 2024-10-17 13:38:03.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
  177. [Save Log Job] 2024-10-17 13:38:03.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed,菜单文件:20241017133651-123
  178. 开始时间:2024/10/17 13:37:32
  179. 结束时间:2024/10/17 13:38:03
  180. 总时间:0:0:30
  181. [Save Log Job] 2024-10-17 13:38:03.105 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 工艺运行结束
  182. [Save Log Job] 2024-10-17 13:38:03.158 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 等待10秒钟
  183. [Save Log Job] 2024-10-17 13:38:05.119 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
  184. [Save Log Job] 2024-10-17 13:38:05.119 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
  185. [Save Log Job] 2024-10-17 13:38:05.120 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败,原因:Valve keep open。
  186. [Save Log Job] 2024-10-17 13:38:13.229 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 关闭射频
  187. [Save Log Job] 2024-10-17 13:38:13.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 停止流气
  188. [Save Log Job] 2024-10-17 13:38:22.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 关闭所有阀门
  189. [Save Log Job] 2024-10-17 13:38:23.013 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 开始吹扫, Loop 1
  190. [Save Log Job] 2024-10-17 13:38:23.014 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 压力抽到100毫托
  191. [Save Log Job] 2024-10-17 13:38:26.780 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 抽气等待10秒
  192. [Save Log Job] 2024-10-17 13:38:28.751 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
  193. [Save Log Job] 2024-10-17 13:38:35.853 LOG.INFO LOG.cs Line:61 Write() - user login server
  194. [Save Log Job] 2024-10-17 13:38:36.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, 充气压力到700000毫托
  195. [Save Log Job] 2024-10-17 13:38:52.977 LOG.INFO LOG.cs Line:61 Write() - user login server
  196. [Save Log Job] 2024-10-17 13:40:36.926 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System 工艺程序收尾处理错误:Can not purge to purge pressure 700000 in purge time 120。
  197. [Save Log Job] 2024-10-17 13:40:36.927 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System 工艺收尾失败
  198. [Save Log Job] 2024-10-17 13:40:36.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
  199. [Save Log Job] 2024-10-17 13:40:36.934 LOG.WARN StateMachine.cs Line:163 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。
  200. [Save Log Job] 2024-10-17 13:40:37.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  201. [Save Log Job] 2024-10-17 13:40:38.973 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber purge valveClose失败,原因:Valve keep open。
  202. [Save Log Job] 2024-10-17 13:40:38.973 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败,原因:Valve keep open。
  203. [Save Log Job] 2024-10-17 13:41:34.681 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  204. [Save Log Job] 2024-10-17 13:41:34.682 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  205. [Save Log Job] 2024-10-17 13:41:40.039 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  206. [Save Log Job] 2024-10-17 13:41:40.039 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  207. [Save Log Job] 2024-10-17 14:15:08.499 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed,please confirm PLC still running
  208. [Save Log Job] 2024-10-17 14:30:24.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 SetConfig(System_Language, 1)
  209. [Save Log Job] 2024-10-17 14:30:56.705 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_Language, 2)
  210. [Save Log Job] 2024-10-17 14:31:12.905 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  211. [Save Log Job] 2024-10-17 14:31:12.905 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  212. [Save Log Job] 2024-10-17 14:31:20.371 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  213. [Save Log Job] 2024-10-17 14:31:20.372 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  214. [Save Log Job] 2024-10-17 14:31:25.095 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
  215. [Save Log Job] 2024-10-17 14:31:25.095 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  216. <== [Save Log Job] 2024-10-17 17:05:46.754 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
  217. [Save Log Job] 2024-10-17 17:05:47.608 LOG.INFO EventService.cs Line:60 Register() - 客户端72d40692-44ab-4d84-b37a-292f2db80e83已连接
  218. [Save Log Job] 2024-10-17 17:05:47.608 LOG.INFO EventService.cs Line:60 Register() - 客户端72d40692-44ab-4d84-b37a-292f2db80e83已连接
  219. [Save Log Job] 2024-10-17 17:05:47.728 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
  220. [Save Log Job] 2024-10-17 17:05:47.728 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
  221. [Save Log Job] 2024-10-17 17:05:47.820 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
  222. [Save Log Job] 2024-10-17 17:05:49.241 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  223. [Save Log Job] 2024-10-17 17:05:52.833 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
  224. [Save Log Job] 2024-10-17 17:06:21.481 LOG.INFO LOG.cs Line:61 Write() - 用户amin尝试登录系统
