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Efem.sccfg

Efem.sccfg 155 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="EFEM">
    3. 

  3. 	<configs name="System">
    4. 

  4. 		<config default="001" name="EFEMNUM" description="DeviceType" max="0" min="0" paramter="" tag="" unit="" type="String" />
    5. 

  5. 		<config default="2LPJet" name="DeviceType" description="DeviceType" max="0" min="0" paramter="" tag="" unit="" type="String" />
    6. 

  6. 		<config default="true" name="IsSimulatorMode" description="IsSimulatorMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />		
    7. 

  7. 		<config default="false" name="ConfigDO32AsBuzzer" description="ConfigDO32AsBuzzer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    8. 

  8. 		<config default="false" name="ShowWaferID" description="ShowWaferID" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    9. 

  9. 		<config default="0" name="TotalWaferCount" description="TotalWaferCount" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
    10. 

  10. 		<config default="" name="WaferDisplayMode" description="WaferDisplayMode" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
    11. 

  11. 		<config default="true" name="EnableRobotGripAndUngrip" description="EnableRobotGripAndUngrip" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    12. 

  12. 		<config default="false" name="EnableUpender" description="EnableUpender" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    13. 

  13. 		<config default="false" name="EnableAligner" description="EnableAligner" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    14. 

  14. 		<config default="false" name="EnableOcrReader2" description="EnableOcrReader2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    15. 

  15. 		<config default="false" name="EnableOcrReader1" description="EnableOcrReader1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    16. 

  16. 		<config default="false" name="EnableRFIDReaderLP1" description="EnableRFIDReaderLP1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    17. 

  17. 		<config default="false" name="EnableRFIDReaderLP2" description="EnableRFIDReaderLP2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    18. 

  18. 		<config default="false" name="EnableRFIDReaderLP3" description="EnableRFIDReaderLP3" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    19. 

  19. 		<config default="false" name="EnableRFIDReaderLP4" description="EnableRFIDReaderLP4" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    20. 

  20. 		<config default="false" name="EnableRFIDReaderLP5" description="EnableRFIDReaderLP5" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    21. 

  21. 		<config default="false" name="EnableRFIDReaderLP6" description="EnableRFIDReaderLP6" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    22. 

  22. 		<config default="false" name="EnableRFIDReaderLP7" description="EnableRFIDReaderLP7" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    23. 

  23. 		<config default="false" name="EnableRFIDReaderLP8" description="EnableRFIDReaderLP8" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    24. 

  24. 		<config default="false" name="EnableRFIDReaderLP9" description="EnableRFIDReaderLP9" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    25. 

  25. 		<config default="false" name="EnableRFIDReaderLP10" description="EnableRFIDReaderLP10" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    26. 

  26. 		<config default="13000" name="EfemPortNumber" description="EfemPortNumber" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
    27. 

  27. 		<config default="COM20" name="FFUComPortName" description="FFUComPortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
    28. 

  28. 		<config default="800" name="FFUSetSpeed" description="FFUSetSpeed" max="1600" min="0" paramter="" tag="" unit="" type="Integer" />
    29. 

  29. 		<config default="10.0.0.1" name="AdamAdapterIp" description="Adam Adapter Ip" max="0" min="0" paramter="" tag="" unit="" type="String" />
    30. 

  30. 		<config default="true" name="OnlyLotId" description="OnlyLotId" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    31. 

  31. 		<config default="127.0.0.1" name="EfemServerLocalIp" description="Local Ip" max="0" min="0" paramter="" tag="" unit="" type="String" />
    32. 

  32. 

  33. 		<config default="30" name="TimeLimitEfemComandDelay" description="Efem Comand Deley" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
    34. 

  34. 		<config default="10" name="AlignerPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    35. 

  35. 		<config default="10" name="CoolingPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    36. 

  36. 		<config default="502" name="AdamAdapterPort" description="Adam Adapter Port" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
    37. 

  37. 		<config default="0" name="PressureDiffChannel" description="压差传感器channel" max="8" min="0" paramter="" tag="" unit="" type="Integer" />
    38. 

  38. 		<config default="8" name="FFUSpeedSet" description="FFU 转速设定" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    39. 

  39. 		<config default="30" name="PressureDiffMaxPressure" description="压差计最大值" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
    40. 

  40. 		<config default="-30" name="PressureDiffMinPressure" description="压差计最小值" max="0" min="-999999" paramter="" tag="" unit="" type="Integer" />
    41. 

  41. 		<config default="-30" name="PressureDiffLowWarning" description="压差计低报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
    42. 

  42. 		<config default="-30" name="PressureDiffLowLowAlarm" description="压差计低低报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
    43. 

  43. 		<config default="-30" name="PressureDiffHighWarning" description="压差计高报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
    44. 

  44. 		<config default="-30" name="PressureDiffHighHighAlarm" description="压差计高高报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
    45. 

  45. 		<config default="true" name="IsLoadLockDoorAlwaysOpen" description="IsLoadLockDoorAlwaysOpen" max="" min="" paramter="" tag="" unit="" type="Bool" />
    46. 

  46. 		<config default="true" name="IsLoadLockEnableZMotion" description="是否可以在LL端执行LOAD/UNLOAD/TRANS指令" max="" min="" paramter="" tag="" unit="" type="Bool" />
    47. 

  47. 		<config default="false" name="IsErrorReportEnable" description="是否能使告警上报" max="" min="" paramter="" tag="" unit="" type="Bool" />
    48. 

  48. 		<config default="false" name="IsEnableIdentifyThickness" description="是否区分薄厚片" max="" min="" paramter="" tag="" unit="" type="Bool" />
    49. 

  49. 		<config default="true" name="IsEnableMultiWaferSize" description="使能跑多种尺寸的wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
    50. 

  50. 		<config default="true" name="IsEnableMultiWaferSizeShow" description="使能跑多种尺寸的wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
    51. 

  51. 		<config default="false" name="IsEnableMoveInDiffSlotsNumLP" description="使能在不同槽数的lp之间传输" max="" min="" paramter="" tag="" unit="" type="Bool" />
    52. 

  52. 		<config default="true" name="IsEnableBufferMap" description="Buffer Map 使能" max="" min="" paramter="" tag="" unit="" type="Bool" />
    53. 

  53. 		<config default="false" name="BufferDisable" description="Buffer不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    54. 

  54. 		<config default="false" name="Buffer1Disable" description="Buffer1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    55. 

  55. 		<config default="false" name="Buffer2Disable" description="Buffer2不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    56. 

  56. 		<config default="8" name="BufferSlotCount" description="Buffer槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
    57. 

  57. 		<config default="8" name="Buffer1SlotCount" description="Buffer1槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
    58. 

  58. 		<config default="8" name="Buffer2SlotCount" description="Buffer2槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
    59. 

  59. 		<config default="8" name="BufferWaferSize" description="Buffer晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
    60. 

  60. 		<config default="8" name="Buffer1WaferSize" description="Buffer1晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
    61. 

  61. 		<config default="8" name="Buffer2WaferSize" description="Buffer2晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
    62. 

  62. 		<config default="false" name="CoolingBuffer1Disable" description="Coolingbuffer1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    63. 

  63. 		<config default="false" name="CoolingBuffer2Disable" description="Coolingbuffer2不能用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    64. 

  64. 		<config default="false" name="Aligner1Disable" description="Aligner1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    65. 

  65. 		<config default="false" name="Aligner2Disable" description="Aligner2不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    66. 

  66. 		<config default="false" name="PMADisable" description="PMA不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    67. 

  67. 		<config default="false" name="PMBDisable" description="PMB不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    68. 

  68. 		<config default="true" name="FlipperDisable" description="Flipper不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    69. 

  69. 		<config default="false" name="StopIonizerWorkingEnable" description="停止离子器使能" max="" min="" paramter="" tag="" unit="" type="Bool" />
    70. 

  70. 		<config default="true" name="LPRobotActionIntervene" description="LP和机械手动作干涉" max="" min="" paramter="" tag="" unit="" type="Bool" />
    71. 

  71. 		<config default="false" name="IsSlotShowOpposite" description="LP槽号显示" max="" min="" paramter="" tag="" unit="" type="Bool" />
    72. 

  72. 		<config default="false" name="SamallPinDisable" description="SamallPinDisable" max="" min="" paramter="" tag="" unit="" type="Bool" />
    73. 

  73. 		<config default="1" name="IONCDAPressureSWHandler" description="IONCDAPressureSWHandler(0:ByPass,1:ON,2:OFF)" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    74. 

  74. 		<config default="1" name="IONAlarmSIGNALHandler" description="IONAlarmSIGNALHandler(0:ByPass,1:ON,2:OFF)" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    75. 

