AbsPolicy.cs 21 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using EFEM.RT.Devices;
  7. namespace EFEM.RT.ABS
  8. {
  9. /// <summary>
  10. /// Insufficient vacuum source pressure
  11. /// </summary>
  12. public class VacPolicy : CheckImp, IPolicy
  13. {
  14. public VacPolicy()
  15. {
  16. }
  17. public bool Check(string device, out string reason)
  18. {
  19. reason = string.Empty;
  20. if (!DeviceModel.SensorVACPressureSW.Value)
  21. {
  22. reason = string.Format("VAC");
  23. return false;
  24. }
  25. return true;
  26. }
  27. }
  28. /// <summary>
  29. /// AIR Insufficient air source pressure
  30. /// </summary>
  31. public class AirPolicy : CheckImp, IPolicy
  32. {
  33. public AirPolicy()
  34. {
  35. }
  36. public bool Check(string device, out string reason)
  37. {
  38. reason = string.Empty;
  39. //if (DeviceModel.SensorMainAirErrorForRobot.Value || DeviceModel.SensorMainAirErrorForLoadport.Value)
  40. //{
  41. // reason = string.Format("AIR");
  42. // return false;
  43. //}
  44. return true;
  45. }
  46. }
  47. /// <summary>
  48. /// Motor Stall - Controller detected motor stall.
  49. /// (1) If a wafer is on the finger or aligner, confirm that the wafer is not misaligned.
  50. /// If the wafer is misaligned, retrieve the wafer.
  51. /// (2) After(1) is confirmed, send "SET: ERROR/CLEAR;", "MOV:INIT;" and
  52. /// "MOV:ORGSH;" messages to EFEM to recover.
  53. /// Note: If this error occurs again, maintenance for mechanical and electric
  54. /// sections is required.
  55. /// </summary>
  56. public class StallPolicy : CheckImp, IPolicy
  57. {
  58. public StallPolicy()
  59. {
  60. }
  61. public bool Check(string device, out string reason)
  62. {
  63. reason = string.Empty;
  64. if (false)
  65. {
  66. reason = string.Format("STALL");
  67. return false;
  68. }
  69. return true;
  70. }
  71. }
  72. /// <summary>
  73. /// LIMIT Limit error
  74. /// </summary>
  75. public class LIMITPolicy : CheckImp, IPolicy
  76. {
  77. public LIMITPolicy()
  78. {
  79. }
  80. public bool Check(string device, out string reason)
  81. {
  82. reason = string.Empty;
  83. if (false)
  84. {
  85. reason = string.Format("LIMIT");
  86. return false;
  87. }
  88. return true;
  89. }
  90. }
  91. /// <summary>
  92. /// SENSOR Sensor abnormal
  93. /// </summary>
  94. public class SENSORPolicy : CheckImp, IPolicy
  95. {
  96. public SENSORPolicy()
  97. {
  98. }
  99. public bool Check(string device, out string reason)
  100. {
  101. reason = string.Empty;
  102. if (false)
  103. {
  104. reason = string.Format("SENSOR");
  105. return false;
  106. }
  107. return true;
  108. }
  109. }
  110. /// <summary>
  111. /// POSITION Position error
  112. /// </summary>
  113. public class POSITIONPolicy : CheckImp, IPolicy
  114. {
  115. public POSITIONPolicy()
  116. {
  117. }
  118. public bool Check(string device, out string reason)
  119. {
  120. reason = string.Empty;
  121. if (false)
  122. {
  123. reason = string.Format("POSITION");
  124. return false;
  125. }
  126. return true;
  127. }
  128. }
  129. /// <summary>
  130. /// Emergency stop
  131. /// </summary>
  132. public class EMSPolicy : CheckImp, IPolicy
  133. {
  134. public EMSPolicy()
  135. {
  136. }
  137. public bool Check(string device, out string reason)
  138. {
  139. reason = string.Empty;
  140. if (false)
  141. {
  142. reason = string.Format("EMS");
  143. return false;
  144. }
  145. return true;
  146. }
  147. }
  148. /// <summary>
  149. /// Controller Communication
  150. /// Error occurred in communication between the controllers of the unit.