  225. [Save Log Job] 2024-10-17 17:06:21.482 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息amin
  226. [Save Log Job] 2024-10-17 17:06:38.340 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
  227. [Save Log Job] 2024-10-17 17:06:38.340 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  228. [Save Log Job] 2024-10-17 17:06:38.352 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
  229. [Save Log Job] 2024-10-17 17:06:38.486 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
  230. [Save Log Job] 2024-10-17 17:07:08.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - 手动操作 SetConfig(System_Language, 1)
  231. [Save Log Job] 2024-10-17 17:10:03.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file 123 save completed
  232. [Save Log Job] 2024-10-17 17:10:03.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
  233. [Save Log Job] 2024-10-17 17:11:29.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
  234. [Save Log Job] 2024-10-17 17:11:29.795 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
  235. [Save Log Job] 2024-10-17 17:11:29.795 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
  236. [Save Log Job] 2024-10-17 17:12:11.661 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
  237. [Save Log Job] 2024-10-17 17:12:11.674 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241017171211-123
  238. [Save Log Job] 2024-10-17 17:12:11.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
  239. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
  240. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
  241. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
  242. [Save Log Job] 2024-10-17 17:12:11.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
  243. [Save Log Job] 2024-10-17 17:12:11.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
  244. [Save Log Job] 2024-10-17 17:12:11.790 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
  245. [Save Log Job] 2024-10-17 17:12:11.831 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  246. [Save Log Job] 2024-10-17 17:12:13.835 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
  247. [Save Log Job] 2024-10-17 17:12:14.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
  248. [Save Log Job] 2024-10-17 17:13:20.388 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Pump below 100mTorr。
  249. [Save Log Job] 2024-10-17 17:13:20.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess Finished in 1.1 minitues。
  250. [Save Log Job] 2024-10-17 17:13:20.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
  251. [Save Log Job] 2024-10-17 17:13:20.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241017171211-123
  252. [Save Log Job] 2024-10-17 17:13:20.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241017171211-123''
  253. [Save Log Job] 2024-10-17 17:13:20.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017171211-123'' start run step 1:initial。
  254. [Save Log Job] 2024-10-17 17:13:20.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
  255. [Save Log Job] 2024-10-17 17:13:20.500 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
  256. [Save Log Job] 2024-10-17 17:13:20.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
  257. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
  258. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
  259. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
  260. [Save Log Job] 2024-10-17 17:13:20.501 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
  261. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
  262. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
  263. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
  264. [Save Log Job] 2024-10-17 17:13:20.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
  265. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
  266. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 100sccm。
  267. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 0sccm。
  268. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 0sccm。
  269. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 0sccm。
  270. [Save Log Job] 2024-10-17 17:13:20.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
  271. [Save Log Job] 2024-10-17 17:13:20.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
  272. [Save Log Job] 2024-10-17 17:13:50.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241017171211-123'' end step 1
  273. [Save Log Job] 2024-10-17 17:13:50.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
  274. [Save Log Job] 2024-10-17 17:13:50.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed,Recipe:20241017171211-123
  275. Start time:2024/10/17 17:13:20
  276. End time:2024/10/17 17:13:50
  277. Total time:0:0:30
  278. [Save Log Job] 2024-10-17 17:13:50.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
  279. [Save Log Job] 2024-10-17 17:13:50.648 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
  280. [Save Log Job] 2024-10-17 17:13:52.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
  281. [Save Log Job] 2024-10-17 17:13:52.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
