ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Config/2LPJet005/_ioDefineCard1.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

  <Dig_In>
		
		<DI_ITEM Index="0" Name="DI_CDAPressureSW" BufferOffset="0" Addr="DI-0" Description="CDA Pressure SW12"/>
    <DI_ITEM Index="1" Name="DI_VACPressureSW" BufferOffset="1" Addr="DI-1" Description="VAC Pressure SW"/>
    <DI_ITEM Index="2" Name="DI_IONCDAPressureSW" BufferOffset="2" Addr="DI-2" Description="ION CDA  Pressure SW"/>
    <DI_ITEM Index="3" Name="DI_IONAlarmSIGNAL" BufferOffset="3" Addr="DI-3" Description="ION Alarm SIGNAL"/>
    <DI_ITEM Index="4" Name="DI_WaterLeakSW" BufferOffset="4" Addr="DI-4" Description="Water Leak SW"/>
    <DI_ITEM Index="5" Name="DI_WaterFlowSW" BufferOffset="5" Addr="DI-5" Description="Water Flow SW"/>
		<DI_ITEM Index="6" Name="DI_MaintenanceMode" BufferOffset="6" Addr="DI-6" Description="Run Mode"/>
    <DI_ITEM Index="7" Name="DI_EFEMPowerON" BufferOffset="7" Addr="DI-7" Description="EFEM Power ON"/>
			
		<DI_ITEM Index="8" Name="DI_EFEMSideDoorClosed" BufferOffset="8" Addr="DI-8" Description="EFEM Side Door  Closed"/>
    <DI_ITEM Index="9" Name="DI_PMASystemInterlock" BufferOffset="9" Addr="DI-9" Description="PMASlitDoorOpen"/>
   
    
		<DI_ITEM Index="10" Name="DI_CstDoorClosed" BufferOffset="10" Addr="DI-10" Description="Cst Door Closed"/>
			
  
    
    <DI_ITEM Index="11" Name="DI_RobotEMStoEFEM" BufferOffset="11" Addr="DI-11" Description="Robot EMS to EFEM"/>
    
    <DI_ITEM Index="12" Name="DI_RobotRemotetoEFEM(spareInterfaceIO)" BufferOffset="12" Addr="DI-12" Description="RobotTeachingModetoEFEM"/>
		
		<DI_ITEM Index="13" Name="DI_FFUalarm" BufferOffset="13" Addr="DI-13" Description="FFU alarm"/>
    
		<DI_ITEM Index="14" Name="DI_RBNotExtendSIMF1" BufferOffset="14" Addr="DI-14" Description="RB Not Extend LP1"/>
		
		<DI_ITEM Index="15" Name="DI_RBNotExtendPMA" BufferOffset="15" Addr="DI-15" Description="RB Not Extend Buffer1"/>
   

    <DI_ITEM Index="16" Name="DI_CoolingBuffer1PinUp" BufferOffset="16" Addr="DI-16" Description="C1_Lift Pin Up_Sensor"/>
    <DI_ITEM Index="17" Name="DI_CoolingBuffer1PinDown" BufferOffset="17" Addr="DI-17" Description="C1_Lift Pin Down_Sensor"/>
    <DI_ITEM Index="18" Name="DI_CoolingBuffer1Inch3Up" BufferOffset="18" Addr="DI-18" Description="C1_Guide Pin Small Up_Sensor"/>
    <DI_ITEM Index="19" Name="DI_CoolingBuffer1Inch3Down" BufferOffset="19" Addr="DI-19" Description="C1_Guide Pin Small Down_Sensor"/>
    <DI_ITEM Index="20" Name="DI_CoolingBuffer1Inch4Up" BufferOffset="20" Addr="DI-20" Description="C1_Guide Pin Medium Up_Sensor"/>
    <DI_ITEM Index="21" Name="DI_CoolingBuffer1Inch4Down" BufferOffset="21" Addr="DI-21" Description="C1_Guide Pin Medium Down_Sensor"/>
    