  151. /// </summary>
  152. public class COMMPolicy : CheckImp, IPolicy
  153. {
  154. public COMMPolicy()
  155. {
  156. }
  157. public bool Check(string device, out string reason)
  158. {
  159. reason = string.Empty;
  160. if (false)
  161. {
  162. reason = string.Format("COMM");
  163. return false;
  164. }
  165. return true;
  166. }
  167. }
  168. /// <summary>
  169. /// COMM2 Module Communication Error
  170. /// Error occurred in communication between modules.
  171. /// </summary>
  172. public class COMM2Policy : CheckImp, IPolicy
  173. {
  174. public COMM2Policy()
  175. {
  176. }
  177. public bool Check(string device, out string reason)
  178. {
  179. reason = string.Empty;
  180. if (false)
  181. {
  182. reason = string.Format("COMM2");
  183. return false;
  184. }
  185. return true;
  186. }
  187. }
  188. /// <summary>
  189. /// VACON Vacuum ON Error - Load port failed to perform chucking of FOUP door when opening FOUP.
  190. /// </summary>
  191. public class VACONPolicy : CheckImp, IPolicy
  192. {
  193. public VACONPolicy()
  194. {
  195. }
  196. public bool Check(string device, out string reason)
  197. {
  198. reason = string.Empty;
  199. if (false)
  200. {
  201. reason = string.Format("VACON");
  202. return false;
  203. }
  204. return true;
  205. }
  206. }
  207. /// <summary>
  208. ///VACOF Vacuum OFF error - Vacuum solenoid valve at the load port failed.
  209. /// </summary>
  210. public class VACOFPolicy : CheckImp, IPolicy
  211. {
  212. public VACOFPolicy()
  213. {
  214. }
  215. public bool Check(string device, out string reason)
  216. {
  217. reason = string.Empty;
  218. if (false)
  219. {
  220. reason = string.Format("VACOF");
  221. return false;
  222. }
  223. return true;
  224. }
  225. }
  226. /// <summary>
  227. ///CLAMPON Aligner Clamp On Error - Aligner failed clamping wafer when placing wafer on the aligner.
  228. /// Robot Clamp ON Error - Robot failed clamping wafer when picking up the wafer.
  229. /// </summary>
  230. public class CLAMPONPolicy : CheckImp, IPolicy
  231. {
  232. public CLAMPONPolicy()
  233. {
  234. }
  235. public bool Check(string device, out string reason)
  236. {
  237. reason = string.Empty;
  238. if (false)
  239. {
  240. reason = string.Format("CLAMPON");
  241. return false;
  242. }
  243. return true;
  244. }
  245. }
  246. /// <summary>
  247. ///CLAMPOF
  248. ///Clamp Off Error - Clamp cylinder of the robot failed
  249. ///Clamp sensor of the robot failed
  250. ///Clamp cylinder of the aligner failed
  251. ///Clamp sensor of the aligner failed.
  252. /// </summary>
  253. public class CLAMPOFPolicy : CheckImp, IPolicy
  254. {
  255. public CLAMPOFPolicy()
  256. {
  257. }
  258. public bool Check(string device, out string reason)
  259. {
  260. reason = string.Empty;
  261. if (false)
  262. {
  263. reason = string.Format("CLAMPOF");
  264. return false;
  265. }
  266. return true;
  267. }
  268. }
  269. /// <summary>
  270. /// PRTWAF Found Wafer Protrude - Wafer protrusion is detected.