  75. 		<config default="1" name="WaterFlowSWHandler" description="WaterFlowSWHandler(0:ByPass,1:ON,2:OFF)" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    76. 

  76. 		<config default="0" name="CstSizeKind" description="0:468;1:346" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    77. 

  77. 

  78. 		<configs name="FFU">
    79. 

  79. 			<config default="COM40" name="Address" description="FFU COM address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    80. 

  80. 			<config default="1" name="DeviceAddress" description="FFU Station Name" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    81. 

  81. 			<config default="1440" name="MaxSpeed" description="FFU Station Name" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
    82. 

  82. 			<config default="false" name="EnableLogMessage" description="FFU enable log" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    83. 

  83. 			<config default="1" name="FFUFanSpeedSetPoint" description="FFU Fan Speed SetPoint" max="1440" min="0" paramter="" tag="" unit="" type="Integer" />
    84. 

  84. 		</configs>
    85. 

  85. 	</configs>
    86. 

  86. 	<configs name="LoadPort">
    87. 

  87. 		<configs name="LP1">
    88. 

  88. 			<config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    89. 

  89. 			<config default="120" name="TimeLimitAction" description="Time limit for on action" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    90. 

  90. 			<config default="LOT:" name="CarrierIDStartString" description="CarrierIDStartString" max="0" min="0" paramter="" tag="" unit="" type="String" />
    91. 

  91. 			<config default="QTY:" name="CarrierIDEndString" description="CarrierIDEndString" max="0" min="0" paramter="" tag="" unit="" type="String" />
    92. 

  92. 			<config default="false" name="AutoDetectCarrierType" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    93. 

  93. 			<config default="25" name="SlotsNumber" description="SlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    94. 

  94. 			<config default="false" name="Disable" description="LP1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    95. 

  95. 			<config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    96. 

  96. 			<config default="0" name="CstType" description="0:Smif;1:OpenCst;2:Hirata" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    97. 

  97. 			<config default="false" name="CarrierIdByRfidFromSmif" description="CarrierIdByRfidFromSmif" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    98. 

  98. 			<config default="0" name="CarrierIdByRfidFromSmifIndex" description="CarrierIdByRfidFromSmifInde" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    99. 

  99. 			<config default="false" name="ExternalSmartTagReader" description="ExternalSmartTagReader" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    100. 

  100. 		</configs>
    101. 

  101. 		<configs name="LP2">
    102. 

  102. 			<config default="COM3" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    103. 

  103. 			<config default="120" name="TimeLimitAction" description="Time limit for on action" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    104. 

  104. 			<config default="LOT:" name="CarrierIDStartString" description="CarrierIDStartString" max="0" min="0" paramter="" tag="" unit="" type="String" />
    105. 

  105. 			<config default="QTY:" name="CarrierIDEndString" description="CarrierIDEndString" max="0" min="0" paramter="" tag="" unit="" type="String" />
    106. 

  106. 			<config default="false" name="AutoDetectCarrierType" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    107. 

  107. 			<config default="25" name="SlotsNumber" description="SlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    108. 

  108. 			<config default="false" name="Disable" description="LP2不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
    109. 

  109. 			<config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    110. 

  110. 			<config default="0" name="CstType" description="0:Smif;1:OpenCst;2:Hirata" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    111. 

  111. 			<config default="false" name="CarrierIdByRfidFromSmif" description="CarrierIdByRfidFromSmif" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    112. 

  112. 			<config default="0" name="CarrierIdByRfidFromSmifIndex" description="CarrierIdByRfidFromSmifInde" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    113. 

  113. 			<config default="false" name="ExternalSmartTagReader" description="ExternalSmartTagReader" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    114. 

  114. 		</configs>
    115. 

  115. 		<config default="15" name="WaitLoadTimeOut" description="" max="1000" min="1" paramter="" tag="" unit="秒" type="String" />
    116. 

  116. 		<config default="30" name="TimeLimitLoadportHome" description="Loadport回原点命令超时设定" max="120" min="0" paramter="" tag="" unit="second" type="Integer" />
    117. 

  117. 		<config default="30" name="TimeLimitLoadportLoad" description="Load命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    118. 

  118. 		<config default="20" name="TimeLimitLoadportUnload" description="Unload命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    119. 

  119. 		<config default="11" name="TimeLimitLoadportClamp" description="Clamp命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    120. 

  120. 		<config default="9" name="TimeLimitReadRFID" description="读RFID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    121. 

  121. 		<config default="10" name="TimeLimitWriteRFID" description="写RFID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    122. 

  122. 		<config default="false" name="EnableAutoLockWhenCassetteArrived" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    123. 

  123. 		<config default="true" name="EnableAutoDockAfterIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    124. 

  124. 		<config default="true" name="EnableAutoCarrierIdReadAfterLatch" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    125. 

  125. 		<config default="true" name="EnableAutoMappingAfterDock" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    126. 

  126. 		<config default="true" name="EnableAutoUndockAfterUndocking" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    127. 

  127. 		<config default="true" name="EnablePauseWhenVerifyIDFailed" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    128. 

  128. 		<config default="100" name="TimeDelayNotifyCassettePresent" description="持续时间，通知Cassette拿走或者放上" max="99999" min="0" paramter="" tag="" unit="second" type="Integer" />
    129. 

  129. 

  130. 		<config default="1" name="LoadPort1CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    131. 

  131. 		<config default="1" name="LoadPort2CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    132. 

  132. 		<config default="1" name="LoadPort3CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    133. 

  133. 		<config default="1" name="LoadPort4CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    134. 

  134. 		<config default="1" name="LoadPort5CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    135. 

  135. 		<config default="1" name="LoadPort6CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    136. 

  136. 		<config default="1" name="LoadPort7CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    137. 

  137. 		<config default="1" name="LoadPort8CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    138. 

  138. 		<config default="1" name="LoadPort9CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    139. 

  139. 		<config default="1" name="LoadPort10CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    140. 

  140. 		<config default="LP1" name="LoadPort1CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    141. 

  141. 		<config default="LP2" name="LoadPort2CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    142. 

  142. 		<config default="LP3" name="LoadPort3CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    143. 

  143. 		<config default="LP4" name="LoadPort4CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    144. 

  144. 		<config default="LP5" name="LoadPort5CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    145. 

  145. 		<config default="LP6" name="LoadPort6CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    146. 

  146. 		<config default="LP7" name="LoadPort7CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    147. 

  147. 		<config default="LP8" name="LoadPort8CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    148. 

  148. 		<config default="LP9" name="LoadPort9CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    149. 

  149. 		<config default="LP10" name="LoadPort10CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
    150. 

  150. 		<config default="COM21" name="LoadPort1CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    151. 

  151. 		<config default="COM23" name="LoadPort2CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    152. 

  152. 		<config default="COM25" name="LoadPort3CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    153. 

  153. 		<config default="COM27" name="LoadPort4CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    154. 

  154. 		<config default="COM29" name="LoadPort5CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    155. 

  155. 		<config default="COM31" name="LoadPort6CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    156. 

  156. 		<config default="COM7" name="LoadPort7CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    157. 

  157. 		<config default="COM8" name="LoadPort8CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    158. 

  158. 		<config default="COM9" name="LoadPort9CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    159. 

  159. 		<config default="COM10" name="LoadPort10CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    160. 

  160. 		<config default="COM1" name="LoadPort1PortName" description="LoadPort1PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
    161. 

  161. 		<config default="COM3" name="LoadPort2PortName" description="LoadPort2PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
    162. 

  162. 		<config default="COM5" name="LoadPort3PortName" description="LoadPort3PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
    163. 

  163. 		<config default="COM7" name="LoadPort4PortName" description="LoadPort4PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
    164. 

  164. 		<config default="127.0.0.1:7091" name="LoadPort1CarrierIdReaderAddress" description="LP1读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    165. 

  165. 		<config default="127.0.0.1:7092" name="LoadPort2CarrierIdReaderAddress" description="LP2读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    166. 

  166. 		<config default="127.0.0.1:7093" name="LoadPort3CarrierIdReaderAddress" description="LP3读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    167. 

  167. 		<config default="127.0.0.1:7094" name="LoadPort4CarrierIdReaderAddress" description="LP4读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    168. 

  168. 		<config default="127.0.0.1:7095" name="LoadPort5CarrierIdReaderAddress" description="LP5读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    169. 

  169. 		<config default="127.0.0.1:7096" name="LoadPort6CarrierIdReaderAddress" description="LP6读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    170. 

  170. 		<config default="127.0.0.1:7097" name="LoadPort7CarrierIdReaderAddress" description="LP7读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    171. 

