ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Config/2LPJet005/DeviceModel.xml

<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="EFEM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"  >


		<IoSignalTowers>
				<IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
											 doRed="DO_Redlight" doYellow="DO_Yellowlight" doGreen="DO_Greenlight"
											 doBlue="DO_Bulelight" doBuzzer1="DO_Buzzer1" doBuzzer2="DO_Buzzer2" doBuzzer3="" doBuzzer4="" doBuzzer5=""/>
		</IoSignalTowers>

		<IoCoolingBuffers  assembly="EfemRT" classType="Aitex.Core.RT.Device.Unit.IoCoolingBuffer">
				<IoCoolingBuffer module="CoolingBuffer1" id ="CoolingBuffer1" display="Cooling buffer1" schematicId=""
                doAligner1Extend="DO_CoolingBuffer1Inch3Up" doAligner1Retract="DO_CoolingBuffer1Inch3Down"
                doAligner2Extend="DO_CoolingBuffer1Inch3Up" doAligner2Retract="DO_CoolingBuffer1Inch3Down"
								doAligner3Extend="DO_CoolingBuffer1Inch4Up" doAligner3Retract="DO_CoolingBuffer1Inch4Down"
                doLiftUp="DO_CoolingBuffer1PinUp"  doLiftDown="DO_CoolingBuffer1PinDown"
                diAligner1Extend="DI_CoolingBuffer1Inch3Up"  diAligner1Retract="DI_CoolingBuffer1Inch3Down"
                diAligner2Extend="DI_CoolingBuffer1Inch3Up"  diAligner2Retract="DI_CoolingBuffer1Inch3Down"
								diAligner3Extend="DI_CoolingBuffer1Inch4Up"  diAligner3Retract="DI_CoolingBuffer1Inch4Down"
                diLiftUp="DI_CoolingBuffer1PinUp"  diLiftDown="DI_CoolingBuffer1PinDown"
                scUpTimeout="Coolbuffer.UpTimeout" scDownTimeout="Coolbuffer.DownTimeout"
                   />
				<!--<IoCoolingBuffer module="Aligner1" id ="CoolingBuffer2" display="Aligner1" schematicId=""
                doAligner1Extend="DO_CoolingBuffer2Inch3Up" doAligner1Retract="DO_CoolingBuffer2Inch3Down"
                doAligner2Extend="DO_CoolingBuffer2Inch3Up" doAligner2Retract="DO_CoolingBuffer2Inch3Down"
								doAligner3Extend="DO_CoolingBuffer2Inch4Up" doAligner3Retract="DO_CoolingBuffer2Inch4Down"
                doLiftUp="DO_CoolingBuffer2PinUp"  doLiftDown="DO_CoolingBuffer2PinDown"
                diAligner1Extend="DI_CoolingBuffer2Inch3Up" diAligner1Retract="DI_CoolingBuffer2Inch3Down"
                diAligner2Extend="DI_CoolingBuffer2Inch3Up"  diAligner2Retract="DI_CoolingBuffer2Inch3Down"
							  diAligner3Extend="DI_CoolingBuffer2Inch4Up"  diAligner3Retract="DI_CoolingBuffer2Inch4Down"
                diLiftUp="DI_CoolingBuffer2PinUp"  diLiftDown="DI_CoolingBuffer2PinDown"
                scUpTimeout="Coolbuffer.UpTimeout" scDownTimeout="Coolbuffer.DownTimeout"
                   />-->
				<!--<IoCoolingBuffer module="Aligner1" id ="Aligner1" display="Aligner1" schematicId=""
                doAligner1Extend="DO_Buffer3Inch3Up" doAligner1Retract="DO_Buffer3Inch3Down"
                doAligner2Extend="DO_Buffer3Inch3Up" doAligner2Retract="DO_Buffer3Inch3Down"
								doAligner3Extend="DO_Buffer3Inch4Up" doAligner3Retract="DO_Buffer3Inch4Down"
                doLiftUp="DO_Buffer3PinUp"  doLiftDown="DO_Buffer3PinDown"
                diAligner1Extend="DI_Buffer3Inch3Up"  diAligner1Retract="DI_Buffer3Inch3Down"
                diAligner2Extend="DI_Buffer3Inch3Up"  diAligner2Retract="DI_Buffer3Inch3Down"
								diAligner3Extend="DI_Buffer3Inch4Up"  diAligner3Retract="DI_Buffer3Inch4Down"
                diLiftUp="DI_Buffer3PinUp"  diLiftDown="DI_Buffer3PinDown"
                scUpTimeout="Coolbuffer.UpTimeout" scDownTimeout="Coolbuffer.DownTimeout"
                   />
				<IoCoolingBuffer module="Aligner2" id ="Aligner2" display="Aligner2" schematicId=""
                doAligner1Extend="DO_Buffer4Inch3Up" doAligner1Retract="DO_Buffer4Inch3Down"
                doAligner2Extend="DO_Buffer4Inch3Up" doAligner2Retract="DO_Buffer4Inch3Down"
								doAligner3Extend="DO_Buffer4Inch4Up" doAligner3Retract="DO_Buffer4Inch4Down"
                doLiftUp="DO_Buffer4PinUp"  doLiftDown="DO_Buffer4PinDown"
                diAligner1Extend="DI_Buffer4Inch3Up" diAligner1Retract="DI_Buffer4Inch3Down"
                diAligner2Extend="DI_Buffer4Inch3Up"  diAligner2Retract="DI_Buffer4Inch3Down"
								diAligner3Extend="DI_Buffer4Inch4Up"  diAligner3Retract="DI_Buffer4Inch4Down"
                diLiftUp="DI_Buffer4PinUp"  diLiftDown="DI_Buffer4PinDown"
                scUpTimeout="Coolbuffer.UpTimeout" scDownTimeout="Coolbuffer.DownTimeout"
                   />-->
		</IoCoolingBuffers>