  271. /// </summary>
  272. public class PRTWAFPolicy : CheckImp, IPolicy
  273. {
  274. public PRTWAFPolicy()
  275. {
  276. }
  277. public bool Check(string device, out string reason)
  278. {
  279. reason = string.Empty;
  280. if (false)
  281. {
  282. reason = string.Format("PRTWAF");
  283. return false;
  284. }
  285. return true;
  286. }
  287. }
  288. /// <summary>
  289. /// COMMAND
  290. /// Command Error - Command error occurred in the communication between controllers.
  291. /// </summary>
  292. public class COMMANDPolicy : CheckImp, IPolicy
  293. {
  294. public COMMANDPolicy()
  295. {
  296. }
  297. public bool Check(string device, out string reason)
  298. {
  299. reason = string.Empty;
  300. if (false)
  301. {
  302. reason = string.Format("COMMAND");
  303. return false;
  304. }
  305. return true;
  306. }
  307. }
  308. /// <summary>
  309. /// PODNG
  310. /// Pod No-Good Position - FOUP is not properly placed.
  311. /// </summary>
  312. public class PODNGPolicy : CheckImp, IPolicy
  313. {
  314. public PODNGPolicy()
  315. {
  316. }
  317. public bool Check(string device, out string reason)
  318. {
  319. reason = string.Empty;
  320. if (false)
  321. {
  322. reason = string.Format("PODNG");
  323. return false;
  324. }
  325. return true;
  326. }
  327. }
  328. /// <summary>
  329. /// PODMISMATCH
  330. /// Pod Type Mismatch - Carrier other than FOUP is place on the load port.
  331. /// No cover is on FOUP on the load port.
  332. /// </summary>
  333. public class PODMISMATCHPolicy : CheckImp, IPolicy
  334. {
  335. public PODMISMATCHPolicy()
  336. {
  337. }
  338. public bool Check(string device, out string reason)
  339. {
  340. reason = string.Empty;
  341. if (false)
  342. {
  343. reason = string.Format("PODMISMATCH");
  344. return false;
  345. }
  346. return true;
  347. }
  348. }
  349. /// <summary>
  350. /// VAC_S
  351. /// Vacuum Sensor Error - Chucking sensor on the load port shows abnormality.
  352. /// </summary>
  353. public class VAC_SPolicy : CheckImp, IPolicy
  354. {
  355. public VAC_SPolicy()
  356. {
  357. }
  358. public bool Check(string device, out string reason)
  359. {
  360. reason = string.Empty;
  361. if (false)
  362. {
  363. reason = string.Format("VAC_S");
  364. return false;
  365. }
  366. return true;
  367. }
  368. }
  369. /// <summary>
  370. /// CLAMP_S
  371. /// Clamp Sensor Error - Clamp sensor in the robot shows abnormality.
  372. /// Clamp sensor in the aligner shows abnormality.
  373. /// </summary>
  374. public class CLAMP_SPolicy : CheckImp, IPolicy
  375. {
  376. public CLAMP_SPolicy()
  377. {
  378. }
  379. public bool Check(string device, out string reason)
  380. {
  381. reason = string.Empty;
  382. if (false)
  383. {
  384. reason = string.Format("CLAMP_S");
  385. return false;
  386. }
  387. return true;
  388. }
  389. }
  390. /// <summary>
  391. /// SAFTY
  392. /// Safety Sensor Active - Finger pinch detecting sensor is activated during load port operation.
  393. /// </summary>
  394. public class SAFTYPolicy : CheckImp, IPolicy
  395. {
  396. public SAFTYPolicy()
  397. {
  398. }
  399. public bool Check(string device, out string reason)
  400. {
  401. reason = string.Empty;
  402. if (false)
  403. {
  404. reason = string.Format("SAFTY");
  405. return false;
  406. }
  407. return true;
  408. }
  409. }
  410. /// <summary>
  411. /// LOCKNG
  412. /// FOUP Lock Fail - FOUP clamp failure on the load port
  413. /// </summary>
  414. public class LOCKNGPolicy : CheckImp, IPolicy
  415. {
  416. public LOCKNGPolicy()
  417. {
  418. }
  419. public bool Check(string device, out string reason)
  420. {
  421. reason = string.Empty;
  422. if (false)
  423. {
  424. reason = string.Format("LOCKNG");
  425. return false;
  426. }
  427. return true;
  428. }
  429. }
  430. /// <summary>
  431. /// UNLOCKNG
  432. /// FOUP Unlock Fail - FOUP unclamp failure on the load port.