  171. 		<config default="127.0.0.1:7098" name="LoadPort8CarrierIdReaderAddress" description="LP8读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    172. 

  172. 		<config default="127.0.0.1:7099" name="LoadPort9CarrierIdReaderAddress" description="LP9读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    173. 

  173. 		<config default="127.0.0.1:7100" name="LoadPort10CarrierIdReaderAddress" description="LP10读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    174. 

  174. 		<config default="00000004" name="LoadPort1CarrierIdReaderPage" description="LP1读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    175. 

  175. 		<config default="00000004" name="LoadPort2CarrierIdReaderPage" description="LP2读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    176. 

  176. 		<config default="00000004" name="LoadPort3CarrierIdReaderPage" description="LP3读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    177. 

  177. 		<config default="00000004" name="LoadPort4CarrierIdReaderPage" description="LP4读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    178. 

  178. 		<config default="00000004" name="LoadPort5CarrierIdReaderPage" description="LP5读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    179. 

  179. 		<config default="00000004" name="LoadPort6CarrierIdReaderPage" description="LP6读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    180. 

  180. 		<config default="00000004" name="LoadPort7CarrierIdReaderPage" description="LP7读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    181. 

  181. 		<config default="00000004" name="LoadPort8CarrierIdReaderPage" description="LP8读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    182. 

  182. 		<config default="00000004" name="LoadPort9CarrierIdReaderPage" description="LP9读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    183. 

  183. 		<config default="00000004" name="LoadPort10CarrierIdReaderPage" description="LP10读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
    184. 

  184. 		<config default="FOUP" name="LoadPort1CassetteType" description="LP1容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
    185. 

  185. 		<config default="FOUP" name="LoadPort2CassetteType" description="LP2容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
    186. 

  186. 		<config default="FOUP" name="LoadPort3CassetteType" description="LP3容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
    187. 

  187. 		<config default="FOUP" name="LoadPort4CassetteType" description="LP4容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
    188. 

  188. 		<config default="true" name="DefaultUseRFIDForCarrierIdRead" description="默认使用RFID进行Carrier 读取" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    189. 

  189. 	</configs>
    190. 

  190. 	<configs name="Robot">
    191. 

  191. 		<config default="NXC100" name="RobotType" description="Robot Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    192. 

  192. 		<config default="false" name="BladeUpDownReverse" description="BladeUpDownReverse" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    193. 

  193. 		<config default="true" name="Blade1Enable" description="Blade1Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    194. 

  194. 		<config default="true" name="Blade2Enable" description="Blade2Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    195. 

  195. 		<config default="1" name="Blade2Slots" description="Slot数目" max="4" min="1" paramter="" tag="" unit="" type="Integer" />
    196. 

  196. 		<config default="1" name="RobotSpeed" description="Robot速度" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
    197. 

  197. 		<config default="2" name="TimeLimitRobotCommand" description="Robot命令超时设定" max="200" min="0" paramter="" tag="" unit="seconds" type="Integer" />
    198. 

  198. 		<config default="30" name="TimeLimitRobotHome" description="Robot回原点命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
    199. 

  199. 		<config default="10" name="TimeLimitForPickWafer" description="Pick命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
    200. 

  200. 		<config default="20" name="TimeLimitForPlaceWafer" description="Place命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
    201. 

  201. 		<config default="10" name="TimeLimitForExchangeWafer" description="Exchange命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
    202. 

  202. 		<config default="0" name="RobotCommunicationToken" description="RobotCommunicationToken" max="9999" min="0" paramter="" tag="" unit="" type="Integer" />
    203. 

  203. 		<config default="true" name="DualBlade1TransferEnable" description="DualBlade1TransferEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    204. 

  204. 		<config default="127.0.0.1:10110" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" />
    205. 

  205. 		<config default="1" name="SlotCount" description="SlotCount" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
    206. 

  206. 		<config default="2183900" name="WaferSize3MappingOffset" description="WaferSize3MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
    207. 

  207. 		<config default="2285000" name="WaferSize4MappingOffset" description="WaferSize4MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
    208. 

  208. 		<config default="2545000" name="WaferSize6MappingOffset" description="WaferSize6MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
    209. 

  209. 		<configs name="Robot">
    210. 

  210. 			<config default="1" name="Address" description="Robot address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    211. 

  211. 			<config default="3" name="SpeedLevel" description="SpeedLevel" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
    212. 

  212. 			<config default="100" name="ExistInterval" description="SpeedLevel" max="60000" min="0" paramter="" tag="" unit="" type="Integer" />
    213. 

  213. 			<config default="true" name="IsVacuumMode" description="True:VacuumMode;False:FrictionMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    214. 

  214. 

  215. 

  216. 			<config default="1" name="BodyNumber" description="Robot Body Number" max="65535" min="0" paramter="" tag="" unit="" type="Integer" />
    217. 

  217. 			<config default="COM27" name="PortName" description="Robot COM port" max="0" min="0" paramter="" tag="" unit="" type="String" />
    218. 

  218. 			<config default="T-00902H" name="RobotModel" description="RobotModel" max="10" min="0" paramter="" tag="" unit="" type="String" />
    219. 

  219. 			<config default="20" name="RobotZSpeed" description="RobotZSpeed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    220. 

  220. 			<config default="50" name="RobotABWSpeed" description="RobotABWSpeed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    221. 

  221. 			<config default="980" name="Speed" description="Speed" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
    222. 

  222. 			<config default="98" name="RobotSpeed" description="Speed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    223. 

  223. 

  224. 			<config default="true" name="EnableLogMessage" description="enable log" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    225. 

  225. 			<config default="60" name="TimeLimitRobotCommand" description="TimeLimitRobotCommand" max="300" min="0" paramter="" tag="" unit="Seconds" type="Integer" />
    226. 

  226. 			<config default="60" name="MotionTimeout" description="MotionTimeout" max="300" min="0" paramter="" tag="" unit="Seconds" type="Integer" />
    227. 

  227. 			<config default="true" name="EnableGotoReady" description="EnableGotoReady" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    228. 

  228. 			<config default="1" name="GotoReadyXSpeedForPick" description="Speed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    229. 

  229. 			<config default="0" name="GotoReadyZDistanceForPick" description="ZDistanceForPick" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    230. 

  230. 

  231. 			<config default="0" name="GotoReadyXCheckWaferForPlace" description="falg1" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    232. 

  232. 			<config default="0" name="GotoReadyCICheckWaferForPlace" description="falg2" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    233. 

  233. 			<config default="1" name="GotoReadyXSpeedForPlace" description="Speed1" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    234. 

  234. 			<config default="1" name="GotoReadyCISpeedForPlace" description="Speed2" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    235. 

  235. 			<config default="0" name="GotoReadyZDistanceForPlace" description="ZDistanceForPlace" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
    236. 

  236. 

  237. 			<config default="1" name="InitCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    238. 

  238. 

  239. 			<config default="2" name="LeftPickCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    240. 

  240. 			<config default="3" name="RightPickCmdNO" description="RightPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    241. 

  241. 			<config default="4" name="DualPickCmdNO" description="DualPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    242. 

  242. 			<config default="5" name="LeftPlaceCmdNO" description="LeftPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    243. 

  243. 			<config default="6" name="RightPlaceCmdNO" description="RightPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    244. 

  244. 			<config default="7" name="DualPlaceCmdNO" description="DualPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    245. 

  245. 			<config default="8" name="LeftPickSwapCmdNO" description="LeftPickSwapCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    246. 

  246. 			<config default="9" name="RightPickSwapCmdNO" description="RightPickSwapCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    247. 

  247. 			<config default="3" name="MapCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
    248. 

  248. 

  249. 

  250. 		</configs>
    251. 

  251. 

  252. 		<configs name="Offset">
    253. 

  253. 			<config default="99999" name="OffsetXMax" description="Offset X Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
    254. 

  254. 			<config default="-9999" name="OffsetXMin" description="Offset X Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
    255. 

  255. 			<config default="99999" name="OffsetYMax" description="Offset Y Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
    256. 

  256. 			<config default="-9999" name="OffsetYMin" description="Offset Y Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
    257. 

  257. 			<config default="99999" name="OffsetZMax" description="Offset Z Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
    258. 

  258. 			<config default="-9999" name="OffsetZMin" description="Offset Z Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
    259. 

  259. 		</configs>
    260. 

  260. 		<configs name="OffsetForLL">
    261. 

  261. 			<config default="0000,-0000,-0000" name="LLAGET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    262. 

  262. 			<config default="0000,-0000,-0000" name="LLAPUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    263. 

  263. 			<config default="0000,-0000,-0000" name="LLAEXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    264. 

  264. 			<config default="0000,-0000,-0000" name="LLBGET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    265. 

