ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Servers/ErrorCode.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace EFEM.RT
{
    public enum ErrorCodel
    {
        VAC,  //Insufficient vacuum source pressure 
        AIR,  //Insufficient compressed air source pressure
        STALL,  //Stall
        TIMEOUT,    //Motion timeout
        LIMIT,      //Limit error      
        SENSOR,     //Sensor abnormal               
        POSITION,   //Position error      
        EMS,        //Emergency stop        
        COMM,       //Communication error between controllers               
        COMM2,      //Communication error between modules
                    
        VACON,      //Chucking on error  
        VACOFF,     //Chucking off error      
        CLAMPON,    //Clamp on error Enabled     
        CLAMPOF,    //Clamp off error      
        RRTWAF,     //Wafer protrusion        
        CRSWAF,     //Cross wafer detection  
        THICKWAF,   //Abnormal thickness wafer detection (thick)

        THINWAF,     //Abnormal thickness wafer detection (thin)
        DBLWAF,      //Dual wafers detection 
        BAOWAF,      //Front bow wafer detection
        COMMAND,     //Command error
        PODNG,       //Pod abnormal load error
        PODMISMATCH, //Pod type mismatch
        VAC_S,       //Chucking sensor abnormal
        CLAMP_S,     //Clamp sensor abnormal
        SAFTY,       //Hand/finger pinch sensor reaction


        LOCKNG,     //FOUP lock      
        UNLOCKNG,   //FOUP unlock
        L_KEY_LK,   //Latch key lock failure
        L_KEY_UL,   //Latch key unlock failure
        MAP_S,      //Mapping sensor abnormal
        MAP_S1,     //Mapping sensor preparation


        MAP_S2,     //Mapping sensor containing


        WAFLOST,    //Wafer fall
        ALIGNNG,    //Alignment failure
        DRIVER,     //Driver abnormal
        DRPOWERDOWN, //Drive power off
        HARDWARE,   //Hardware failure
        INTERNAL,   //Internal error
        E84_TIMEOUTx, //E84 timeout
        E84_CS_VALID,   //E84CS_0, CS_1, VALIDerror


        READFAIL,       //Reading error
        UNDEFINITION,   //Undefined error

    }
}