  433. /// </summary>
  434. public class UNLOCKNGPolicy : CheckImp, IPolicy
  435. {
  436. public UNLOCKNGPolicy()
  437. {
  438. }
  439. public bool Check(string device, out string reason)
  440. {
  441. reason = string.Empty;
  442. if (false)
  443. {
  444. reason = string.Format("UNLOCKNG");
  445. return false;
  446. }
  447. return true;
  448. }
  449. }
  450. /// <summary>
  451. /// L_KEY_LK
  452. /// Latch-Key Lock Fail - Latch key is not properly returned when FOUP is closed on the load port.
  453. /// </summary>
  454. public class L_KEY_LKPolicy : CheckImp, IPolicy
  455. {
  456. public L_KEY_LKPolicy()
  457. {
  458. }
  459. public bool Check(string device, out string reason)
  460. {
  461. reason = string.Empty;
  462. if (false)
  463. {
  464. reason = string.Format("L_KEY_LK");
  465. return false;
  466. }
  467. return true;
  468. }
  469. }
  470. /// <summary>
  471. /// L_KEY_UL
  472. /// Latch-Key Unlock Fail - Latch key is not properly turned when FOUP is opened on the load port.
  473. /// </summary>
  474. public class L_KEY_ULPolicy : CheckImp, IPolicy
  475. {
  476. public L_KEY_ULPolicy()
  477. {
  478. }
  479. public bool Check(string device, out string reason)
  480. {
  481. reason = string.Empty;
  482. if (false)
  483. {
  484. reason = string.Format("L_KEY_UL");
  485. return false;
  486. }
  487. return true;
  488. }
  489. }
  490. /// <summary>
  491. /// MAP_S
  492. /// Mapping Sensor Error - Mapping sensor shows abnormality on the load port.
  493. /// </summary>
  494. public class MAP_SPolicy : CheckImp, IPolicy
  495. {
  496. public MAP_SPolicy()
  497. {
  498. }
  499. public bool Check(string device, out string reason)
  500. {
  501. reason = string.Empty;
  502. if (false)
  503. {
  504. reason = string.Format("MAP_S");
  505. return false;
  506. }
  507. return true;
  508. }
  509. }
  510. /// <summary>
  511. /// MAP_S1
  512. /// Mapping Sensor Error1- Load port failed preparation for mapping sensor.
  513. /// </summary>
  514. public class MAP_S1Policy : CheckImp, IPolicy
  515. {
  516. public MAP_S1Policy()
  517. {
  518. }
  519. public bool Check(string device, out string reason)
  520. {
  521. reason = string.Empty;
  522. if (false)
  523. {
  524. reason = string.Format("MAP_S1");
  525. return false;
  526. }
  527. return true;
  528. }
  529. }
  530. /// <summary>
  531. /// MAP_S2
  532. /// Mapping Sensor Error2- Load port failed containing of mapping sensor.
  533. /// </summary>
  534. public class MAP_S2Policy : CheckImp, IPolicy
  535. {
  536. public MAP_S2Policy()
  537. {
  538. }
  539. public bool Check(string device, out string reason)
  540. {
  541. reason = string.Empty;
  542. if (false)
  543. {
  544. reason = string.Format("MAP_S2");
  545. return false;
  546. }
  547. return true;
  548. }
  549. }
  550. /// <summary>
  551. /// WAFLOST Wafer Lost - Wafer presence on the robot finger is lost.