  265. 			<config default="0000,-0000,-0000" name="LLBPUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    266. 

  266. 			<config default="0000,-0000,-0000" name="LLBEXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    267. 

  267. 			<config default="0000,-0000,-0000" name="LL1GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    268. 

  268. 			<config default="0000,-0000,-0000" name="LL1PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    269. 

  269. 			<config default="0000,-0000,-0000" name="LL1EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    270. 

  270. 			<config default="0000,-0000,-0000" name="LL2GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    271. 

  271. 			<config default="0000,-0000,-0000" name="LL2PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    272. 

  272. 			<config default="0000,-0000,-0000" name="LL2EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    273. 

  273. 			<config default="0000,-0000,-0000" name="LL3GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    274. 

  274. 			<config default="0000,-0000,-0000" name="LL3PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    275. 

  275. 			<config default="0000,-0000,-0000" name="LL3EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    276. 

  276. 			<config default="0000,-0000,-0000" name="LL4GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    277. 

  277. 			<config default="0000,-0000,-0000" name="LL4PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    278. 

  278. 			<config default="0000,-0000,-0000" name="LL4EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    279. 

  279. 			<config default="0000,-0000,-0000" name="LL5GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    280. 

  280. 			<config default="0000,-0000,-0000" name="LL5PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    281. 

  281. 			<config default="0000,-0000,-0000" name="LL5EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    282. 

  282. 			<config default="0000,-0000,-0000" name="LL6GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    283. 

  283. 			<config default="0000,-0000,-0000" name="LL6PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    284. 

  284. 			<config default="0000,-0000,-0000" name="LL6EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    285. 

  285. 			<config default="0000,-0000,-0000" name="LL7GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    286. 

  286. 			<config default="0000,-0000,-0000" name="LL7PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    287. 

  287. 			<config default="0000,-0000,-0000" name="LL7EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    288. 

  288. 			<config default="0000,-0000,-0000" name="LL8GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    289. 

  289. 			<config default="0000,-0000,-0000" name="LL8PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    290. 

  290. 			<config default="0000,-0000,-0000" name="LL8EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    291. 

  291. 		</configs>
    292. 

  292. 		<configs name="OffsetForLP">
    293. 

  293. 			<config default="FOUP,0000,-0000,-0000" name="Type1" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    294. 

  294. 			<config default="FOUP2,0000,-0000,-0000" name="Type2" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    295. 

  295. 			<config default="FOUP3,0000,-0000,-0000" name="Type3" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    296. 

  296. 			<config default="FOUP4,0000,-0000,-0000" name="Type4" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    297. 

  297. 			<config default="FOUP5,0000,-0000,-0000" name="Type5" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    298. 

  298. 			<config default="FOUP6,0000,-0000,-0000" name="Type6" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    299. 

  299. 			<config default="FOUP7,0000,-0000,-0000" name="Type7" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    300. 

  300. 			<config default="FOUP8,0000,-0000,-0000" name="Type8" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    301. 

  301. 			<config default="FOUP9,0000,-0000,-0000" name="Type9" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    302. 

  302. 			<config default="FOUP10,0000,-0000,-0000" name="Type10" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    303. 

  303. 			<config default="FOUP11,0000,-0000,-0000" name="Type11" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    304. 

  304. 			<config default="FOUP12,0000,-0000,-0000" name="Type12" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    305. 

  305. 			<config default="FOUP13,0000,-0000,-0000" name="Type13" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    306. 

  306. 			<config default="FOUP14,0000,-0000,-0000" name="Type14" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    307. 

  307. 			<config default="FOUP15,0000,-0000,-0000" name="Type15" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    308. 

  308. 			<config default="FOUP16,0000,-0000,-0000" name="Type16" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    309. 

  309. 			<config default="FOUP17,0000,-0000,-0000" name="Type17" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    310. 

  310. 			<config default="FOUP18,0000,-0000,-0000" name="Type18" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    311. 

  311. 			<config default="FOUP19,0000,-0000,-0000" name="Type19" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    312. 

  312. 			<config default="FOUP20,0000,-0000,-0000" name="Type20" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    313. 

  313. 		</configs>
    314. 

  314. 	</configs>
    315. 

  315. 	<configs name="MotionAxis">
    316. 

  316. 		<config default="1000" name="AccSpeed" description="加速度" max="999999" min="0" paramter="" tag="" unit="ms" type="Integer" />
    317. 

  317. 		<config default="1000" name="JogSpeed" description="JogSpeed" max="999999" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
    318. 

  318. 		<config default="10000" name="AutoSpeed" description="AutoSpeed" max="999999" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
    319. 

  319. 		<config default="30" name="MoveTimeout" description="MoveTimeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    320. 

  320. 		<config default="60" name="HomeTimeout" description="HomeTimeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    321. 

  321. 	</configs>
    322. 

  322. 	<configs name="Aligner">
    323. 

  323. 		<config default="0" name="AlignerType" description="0:Mechanical Aligner; 1:Pin Aligner;" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    324. 

  324. 		<config default="30" name="TimeLimitAlignerHome" description="Aligner回原点命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    325. 

  325. 		<config default="9" name="TimeLimitForAlignWafer" description="Align命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    326. 

  326. 		<config default="0" name="AlignerCommunicationToken" description="AlignerCommunicationToken" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
    327. 

  327. 		<config default="0" name="AlignerReadAngle" description="读取Reader ID的角度" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    328. 

  328. 		<config default="0" name="AlignerDefaultAngle" description="AlignerDefaultAngle" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    329. 

  329. 		<config default="127.0.0.1:10111" name="Address" description="Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
    330. 

  330. 	</configs>
    331. 

  331. 	<configs name="OcrReader">
    332. 

  332. 		<config default="9" name="TimeLimitForWID" description="读WaferID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
    333. 

  333. 		<config default="true" name="EnableReadLaserMarker1" description="启用读取LaserMarker" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    334. 

  334. 		<config default="true" name="EnableReadLaserMarker2" description="启用读取T7 Code，LaserMarker2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    335. 

  335. 		<config default="" name="ReaderJob1Main" description="Job 1, Main ;" max="0" min="0" paramter="" tag="" unit="" type="String" />
    336. 

  336. 		<config default="" name="ReaderJob1Slave" description="ReaderJob1Slave" max="0" min="0" paramter="" tag="" unit="" type="String" />
    337. 

  337. 		<config default="" name="ReaderJob2Main" description="ReaderJob2Main" max="0" min="0" paramter="" tag="" unit="" type="String" />
    338. 

  338. 		<config default="" name="ReaderJob2Slave" description="ReaderJob2Slave" max="0" min="0" paramter="" tag="" unit="" type="String" />
    339. 

  339. 		<config default="false" name="EnablePauseOnWaferIdVerifyFailed" description="EnablePauseOnWaferIdVerifyFailed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    340. 

  340. 		<config default="127.0.0.1:23" name="Address1" description="Address1" max="0" min="0" paramter="" tag="" unit="" type="String" />
    341. 

  341. 		<config default="127.0.0.1:24" name="Address2" description="Address2" max="0" min="0" paramter="" tag="" unit="" type="String" />
    342. 

  342. 	</configs>
    343. 

  343. 	<configs name="Fa">
    344. 

  344. 		<configs name="E84">
    345. 

  345. 			<config default="30" name="TP1" description="TP1" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    346. 

  346. 			<config default="30" name="TP2" description="TP2" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
    347. 

  347. 			<config default="30" name="TP3" description="TP3" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
    348. 

  348. 			<config default="30" name="TP4" description="TP4" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
    349. 

  349. 			<config default="30" name="TP5" description="TP5" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
    350. 

  350. 		</configs>
    351. 

  351. 		<config default="Passive" name="ConnectionMode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
    352. 

  352. 		<config default="127.0.0.1" name="LocalIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    353. 

  353. 		<config default="5021" name="LocalPortNumber" description="LocalPortNumber" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
    354. 

  354. 		<config default="127.0.0.1" name="RemoteIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    355. 

  355. 		<config default="5020" name="RemotePortNumber" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    356. 

  356. 		<config default="45" name="T3Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    357. 

  357. 		<config default="10" name="T5Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    358. 

  358. 		<config default="5" name="T6Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    359. 

  359. 		<config default="10" name="T7Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    360. 

  360. 		<config default="5" name="T8Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    361. 

  361. 		<config default="false" name="EnableSpooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    362. 

  362. 		<config default="30" name="FaLinkTestInterval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
    363. 

  363. 		<config default="Enabled" name="FaDefaultCommunicationState" description="Enabled /Disabled" max="0" min="0" paramter="" tag="" unit="" type="String" />
    364. 

  364. 		<config default="Online" name="FaDefaultControlState" description="Online / Offline" max="0" min="0" paramter="" tag="" unit="" type="String" />
    365. 