  

    <DI_ITEM Index="22" Name="DI_4InchCstPresence" BufferOffset="22" Addr="DI-22" Description="SmallInchCstPresence"/>
    <DI_ITEM Index="23" Name="DI_4InchCstProtrusion1" BufferOffset="23" Addr="DI-23" Description="SmallInchCstProtrusion1"/>
   
	  <DI_ITEM Index="25" Name="DI_6InchCstPresence" BufferOffset="25" Addr="DI-25" Description="MiddleInchCstPresence"/>
    <DI_ITEM Index="26" Name="DI_6InchCstProtrusion1" BufferOffset="26" Addr="DI-26" Description="MiddleInchCstProtrusion1"/>
   
			
		<DI_ITEM Index="28" Name="DI_8InchCstPresence" BufferOffset="28" Addr="DI-28" Description="LargeInchCstPresence"/>
    <DI_ITEM Index="29" Name="DI_8InchCstProtrusion1" BufferOffset="29" Addr="DI-29" Description="LargeInchCstProtrusion1"/>
		
 




  </Dig_In>

  <Dig_Out>
		
    <DO_ITEM Index="0" Name="DO_Yellowlight" BufferOffset="0" Addr="DO-00" Description="Yellow light"/>
    <DO_ITEM Index="1" Name="DO_Greenlight" BufferOffset="1" Addr="DO-01" Description="Green light"/>
    <DO_ITEM Index="2" Name="DO_Redlight" BufferOffset="2" Addr="DO-02" Description="Red light"/>
    <DO_ITEM Index="3" Name="DO_Bulelight" BufferOffset="3" Addr="DO-03" Description="Bule light"/>
    <DO_ITEM Index="4" Name="DO_Buzzer1" BufferOffset="4" Addr="DO-04" Description="Buzzer1"/>
    <DO_ITEM Index="5" Name="DO_Buzzer2" BufferOffset="5" Addr="DO-05" Description="Buzzer2"/>

    <DO_ITEM Index="7" Name="DO_CoolingBuffer1PinUp" BufferOffset="7" Addr="DO-07" Description="C1_Lift Pin Up_SV"/>
    <DO_ITEM Index="8" Name="DO_CoolingBuffer1PinDown" BufferOffset="8" Addr="DO-08" Description="C1_Lift Pin Down_SV"/>
    <DO_ITEM Index="9" Name="DO_CoolingBuffer1Inch3Up" BufferOffset="9" Addr="DO-09" Description="C1_Guide Pin Small Up_SV"/>
    <DO_ITEM Index="10" Name="DO_CoolingBuffer1Inch3Down" BufferOffset="10" Addr="DO-10" Description="C1_Guide Pin Small  Down_SV"/>
    <DO_ITEM Index="11" Name="DO_CoolingBuffer1Inch4Up" BufferOffset="11" Addr="DO-11" Description="C1_Guide Pin Medium Up_SV"/>
    <DO_ITEM Index="12" Name="DO_CoolingBuffer1Inch4Down" BufferOffset="12" Addr="DO-12" Description="C1_Guide Pin Medium Down_SV"/>
    
   
    <DO_ITEM Index="19" Name="DO_SafetytoSMIF1" BufferOffset="19" Addr="DO-19" Description="Safety to LP1"/>
   
			
		<DO_ITEM Index="20" Name="DO_WaterLeakOkToPM" BufferOffset="20" Addr="DO-20" Description="WaterLeakOkToPM"/>
		<DO_ITEM Index="21" Name="DO_CDAPressureOkToPM" BufferOffset="21" Addr="DO-21" Description="CDAPressureOkToPM"/>

	  <DO_ITEM Index="22" Name="DO_IonizerInterrupt" BufferOffset="22" Addr="DO-22" Description="Stop Ionizer Working"/>


    
  </Dig_Out>
</IO_DEFINE>