  552. /// Wafer presence on the aligner is lost.
  553. /// </summary>
  554. public class WAFLOSTPolicy : CheckImp, IPolicy
  555. {
  556. public WAFLOSTPolicy()
  557. {
  558. }
  559. public bool Check(string device, out string reason)
  560. {
  561. reason = string.Empty;
  562. if (false)
  563. {
  564. reason = string.Format("WAFLOST");
  565. return false;
  566. }
  567. return true;
  568. }
  569. }
  570. /// <summary>
  571. ///ALIGNNG Alignment Fail - Wafer alignment failed.
  572. /// </summary>
  573. public class ALIGNNGPolicy : CheckImp, IPolicy
  574. {
  575. public ALIGNNGPolicy()
  576. {
  577. }
  578. public bool Check(string device, out string reason)
  579. {
  580. reason = string.Empty;
  581. if (false)
  582. {
  583. reason = string.Format("ALIGNNG");
  584. return false;
  585. }
  586. return true;
  587. }
  588. }
  589. /// <summary>
  590. ///DRIVER Driver Abnormal - Motor control driver shows abnormality.
  591. ///Driver abnormality is shown due to drive power failure while motor is operating.
  592. /// </summary>
  593. public class DRIVERPolicy : CheckImp, IPolicy
  594. {
  595. public DRIVERPolicy()
  596. {
  597. }
  598. public bool Check(string device, out string reason)
  599. {
  600. reason = string.Empty;
  601. if (false)
  602. {
  603. reason = string.Format("DRIVER");
  604. return false;
  605. }
  606. return true;
  607. }
  608. }
  609. /// <summary>
  610. ///DRPOWERDOWN
  611. ///Driver Power Down - Motion is stopped due to drive power failure.
  612. /// </summary>
  613. public class DRPOWERDOWNPolicy : CheckImp, IPolicy
  614. {
  615. public DRPOWERDOWNPolicy()
  616. {
  617. }
  618. public bool Check(string device, out string reason)
  619. {
  620. reason = string.Empty;
  621. if (false)
  622. {
  623. reason = string.Format("DRPOWERDOWN");
  624. return false;
  625. }
  626. return true;
  627. }
  628. }
  629. /// <summary>
  630. ///HARDWARE Hardware Error - Hardware malfunction occurred on any single unit.
  631. /// </summary>
  632. public class HARDWAREPolicy : CheckImp, IPolicy
  633. {
  634. public HARDWAREPolicy()
  635. {
  636. }
  637. public bool Check(string device, out string reason)
  638. {
  639. reason = string.Empty;
  640. if (false)
  641. {
  642. reason = string.Format("HARDWARE");
  643. return false;
  644. }
  645. return true;
  646. }
  647. }
  648. /// <summary>
  649. /// INTERNAL
  650. /// Internal Error - Internal error occurred at the section where each unit inside EFEM PC iscontrolled.
  651. /// </summary>
  652. public class INTERNALPolicy : CheckImp, IPolicy
  653. {
  654. public INTERNALPolicy()
  655. {
  656. }
  657. public bool Check(string device, out string reason)
  658. {
  659. reason = string.Empty;
  660. if (false)
  661. {
  662. reason = string.Format("INTERNAL");
  663. return false;
  664. }
  665. return true;
  666. }
  667. }
  668. /// <summary>
  669. /// CRSWAF Found Cross Wafer- Cross wafer is detected during wafer mapping.