  365. 		<config default="Local" name="FaDefaultControlSubState" description="Local / Remote" max="0" min="0" paramter="" tag="" unit="" type="String" />
    366. 

  366. 		<config default="0" name="DeviceId" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
    367. 

  367. 	</configs>
    368. 

  368. 	<configs name="Process">
    369. 

  369. 		<config default="7" name="DelayBeforeWaferPutToLL" description="Delay On Cooling Buffer Before Wafer Put To LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />
    370. 

  370. 		<config default="14" name="DelayAfterWaferPickFromLL" description="Delay On Cooling Buffer After Wafer Pick From LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />
    371. 

  371. 		<config default="false" name="CycleEnable" description="CycleEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    372. 

  372. 		<config default="3" name="CycleCount" description="CycleCount" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    373. 

  373. 		<config default="true" name="CycleEnableAutoUnload" description="CycleEnableAutoUnload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    374. 

  374. 		<config default="false" name="CycleEnableAlign" description="CycleEnableAlign" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    375. 

  375. 		<config default="false" name="CycleEnableLaserMarker1" description="CycleEnableLaserMarker1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    376. 

  376. 		<config default="false" name="CycleEnableLaserMarker2" description="CycleEnableLaserMarker2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    377. 

  377. 		<config default="false" name="TransferStopImmediately" description="TransferStopImmediately" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    378. 

  378. 		<config default="false" name="EnableAutoUndockAfterProcessComplete" description="EnableAutoUndockAfterProcessComplete" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    379. 

  379. 		<config default="true" name="OptionLoadportMonitor" description="OptionLoadportMonitor" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    380. 

  380. 		<config default="false" name="OptionMainternaceMonitor" description="OptionMainternaceMonitor" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
    381. 

  381. 		<config default="false" name="OptionSignalTowerMonitor" description="OptionSignalTowerMonitor" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
    382. 

  382. 		<config default="false" name="CycleSwapHand" description="Cycle Swap Hand Option" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    383. 

  383. 		<config default="3" name="CyclePlaceMode" description="Transfer Mode for Cycle 1=Opposite,2=Same,3=FromTop,4=FromButtom" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    384. 

  384. 

  385. 	</configs>
    386. 

  386. 	<configs name="Server">
    387. 

  387. 		<config default="1000" name="SendReadyInterval" description="间隔多长时间发送READY信号给E/C" max="99999" min="200" paramter="" tag="" unit="ms" type="Integer" />
    388. 

  388. 	</configs>
    389. 

  389. 	<configs name="Coolbuffer">
    390. 

  390. 		<config default="20" name="UpTimeout" description="Move up Timeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
    391. 

  391. 		<config default="20" name="DownTimeout" description="Move down Timeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
    392. 

  392. 	</configs>
    393. 

  393. 	<configs name="CarrierID">
    394. 

  394. 		<configs name="RFIDReaderA">
    395. 

  395. 			<config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    396. 

  396. 			<config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
    397. 

  397. 			<config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    398. 

  398. 			<config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
    399. 

  399. 			<config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
    400. 

  400. 			<config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    401. 

  401. 			<config default="127.0.0.1:7001" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
    402. 

  402. 			<config default="10" name="RetryTime" description="RetryTime" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
    403. 

  403. 			<config default="True" name="CarrierIdNeedTrimSpace" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    404. 

  404. 			<config default="10" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
    405. 

  405. 

  406. 

  407. 		</configs>
    408. 

  408. 		<configs name="RFIDReaderB">
    409. 

  409. 			<config default="COM3" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    410. 

  410. 			<config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
    411. 

  411. 			<config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    412. 

  412. 			<config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
    413. 

  413. 			<config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
    414. 

  414. 			<config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    415. 

  415. 			<config default="127.0.0.1:7002" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
    416. 

  416. 			<config default="10" name="RetryTime" description="RetryTime" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
    417. 

  417. 			<config default="True" name="CarrierIdNeedTrimSpace" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    418. 

  418. 			<config default="10" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
    419. 

  419. 

  420. 		</configs>
    421. 

  421. 		<configs name="BarcodeReaderA">
    422. 

  422. 			<config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    423. 

  423. 			<config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
    424. 

  424. 			<config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    425. 

  425. 			<config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
    426. 

  426. 			<config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
    427. 

  427. 			<config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    428. 

  428. 			<config default="127.0.0.1:55256" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
    429. 

  429. 			<config default="1" name="Type" description="(0=none,1=Honeywell,2=Keyence)" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    430. 

  430. 			<config default="3" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
    431. 

  431. 

  432. 		</configs>
    433. 

  433. 		<configs name="BarcodeReaderB">
    434. 

  434. 			<config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
    435. 

  435. 			<config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
    436. 

  436. 			<config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    437. 

  437. 			<config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
    438. 

  438. 			<config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
    439. 

  439. 			<config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    440. 

  440. 			<config default="127.0.0.1:55257" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
    441. 

  441. 			<config default="1" name="Type" description="(0=none,1=Honeywell,2=Keyence)" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    442. 

  442. 			<config default="3" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
    443. 

  443. 

  444. 		</configs>
    445. 

  445. 	</configs>
    446. 

  446. 	<configs name="CarrierInfo">
    447. 

  447. 		<configs name="Carrier0">
    448. 

  448. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    449. 

  449. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    450. 

  450. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    451. 

  451. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    452. 

  452. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    453. 

  453. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    454. 

  454. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    455. 

  455. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    456. 

  456. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    457. 

  457. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    458. 

  458. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    459. 

  459. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    460. 

  460. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    461. 

  461. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    462. 

  462. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    463. 

  463. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    464. 

  464. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    465. 

  465. 			<config default="false" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    466. 

  466. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    467. 

  467. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    468. 

  468. 

  469. 

  470. 

  471. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    472. 

  472. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    473. 

  473. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    474. 

  474. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    475. 

  475. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    476. 

  476. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    477. 

  477. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    478. 

  478. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    479. 

  479. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    480. 

  480. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    481. 

  481. 

  482. 		</configs>
    483. 

  483. 		<configs name="Carrier1">
    484. 

  484. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    485. 

  485. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    486. 

  486. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    487. 

  487. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    488. 

  488. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    489. 

  489. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    490. 

  490. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    491. 

  491. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    492. 

  492. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    493. 

  493. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    494. 

  494. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    495. 

  495. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    496. 

  496. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    497. 

  497. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    498. 

  498. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    499. 

  499. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    500. 

  500. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    501. 

  501. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    502. 

  502. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    503. 

  503. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    504. 

  504. 

  505. 

  506. 

  507. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    508. 

  508. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    509. 

  509. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    510. 

  510. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    511. 

  511. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    512. 

  512. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    513. 

  513. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    514. 

  514. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    515. 

  515. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    516. 

  516. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    517. 

  517. 

  518. 		</configs>
    519. 

  519. 		<configs name="Carrier2">
    520. 

  520. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    521. 

  521. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    522. 

  522. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    523. 

  523. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    524. 

  524. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    525. 

  525. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    526. 

  526. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    527. 

  527. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    528. 

  528. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    529. 

  529. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    530. 

  530. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    531. 

  531. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    532. 

  532. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    533. 

  533. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    534. 

  534. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    535. 

  535. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    536. 

  536. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    537. 

  537. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    538. 

  538. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    539. 

  539. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    540. 

  540. 

  541. 

  542. 

  543. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    544. 

  544. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    545. 

  545. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    546. 

  546. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    547. 

  547. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    548. 

  548. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    549. 

  549. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    550. 

  550. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    551. 

  551. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    552. 

  552. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    553. 

  553. 

  554. 		</configs>
    555. 

  555. 		<configs name="Carrier3">
    556. 

  556. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    557. 

  557. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    558. 

  558. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    559. 

  559. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    560. 

  560. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    561. 

  561. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    562. 

  562. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    563. 

  563. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    564. 

  564. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    565. 

  565. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    566. 

  566. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    567. 

  567. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    568. 

  568. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    569. 

  569. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    570. 

  570. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    571. 

  571. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    572. 

  572. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    573. 

  573. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    574. 

  574. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    575. 

  575. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    576. 

  576. 

  577. 

  578. 

  579. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    580. 

  580. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    581. 

  581. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    582. 

  582. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    583. 

  583. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    584. 

  584. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    585. 

  585. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    586. 

  586. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    587. 

  587. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    588. 

  588. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    589. 

  589. 

  590. 		</configs>
    591. 

  591. 		<configs name="Carrier4">
    592. 

  592. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    593. 

  593. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    594. 

  594. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    595. 

  595. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    596. 

  596. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    597. 