  282. [Save Log Job] 2024-10-17 17:13:52.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败,原因:Valve keep open。
  283. [Save Log Job] 2024-10-17 17:14:00.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
  284. [Save Log Job] 2024-10-17 17:14:00.782 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
  285. [Save Log Job] 2024-10-17 17:14:10.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
  286. [Save Log Job] 2024-10-17 17:14:10.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Start cycle purge, Loop 1
  287. [Save Log Job] 2024-10-17 17:14:10.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, pumping pressure to 100 mTor
  288. [Save Log Job] 2024-10-17 17:14:25.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, pump delay 10 seconds
  289. [Save Log Job] 2024-10-17 17:14:27.751 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
  290. [Save Log Job] 2024-10-17 17:14:35.879 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent pressure to 700000 mtor
  291. [Save Log Job] 2024-10-17 17:15:55.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
  292. [Save Log Job] 2024-10-17 17:15:55.967 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in PostProcess,can not do SetManualMode。
  293. [Save Log Job] 2024-10-17 17:16:26.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
  294. [Save Log Job] 2024-10-17 17:16:26.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
  295. [Save Log Job] 2024-10-17 17:16:26.774 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  296. [Save Log Job] 2024-10-17 17:16:32.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
  297. [Save Log Job] 2024-10-17 17:16:32.453 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
  298. [Save Log Job] 2024-10-17 17:16:32.453 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
  299. [Save Log Job] 2024-10-17 17:21:52.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file 123 save completed
  300. [Save Log Job] 2024-10-17 17:21:52.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
  301. [Save Log Job] 2024-10-17 17:26:09.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
  302. [Save Log Job] 2024-10-17 17:26:09.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
  303. [Save Log Job] 2024-10-17 17:26:09.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
  304. [Save Log Job] 2024-10-17 17:29:43.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
  305. [Save Log Job] 2024-10-17 17:29:43.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
  306. [Save Log Job] 2024-10-17 17:29:43.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
  307. [Save Log Job] 2024-10-17 17:30:05.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
  308. [Save Log Job] 2024-10-17 17:30:05.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:BoostPump.SetPressure,。
  309. [Save Log Job] 2024-10-17 17:30:05.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 100)
  310. [Save Log Job] 2024-10-17 17:30:05.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 120)
  311. [Save Log Job] 2024-10-17 17:30:05.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
  312. [Save Log Job] 2024-10-17 17:30:05.739 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  313. [Save Log Job] 2024-10-17 17:30:05.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Check door status。
  314. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:check chamber door。
  315. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:check backpanel door。
  316. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Check pump status。
  317. [Save Log Job] 2024-10-17 17:30:05.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Close all the valves。
  318. [Save Log Job] 2024-10-17 17:30:05.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  319. [Save Log Job] 2024-10-17 17:30:05.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Open pumping valve。
  320. [Save Log Job] 2024-10-17 17:30:06.380 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Wait chamber pressure until below 100。
  321. [Save Log Job] 2024-10-17 17:30:10.793 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
  322. [Save Log Job] 2024-10-17 17:30:10.793 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:ThrottleValve.SetMode,Throttle valve set to TVPressureCtrl mode。
  323. [Save Log Job] 2024-10-17 17:30:10.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 50)
  324. [Save Log Job] 2024-10-17 17:30:10.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:ThrottleValve.SetPressure,pressure set 50 mTorr。
  325. [Save Log Job] 2024-10-17 17:31:54.384 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Pump below 100mTorr。
  326. [Save Log Job] 2024-10-17 17:31:54.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System 抽气:Pump Finished in 1.8 minitues。
  327. [Save Log Job] 2024-10-17 17:31:54.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
  328. [Save Log Job] 2024-10-17 17:31:54.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
  329. [Save Log Job] 2024-10-17 17:31:54.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
  330. ==>