		<IoSensors>
				<IoSensor module="System" id="SensorWaterLeakSW" di="DI_WaterLeakSW" textOutTrigValue="false" alarmText="Water Leak Alarm"/>
				<IoSensor module="System" id="SensorWaterFlowSW" di="DI_WaterFlowSW" textOutTrigValue="false" warningText=""/>
				<!--<IoSensor module="System" id="SensorGratingSensorIN1" di="DI_GratingSensorIN1" textOutTrigValue="true" warningText=""/>-->
				<!--<IoSensor module="System" id="SensorEFEMCSTDoorClosed" di="DI_EFEMCSTDoorClosed" textOutTrigValue="true" warningText=""/>-->

				<IoSensor module="System" id="SensorFFUalarm" di="DI_FFUalarm" textOutTrigValue="false" warningText="FFU alarm"/>
				<IoSensor module="System" id="SensorCDAPressureSW" di="DI_CDAPressureSW" textOutTrigValue="false" alarmText="CDAPressure occur warning"/>
				<IoSensor module="System" id="SensorVACPressureSW" di="DI_VACPressureSW" textOutTrigValue="false" alarmText="VACPressure occur warning"/>
				<IoSensor module="System" id="SensorIONCDAPressureSW" di="DI_IONCDAPressureSW" textOutTrigValue="false" warningText="" alarmText=""/>
				<IoSensor module="System" id="SensorIONAlarmSIGNAL" di="DI_IONAlarmSIGNAL" textOutTrigValue="false" warningText="" alarmText=""/>
				<IoSensor module="System" id="SensorEFEMSideDoorClosed" di="DI_EFEMSideDoorClosed" textOutTrigValue="true" warningText="EFEMSideDoor is Open"/>
				<IoSensor module="System" id="SensorPMASystemInterlock" di="DI_PMASystemInterlock" textOutTrigValue="true" warningText=""/>
				<!--<IoSensor module="System" id="SensorPMBSystemInterlock" di="DI_PMBSystemInterlock" textOutTrigValue="true" warningText=""/>-->

				<IoSensor module="System" id="SensorMaintenanceMode" di="DI_MaintenanceMode" textOutTrigValue="false" warningText="In MaintenanceMode"/>
				<IoSensor module="System" id="SensorEFEMPowerON" di="DI_EFEMPowerON" textOutTrigValue="true" warningText=""/>

				<!--<IoSensor module="System" id="SensorRobotTPusing" di="DI_RobotTPusing" textOutTrigValue="true" warningText=""/>-->
				<IoSensor module="System" id="SensorRobotEMStoEFEM" di="DI_RobotEMStoEFEM" textOutTrigValue="false" alarmText="Robot EMS to EFEM" warningText=""/>
				<!--<IoSensor module="System" id="SensorRobotEnabletoEFEM" di="DI_RobotEnabletoEFEM" textOutTrigValue="true" warningText=""/>-->
				<IoSensor module="System" id="SensorRobotRemotetoEFEM" di="DI_RobotRemotetoEFEM(spareInterfaceIO)" textOutTrigValue="true" warningText="Robot Teaching"/>
				<!--<IoSensor module="System" id="SensorRBReady" di="DI_RBReady(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
        <IoSensor module="System" id="SensorRobotError" di="DI_RBError(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>-->
				<IoSensor module="System" id="SensorRBNotExtendPMA" di="DI_RBNotExtendPMA" textOutTrigValue="true" warningText=""/>
				<!--<IoSensor module="System" id="SensorRBNotExtendPMB" di="DI_RBNotExtendPMB" textOutTrigValue="true" warningText=""/>-->
				<IoSensor module="System" id="SensorRBNotExtendSIMF1" di="DI_RBNotExtendSIMF1" textOutTrigValue="true" warningText=""/>

				<IoSensor module="System" id="SensorCstDoorClosed" di="DI_CstDoorClosed" textOutTrigValue="true" warningText=""/>
				