  597. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    598. 

  598. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    599. 

  599. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    600. 

  600. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    601. 

  601. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    602. 

  602. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    603. 

  603. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    604. 

  604. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    605. 

  605. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    606. 

  606. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    607. 

  607. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    608. 

  608. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    609. 

  609. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    610. 

  610. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    611. 

  611. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    612. 

  612. 

  613. 

  614. 

  615. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    616. 

  616. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    617. 

  617. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    618. 

  618. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    619. 

  619. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    620. 

  620. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    621. 

  621. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    622. 

  622. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    623. 

  623. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    624. 

  624. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    625. 

  625. 

  626. 		</configs>
    627. 

  627. 		<configs name="Carrier5">
    628. 

  628. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    629. 

  629. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    630. 

  630. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    631. 

  631. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    632. 

  632. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    633. 

  633. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    634. 

  634. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    635. 

  635. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    636. 

  636. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    637. 

  637. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    638. 

  638. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    639. 

  639. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    640. 

  640. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    641. 

  641. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    642. 

  642. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    643. 

  643. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    644. 

  644. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    645. 

  645. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    646. 

  646. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    647. 

  647. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    648. 

  648. 

  649. 

  650. 

  651. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    652. 

  652. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    653. 

  653. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    654. 

  654. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    655. 

  655. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    656. 

  656. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    657. 

  657. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    658. 

  658. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    659. 

  659. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    660. 

  660. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    661. 

  661. 

  662. 		</configs>
    663. 

  663. 		<configs name="Carrier6">
    664. 

  664. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    665. 

  665. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    666. 

  666. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    667. 

  667. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    668. 

  668. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    669. 

  669. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    670. 

  670. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    671. 

  671. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    672. 

  672. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    673. 

  673. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    674. 

  674. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    675. 

  675. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    676. 

  676. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    677. 

  677. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    678. 

  678. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    679. 

  679. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    680. 

  680. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    681. 

  681. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    682. 

  682. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    683. 

  683. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    684. 

  684. 

  685. 

  686. 

  687. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    688. 

  688. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    689. 

  689. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    690. 

  690. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    691. 

  691. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    692. 

  692. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    693. 

  693. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    694. 

  694. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    695. 

  695. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    696. 

  696. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    697. 

  697. 

  698. 		</configs>
    699. 

  699. 		<configs name="Carrier7">
    700. 

  700. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    701. 

  701. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    702. 

  702. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    703. 

  703. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    704. 

  704. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    705. 

  705. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    706. 

  706. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    707. 

  707. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    708. 

  708. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    709. 

  709. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    710. 

  710. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    711. 

  711. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    712. 

  712. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    713. 

  713. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    714. 

  714. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    715. 

  715. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    716. 

  716. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    717. 

  717. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    718. 

  718. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    719. 

  719. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    720. 

  720. 

  721. 

  722. 

  723. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    724. 

  724. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    725. 

  725. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    726. 

  726. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    727. 

  727. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    728. 

  728. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    729. 

  729. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    730. 

  730. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    731. 

  731. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    732. 

  732. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    733. 

  733. 

  734. 		</configs>
    735. 

  735. 		<configs name="Carrier8">
    736. 

  736. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    737. 

  737. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    738. 

  738. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    739. 

  739. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    740. 

  740. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    741. 

  741. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    742. 

  742. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    743. 

  743. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    744. 

  744. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    745. 

  745. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    746. 

  746. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    747. 

  747. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    748. 

  748. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    749. 

  749. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    750. 

  750. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    751. 

  751. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    752. 

  752. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    753. 

  753. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    754. 

  754. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    755. 

  755. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    756. 

  756. 

  757. 

  758. 

  759. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    760. 

  760. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    761. 

  761. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    762. 

  762. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    763. 

  763. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    764. 

  764. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    765. 

  765. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    766. 

  766. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    767. 

  767. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    768. 

  768. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    769. 

  769. 

  770. 		</configs>
    771. 

  771. 		<configs name="Carrier9">
    772. 

  772. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    773. 

  773. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    774. 

  774. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    775. 

  775. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    776. 

  776. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    777. 

  777. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    778. 

  778. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    779. 

  779. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    780. 

  780. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    781. 

  781. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    782. 

  782. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    783. 

  783. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    784. 

  784. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    785. 

  785. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    786. 

  786. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    787. 

  787. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    788. 

  788. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    789. 

  789. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    790. 

  790. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    791. 

  791. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    792. 

  792. 

  793. 

  794. 

  795. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    796. 

  796. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    797. 

  797. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    798. 

  798. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    799. 

  799. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    800. 

  800. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    801. 

  801. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    802. 

  802. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    803. 

  803. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    804. 

  804. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    805. 

  805. 

  806. 		</configs>
    807. 

  807. 		<configs name="Carrier10">
    808. 

  808. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    809. 

  809. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    810. 

  810. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    811. 

  811. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    812. 

  812. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    813. 

  813. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    814. 

  814. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    815. 

  815. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    816. 

  816. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    817. 

  817. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    818. 

  818. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    819. 

  819. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    820. 

  820. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    821. 

  821. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    822. 

  822. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    823. 

  823. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    824. 

  824. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    825. 

  825. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    826. 

  826. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    827. 

  827. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    828. 

  828. 

  829. 

  830. 

  831. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    832. 

  832. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    833. 

  833. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    834. 

  834. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    835. 

  835. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    836. 

  836. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    837. 

  837. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    838. 

  838. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    839. 

  839. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    840. 

  840. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    841. 

  841. 

  842. 		</configs>
    843. 

  843. 		<configs name="Carrier11">
    844. 

  844. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    845. 

  845. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    846. 

  846. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    847. 

  847. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    848. 

  848. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    849. 

  849. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    850. 

  850. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    851. 

  851. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    852. 

  852. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    853. 

  853. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    854. 

  854. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    855. 

  855. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    856. 

  856. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    857. 

  857. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    858. 

  858. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    859. 

  859. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    860. 

  860. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    861. 

  861. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    862. 

  862. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    863. 

  863. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    864. 

  864. 

  865. 

  866. 

  867. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    868. 

  868. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    869. 

  869. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    870. 

  870. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    871. 

  871. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    872. 

  872. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    873. 

  873. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    874. 

  874. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    875. 

  875. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    876. 

  876. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    877. 

  877. 

  878. 		</configs>
    879. 

  879. 		<configs name="Carrier12">
    880. 

  880. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    881. 

  881. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    882. 

  882. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    883. 

  883. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    884. 

  884. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    885. 

  885. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    886. 

  886. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    887. 

  887. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    888. 

  888. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    889. 

  889. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    890. 

  890. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    891. 

  891. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    892. 

  892. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    893. 

  893. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    894. 

  894. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    895. 

  895. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    896. 

  896. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    897. 

  897. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    898. 

  898. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    899. 

  899. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    900. 

  900. 

  901. 

  902. 

  903. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    904. 

  904. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    905. 

  905. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    906. 

  906. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    907. 

  907. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    908. 

  908. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    909. 

  909. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    910. 

  910. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    911. 

  911. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    912. 

  912. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    913. 

  913. 

  914. 		</configs>
    915. 

  915. 		<configs name="Carrier13">
    916. 

  916. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    917. 

  917. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    918. 

  918. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    919. 

  919. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    920. 

  920. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    921. 

  921. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    922. 

  922. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    923. 

  923. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    924. 

  924. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    925. 

  925. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    926. 

  926. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    927. 

  927. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    928. 

  928. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    929. 

  929. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    930. 

  930. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    931. 

  931. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    932. 

  932. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    933. 

  933. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    934. 

  934. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    935. 

  935. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    936. 

  936. 

  937. 

  938. 

  939. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    940. 

  940. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    941. 

  941. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    942. 

  942. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    943. 

  943. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    944. 

  944. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    945. 

  945. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    946. 

  946. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    947. 

  947. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    948. 

  948. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    949. 

  949. 

  950. 		</configs>
    951. 

  951. 		<configs name="Carrier14">
    952. 

  952. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    953. 

  953. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    954. 

  954. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    955. 

  955. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    956. 

  956. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    957. 

  957. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    958. 

  958. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    959. 

  959. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    960. 

  960. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    961. 

  961. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    962. 

  962. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    963. 

  963. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    964. 

  964. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    965. 

  965. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    966. 

  966. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    967. 

  967. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    968. 

  968. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    969. 

  969. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    970. 

  970. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    971. 

  971. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    972. 

  972. 

  973. 

  974. 

  975. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    976. 

  976. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    977. 

  977. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    978. 

  978. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    979. 

  979. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    980. 

  980. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    981. 

  981. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    982. 

  982. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    983. 

  983. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    984. 