  670. /// </summary>
  671. public class CRSWAFPolicy : CheckImp, IPolicy
  672. {
  673. public CRSWAFPolicy()
  674. {
  675. }
  676. public bool Check(string device, out string reason)
  677. {
  678. reason = string.Empty;
  679. if (false)
  680. {
  681. reason = string.Format("CRSWAF");
  682. return false;
  683. }
  684. return true;
  685. }
  686. }
  687. /// <summary>
  688. /// THICKWAF Found Thick Wafer- Thicker wafer than the standard is detected during wafer mappi
  689. /// </summary>
  690. public class THICKWAFPolicy : CheckImp, IPolicy
  691. {
  692. public THICKWAFPolicy()
  693. {
  694. }
  695. public bool Check(string device, out string reason)
  696. {
  697. reason = string.Empty;
  698. if (false)
  699. {
  700. reason = string.Format("THICKWAF");
  701. return false;
  702. }
  703. return true;
  704. }
  705. }
  706. /// <summary>
  707. /// THINWAF Found Thin wafer- Thinner wafer than the standard isdetected during wafer mapping.
  708. /// </summary>
  709. public class THINWAFPolicy : CheckImp, IPolicy
  710. {
  711. public THINWAFPolicy()
  712. {
  713. }
  714. public bool Check(string device, out string reason)
  715. {
  716. reason = string.Empty;
  717. if (false)
  718. {
  719. reason = string.Format("THINWAF");
  720. return false;
  721. }
  722. return true;
  723. }
  724. }
  725. /// <summary>
  726. /// DBLWAF Found Double Wafer- Two or more wafers in one slot ar detected during wafer mapping. ///
  727. /// </summary>
  728. public class DBLWAFPolicy : CheckImp, IPolicy
  729. {
  730. public DBLWAFPolicy()
  731. {
  732. }
  733. public bool Check(string device, out string reason)
  734. {
  735. reason = string.Empty;
  736. if (false)
  737. {
  738. reason = string.Format("DBLWAF");
  739. return false;
  740. }
  741. return true;
  742. }
  743. }
  744. /// <summary>
  745. /// BOWWAF Found Bow Wafer- Front bow wafer is detected during wafer mapping.
  746. /// </summary>
  747. public class BOWWAFPolicy : CheckImp, IPolicy
  748. {
  749. public BOWWAFPolicy()
  750. {
  751. }
  752. public bool Check(string device, out string reason)
  753. {
  754. reason = string.Empty;
  755. if (false)
  756. {
  757. reason = string.Format("BOWWAF");
  758. return false;
  759. }
  760. return true;
  761. }
  762. }
  763. /// <summary>
  764. /// E84_TIMEOUTx E84 Timeout- E84 automated transfer sequence timeout occurred. ///
  765. /// </summary>
  766. public class E84_TIMEOUTxPolicy : CheckImp, IPolicy
  767. {
  768. public E84_TIMEOUTxPolicy()
  769. {
  770. }
  771. public bool Check(string device, out string reason)
  772. {
  773. reason = string.Empty;
  774. if (false)
  775. {
  776. reason = string.Format("E84_TIMEOUTx");
  777. return false;
  778. }
  779. return true;
  780. }
  781. }
  782. /// <summary>
  783. ///E84_CS_VALID E84 Signal Error
  784. /// CS_0,CS_1,VALID signals are changed while E84 automated transfer sequence is processing.
  785. /// </summary>
  786. public class E84_CS_VALIDPolicy : CheckImp, IPolicy
  787. {
  788. public E84_CS_VALIDPolicy()
  789. {
  790. }
  791. public bool Check(string device, out string reason)
  792. {
  793. reason = string.Empty;
  794. if (false)
  795. {
  796. reason = string.Format("E84_CS_VALID");
  797. return false;
  798. }
  799. return true;
  800. }
  801. }
  802. /// <summary>
  803. ///READFAIL ID Read Fail- ID reading failed
  804. /// </summary>
  805. public class READFAILPolicy : CheckImp, IPolicy
  806. {
  807. public READFAILPolicy()
  808. {
  809. }
  810. public bool Check(string device, out string reason)
  811. {
  812. reason = string.Empty;
  813. if (false)
  814. {
  815. reason = string.Format("READFAIL");
  816. return false;
  817. }
  818. return true;
  819. }
  820. }
  821. }