				<IoSensor module="System" id="Sensor4InchCstPresence" di="DI_4InchCstPresence" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="Sensor4InchCstProtrusion1" di="DI_4InchCstProtrusion1" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="Sensor4InchCstProtrusion2" di="DI_4InchCstProtrusion2" textOutTrigValue="true" warningText=""/>
				
				<IoSensor module="System" id="Sensor6InchCstPresence" di="DI_6InchCstPresence" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="Sensor6InchCstProtrusion1" di="DI_6InchCstProtrusion1" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="Sensor6InchCstProtrusion2" di="DI_6InchCstProtrusion2" textOutTrigValue="true" warningText=""/>
				
				<IoSensor module="System" id="Sensor8InchCstPresence" di="DI_8InchCstPresence" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="Sensor8InchCstProtrusion1" di="DI_8InchCstProtrusion1" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="Sensor8InchCstProtrusion2" di="DI_8InchCstProtrusion2" textOutTrigValue="true" warningText=""/>
				
				
			
				<!--<IoSensor module="System" id="SensorRBNotExtendSIMF2" di="DI_RBNotExtendSIMF2" textOutTrigValue="true" warningText=""/>-->
				<!--<IoSensor module="System" id="SensorRBupperArmhavewafer" di="DI_RBupperArmhavewafer" textOutTrigValue="true" warningText=""/>
            <IoSensor module="System" id="SensorRBlowerArmhavewafer" di="DI_RBlowerArmhavewafer" textOutTrigValue="true" warningText=""/>-->
				<!--<IoSensor module="System" id="SensorSMIF1PODOPEN" di="DI_SMIF1PODOPEN" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="SensorSMIF1PODPRESENT" di="DI_SMIF1PODPRESENT" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="SensorSMIF1READY" di="DI_SMIF1READY" textOutTrigValue="true" warningText=""/>-->
				<!--<IoSensor module="System" id="SensorSMIF1MAPPINGSENSORLASER" di="DI_SMIF1MAPPINGSENSORLASER" textOutTrigValue="true" warningText=""/>-->

				<!--<IoSensor module="System" id="SensorSMIF2PODOPEN" di="DI_SMIF2PODOPEN" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="SensorSMIF2PODPRESENT" di="DI_SMIF2PODPRESENT" textOutTrigValue="true" warningText=""/>
				<IoSensor module="System" id="SensorSMIF2READY" di="DI_SMIF2READY" textOutTrigValue="true" warningText=""/>-->
				<!--<IoSensor module="System" id="SensorSMIF2MAPPINGSENSORLASER" di="DI_SMIF2MAPPINGSENSORLASER" textOutTrigValue="true" warningText=""/>-->


		</IoSensors>

		<IoTriggers>
				<!--<IoTrigger id="TrigEFEMSideDoorClosed"  display="" schematicId="" unit="" doTrigger="DO_EFEMSideDoorClosed"/>
        <IoTrigger id="TrigRBNotExtendPMA"  display="" schematicId="" unit="" doTrigger="DO_RBNotExtendPMA"/>
        <IoTrigger id="TrigRBNotExtendPMB"  display="" schematicId="" unit="" doTrigger="DO_RBNotExtendPMB"/>-->
				
				<IoTrigger id="TrigIonizerInterrupt"  display="" schematicId="" unit="" doTrigger="DO_IonizerInterrupt"/>

				<!--<IoTrigger id="TrigPauseResumetoRobot"  display="" schematicId="" unit="" doTrigger="DO_Pause/ResumetoRobot"/>-->
				<!--<IoTrigger id="TrigEnableToRobot"  display="" schematicId="" unit="" doTrigger="DO_EnableToRobot(Spare)"/>
        <IoTrigger id="TrigEMSToRobot"  display="" schematicId="" unit="" doTrigger="DO_EMSToRobot(Spare)"/>-->

				<!--<IoTrigger id="TrigSafetytoPMA"  display="" schematicId="" unit="" doTrigger="DO_SafetytoPMA"/>
        <IoTrigger id="TrigSafetytoPMB"  display="" schematicId="" unit="" doTrigger="DO_SafetytoPMB"/>-->
				<IoTrigger id="TrigSafetytoSMIF1"  display="" schematicId="" unit="" doTrigger="DO_SafetytoSMIF1"/>
				<!--<IoTrigger id="TrigSafetytoSMIF2"  display="" schematicId="" unit="" doTrigger="DO_SafetytoSMIF2"/>-->

				<IoTrigger id="TrigWaterLeakOkToPM"  display="" schematicId="" unit="" doTrigger="DO_WaterLeakOkToPM"/>
				<IoTrigger id="TrigCDAPressureOkToPM"  display="" schematicId="" unit="" doTrigger="DO_CDAPressureOkToPM"/>
				<!--<IoTrigger id="TrigRBbusytoSIMF1"  display="" schematicId="" unit="" doTrigger="DO_RBbusytoSIMF1"/>
				<IoTrigger id="TrigRBbusytoSIMF2"  display="" schematicId="" unit="" doTrigger="DO_RBbusytoSIMF2"/>-->



		</IoTriggers>

</DeviceModelDefine>