  984. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    985. 

  985. 

  986. 		</configs>
    987. 

  987. 		<configs name="Carrier15">
    988. 

  988. 			<config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    989. 

  989. 			<config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    990. 

  990. 			<config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    991. 

  991. 			<config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    992. 

  992. 			<config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
    993. 

  993. 			<config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    994. 

  994. 			<config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    995. 

  995. 			<config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    996. 

  996. 			<config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    997. 

  997. 			<config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    998. 

  998. 			<config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    999. 

  999. 			<config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1000. 

  1000. 			<config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1001. 

  1001. 			<config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1002. 

  1002. 			<config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1003. 

  1003. 			<config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
    1004. 

  1004. 			<config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1005. 

  1005. 			<config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1006. 

  1006. 			<config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1007. 

  1007. 			<config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1008. 

  1008. 

  1009. 

  1010. 

  1011. 			<config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1012. 

  1012. 			<config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1013. 

  1013. 			<config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1014. 

  1014. 			<config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1015. 

  1015. 			<config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1016. 

  1016. 			<config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1017. 

  1017. 			<config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1018. 

  1018. 			<config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1019. 

  1019. 			<config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1020. 

  1020. 			<config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1021. 

  1021. 

  1022. 		</configs>
    1023. 

  1023. 		<config default="FOUP1" name="CarrierName0" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1024. 

  1024. 		<config default="FOUP1" name="CarrierName1" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1025. 

  1025. 		<config default="FOUP1" name="CarrierName2" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1026. 

  1026. 		<config default="FOUP1" name="CarrierName3" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1027. 

  1027. 		<config default="FOUP1" name="CarrierName4" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1028. 

  1028. 		<config default="FOUP1" name="CarrierName5" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1029. 

  1029. 		<config default="FOUP1" name="CarrierName6" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1030. 

  1030. 		<config default="FOUP1" name="CarrierName7" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1031. 

  1031. 		<config default="FOUP1" name="CarrierName8" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1032. 

  1032. 		<config default="FOUP1" name="CarrierName9" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1033. 

  1033. 		<config default="FOUP1" name="CarrierName10" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1034. 

  1034. 		<config default="FOUP1" name="CarrierName11" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1035. 

  1035. 		<config default="FOUP1" name="CarrierName12" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1036. 

  1036. 		<config default="FOUP1" name="CarrierName13" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1037. 

  1037. 		<config default="FOUP1" name="CarrierName14" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1038. 

  1038. 		<config default="FOUP1" name="CarrierName15" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1039. 

  1039. 		<config default="0000,-0000,-0000" name="Get.Offset0" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1040. 

  1040. 		<config default="0000,-0000,-0000" name="Get.Offset1" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1041. 

  1041. 		<config default="0000,-0000,-0000" name="Get.Offset2" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1042. 

  1042. 		<config default="0000,-0000,-0000" name="Get.Offset3" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1043. 

  1043. 		<config default="0000,-0000,-0000" name="Get.Offset4" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1044. 

  1044. 		<config default="0000,-0000,-0000" name="Get.Offset5" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1045. 

  1045. 		<config default="0000,-0000,-0000" name="Get.Offset6" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1046. 

  1046. 		<config default="0000,-0000,-0000" name="Get.Offset7" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1047. 

  1047. 		<config default="0000,-0000,-0000" name="Get.Offset8" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1048. 

  1048. 		<config default="0000,-0000,-0000" name="Get.Offset9" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1049. 

  1049. 		<config default="0000,-0000,-0000" name="Get.Offset10" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1050. 

  1050. 		<config default="0000,-0000,-0000" name="Get.Offset11" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1051. 

  1051. 		<config default="0000,-0000,-0000" name="Get.Offset12" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1052. 

  1052. 		<config default="0000,-0000,-0000" name="Get.Offset13" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1053. 

  1053. 		<config default="0000,-0000,-0000" name="Get.Offset14" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1054. 

  1054. 		<config default="0000,-0000,-0000" name="Get.Offset15" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1055. 

  1055. 		<config default="0000,-0000,-0000" name="Put.Offset0" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1056. 

  1056. 		<config default="0000,-0000,-0000" name="Put.Offset1" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1057. 

  1057. 		<config default="0000,-0000,-0000" name="Put.Offset2" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1058. 

  1058. 		<config default="0000,-0000,-0000" name="Put.Offset3" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1059. 

  1059. 		<config default="0000,-0000,-0000" name="Put.Offset4" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1060. 

  1060. 		<config default="0000,-0000,-0000" name="Put.Offset5" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1061. 

  1061. 		<config default="0000,-0000,-0000" name="Put.Offset6" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1062. 

  1062. 		<config default="0000,-0000,-0000" name="Put.Offset7" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1063. 

  1063. 		<config default="0000,-0000,-0000" name="Put.Offset8" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1064. 

  1064. 		<config default="0000,-0000,-0000" name="Put.Offset9" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1065. 

  1065. 		<config default="0000,-0000,-0000" name="Put.Offset10" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1066. 

  1066. 		<config default="0000,-0000,-0000" name="Put.Offset11" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1067. 

  1067. 		<config default="0000,-0000,-0000" name="Put.Offset12" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1068. 

  1068. 		<config default="0000,-0000,-0000" name="Put.Offset13" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1069. 

  1069. 		<config default="0000,-0000,-0000" name="Put.Offset14" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1070. 

  1070. 		<config default="0000,-0000,-0000" name="Put.Offset15" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1071. 

  1071. 

  1072. 		<config default="1" name="LP1BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1073. 

  1073. 		<config default="1" name="LP1BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1074. 

  1074. 		<config default="1" name="LP1BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1075. 

  1075. 		<config default="1" name="LP1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1076. 

  1076. 		<config default="1" name="LP1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1077. 

  1077. 		<config default="2" name="LP2BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1078. 

  1078. 		<config default="2" name="LP2BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1079. 

  1079. 		<config default="2" name="LP2BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1080. 

  1080. 		<config default="2" name="LP2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1081. 

  1081. 		<config default="2" name="LP2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1082. 

  1082. 		<config default="3" name="LP3BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1083. 

  1083. 		<config default="3" name="LP3BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1084. 

  1084. 		<config default="3" name="LP3BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1085. 

  1085. 		<config default="3" name="LP3BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1086. 

  1086. 		<config default="3" name="LP3BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1087. 

  1087. 		<config default="4" name="LP4BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1088. 

  1088. 		<config default="4" name="LP4BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1089. 

  1089. 		<config default="4" name="LP4BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1090. 

  1090. 		<config default="4" name="LP4BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1091. 

  1091. 		<config default="4" name="LP4BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1092. 

  1092. 

  1093. 		<config default="1" name="LP1CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1094. 

  1094. 		<config default="1" name="LP1CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1095. 

  1095. 		<config default="1" name="LP1CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1096. 

  1096. 		<config default="1" name="LP1CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1097. 

  1097. 		<config default="1" name="LP1CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1098. 

  1098. 		<config default="2" name="LP2CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1099. 

  1099. 		<config default="2" name="LP2CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1100. 

  1100. 		<config default="2" name="LP2CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1101. 

  1101. 		<config default="2" name="LP2CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1102. 

  1102. 		<config default="2" name="LP2CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1103. 

  1103. 		<config default="3" name="LP3CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1104. 

  1104. 		<config default="3" name="LP3CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1105. 

  1105. 		<config default="3" name="LP3CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1106. 

  1106. 		<config default="3" name="LP3CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1107. 

  1107. 		<config default="3" name="LP3CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1108. 

  1108. 		<config default="4" name="LP4CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1109. 

  1109. 		<config default="4" name="LP4CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1110. 

  1110. 		<config default="4" name="LP4CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1111. 

  1111. 		<config default="4" name="LP4CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1112. 

  1112. 		<config default="4" name="LP4CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1113. 

  1113. 

  1114. 

  1115. 

  1116. 		<config default="1" name="Aligner1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1117. 

  1117. 		<config default="1" name="Aligner1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1118. 

  1118. 		<config default="1" name="Aligner1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1119. 

  1119. 		<config default="1" name="Aligner1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1120. 

  1120. 		<config default="1" name="Aligner1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1121. 

  1121. 

  1122. 		<config default="1" name="Aligner2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1123. 

  1123. 		<config default="1" name="Aligner2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1124. 

  1124. 		<config default="1" name="Aligner2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1125. 

  1125. 		<config default="1" name="Aligner21BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1126. 

  1126. 		<config default="1" name="Aligner2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1127. 

  1127. 

  1128. 		<config default="1" name="CoolingBuffer1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1129. 

  1129. 		<config default="1" name="CoolingBuffer1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1130. 

  1130. 		<config default="1" name="CoolingBuffer1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1131. 

  1131. 		<config default="1" name="CoolingBuffer1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1132. 

  1132. 		<config default="1" name="CoolingBuffer1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1133. 

  1133. 

  1134. 		<config default="1" name="CoolingBuffer2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1135. 

  1135. 		<config default="1" name="CoolingBuffer2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1136. 

  1136. 		<config default="1" name="CoolingBuffer2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1137. 

  1137. 		<config default="1" name="CoolingBuffer2BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1138. 

  1138. 		<config default="1" name="CoolingBuffer2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1139. 

  1139. 

  1140. 		<config default="1" name="LL1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1141. 

  1141. 		<config default="1" name="LL1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1142. 

  1142. 		<config default="1" name="LL1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1143. 

  1143. 		<config default="1" name="LL1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1144. 

  1144. 		<config default="1" name="LL1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1145. 

  1145. 

  1146. 		<config default="1" name="LL2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1147. 

  1147. 		<config default="1" name="LL2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1148. 

  1148. 		<config default="1" name="LL2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1149. 

  1149. 		<config default="1" name="LL2BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1150. 

  1150. 		<config default="1" name="LL2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
    1151. 

  1151. 

  1152. 		<config default="1" name="Aligner1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1153. 

  1153. 		<config default="1" name="Aligner1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1154. 

  1154. 		<config default="1" name="Aligner1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1155. 

  1155. 		<config default="1" name="Aligner1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1156. 

  1156. 		<config default="1" name="Aligner1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1157. 

  1157. 

  1158. 		<config default="1" name="Aligner2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1159. 

  1159. 		<config default="1" name="Aligner2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1160. 

  1160. 		<config default="1" name="Aligner2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1161. 

  1161. 		<config default="1" name="Aligner2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1162. 

  1162. 		<config default="1" name="Aligner2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1163. 

  1163. 

  1164. 		<config default="1" name="CoolingBuffer1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1165. 

  1165. 		<config default="1" name="CoolingBuffer1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1166. 

  1166. 		<config default="1" name="CoolingBuffer1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1167. 

  1167. 		<config default="1" name="CoolingBuffer1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1168. 

  1168. 		<config default="1" name="CoolingBuffer1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1169. 

  1169. 

  1170. 		<config default="1" name="CoolingBuffer2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1171. 

  1171. 		<config default="1" name="CoolingBuffer2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1172. 

  1172. 		<config default="1" name="CoolingBuffer2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1173. 

  1173. 		<config default="1" name="CoolingBuffer2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1174. 

  1174. 		<config default="1" name="CoolingBuffer2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1175. 

  1175. 

  1176. 		<config default="1" name="LL1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1177. 

  1177. 		<config default="1" name="LL1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1178. 

  1178. 		<config default="1" name="LL1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1179. 

  1179. 		<config default="1" name="LL1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1180. 

  1180. 		<config default="1" name="LL1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1181. 

  1181. 

  1182. 		<config default="1" name="LL2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1183. 

  1183. 		<config default="1" name="LL2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1184. 

  1184. 		<config default="1" name="LL2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1185. 

  1185. 		<config default="1" name="LL2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1186. 

  1186. 		<config default="1" name="LL2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
    1187. 

  1187. 

  1188. 		<config default="3" name="LP1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1189. 

  1189. 		<config default="3" name="LP1Station0" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1190. 

  1190. 		<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1191. 

  1191. 		<config default="6" name="LP2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1192. 

  1192. 		<config default="6" name="LP2Station0" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1193. 

  1193. 		<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1194. 

  1194. 

  1195. 		<config default="3" name="LP1Station013" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1196. 

  1196. 		<config default="3" name="LP1Station113" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1197. 

  1197. 		<config default="6" name="LP2Station013" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1198. 

  1198. 		<config default="6" name="LP2Station113" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1199. 

  1199. 

  1200. 		<config default="9" name="Aligner1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1201. 

  1201. 		<config default="12" name="Aligner2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1202. 

  1202. 		<config default="15" name="CoolingBuffer1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1203. 

  1203. 		<config default="18" name="CoolingBuffer2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1204. 

  1204. 		<config default="21" name="LL1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1205. 

  1205. 		<config default="24" name="LL2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1206. 

  1206. 		<config default="21" name="BufferStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1207. 

  1207. 		<config default="21" name="Buffer1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1208. 

  1208. 		<config default="24" name="Buffer2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1209. 

  1209. 		<config default="26" name="FlipperStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1210. 

  1210. 

  1211. 		<config default="3" name="LP1Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1212. 

  1212. 		<!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1213. 

  1213. 		<config default="6" name="LP2Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1214. 

  1214. 		<!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1215. 

  1215. 		<config default="9" name="Aligner1Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1216. 

  1216. 		<config default="12" name="Aligner2Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1217. 

  1217. 		<config default="15" name="CoolingBuffer1Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1218. 

  1218. 		<config default="18" name="CoolingBuffer2Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1219. 

  1219. 		<config default="21" name="LL1Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1220. 

  1220. 		<config default="24" name="LL2Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1221. 

  1221. 		<config default="21" name="Buffer1Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1222. 

  1222. 		<config default="24" name="Buffer2Station3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1223. 

  1223. 

  1224. 		<config default="3" name="LP1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1225. 

  1225. 		<!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1226. 

  1226. 		<config default="6" name="LP2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1227. 

  1227. 		<!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1228. 

  1228. 		<config default="9" name="Aligner1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1229. 

  1229. 		<config default="12" name="Aligner2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1230. 

  1230. 		<config default="15" name="CoolingBuffer1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1231. 

  1231. 		<config default="18" name="CoolingBuffer2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1232. 

  1232. 		<config default="21" name="LL1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1233. 

  1233. 		<config default="24" name="LL2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1234. 

  1234. 		<config default="21" name="Buffer1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1235. 

  1235. 		<config default="24" name="Buffer2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1236. 

  1236. 

  1237. 		<config default="3" name="LP1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1238. 

  1238. 		<!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1239. 

  1239. 		<config default="6" name="LP2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1240. 

  1240. 		<!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1241. 

  1241. 		<config default="9" name="Aligner1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1242. 

  1242. 		<config default="12" name="Aligner2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1243. 

  1243. 		<config default="15" name="CoolingBuffer1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1244. 

  1244. 		<config default="18" name="CoolingBuffer2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1245. 

  1245. 		<config default="21" name="LL1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1246. 

  1246. 		<config default="24" name="LL2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1247. 

  1247. 		<config default="21" name="Buffer1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1248. 

  1248. 		<config default="24" name="Buffer2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1249. 

  1249. 

  1250. 

  1251. 		<config default="3" name="LP1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1252. 

  1252. 		<!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1253. 

  1253. 		<config default="6" name="LP2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1254. 

  1254. 		<!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
    1255. 

  1255. 		<config default="9" name="Aligner1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1256. 

  1256. 		<config default="12" name="Aligner2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1257. 

  1257. 		<config default="15" name="CoolingBuffer1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1258. 

  1258. 		<config default="18" name="CoolingBuffer2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1259. 

  1259. 		<config default="21" name="LL1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1260. 

  1260. 		<config default="24" name="LL2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1261. 

  1261. 		<config default="21" name="Buffer1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1262. 

  1262. 		<config default="24" name="Buffer2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
    1263. 

  1263. 

  1264. 		<config default="Thick" name="LP1ThicknessType" description="LP1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1265. 

  1265. 		<config default="Thick" name="LP2ThicknessType" description="LP2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1266. 

  1266. 		<config default="NONE" name="CoolingBuffer1ThicknessType" description="CoolingBuffer1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1267. 

  1267. 		<config default="NONE" name="CoolingBuffer2ThicknessType" description="CoolingBuffer2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1268. 

  1268. 		<config default="NONE" name="Aligner1ThicknessType" description="Aligner1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1269. 

  1269. 		<config default="NONE" name="Aligner2ThicknessType" description="Aligner2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1270. 

  1270. 		<config default="NONE" name="LL1ThicknessType" description="PMA Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1271. 

  1271. 		<config default="NONE" name="LL2ThicknessType" description="PMB Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1272. 

  1272. 		<config default="NONE" name="BufferThicknessType" description="Buffer Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1273. 

  1273. 		<config default="NONE" name="Buffer1ThicknessType" description="Buffer1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1274. 

  1274. 		<config default="NONE" name="Buffer2ThicknessType" description="Buffer2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1275. 

  1275. 		<config default="NONE" name="UpperThicknessType" description="Upper Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1276. 

  1276. 		<config default="NONE" name="LowerThicknessType" description="Lower Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
    1277. 

  1277. 	</configs>
    1278. 

  1278. </root>
    1279.