DeviceModel.cs 5.7 KB

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  1. using Aitex.Core.RT.Device.Unit;
  2. namespace EFEM.RT.Devices
  3. {
  4. public class DeviceModel
  5. {
  6. public static IoSignalTower SignalTower;
  7. //public static IoCoolingBuffer CoolingBuffer1;
  8. //public static IoCoolingBuffer CoolingBuffer2;
  9. #region DI Component Definition
  10. public static IoSensor SensorWaterLeakSW;
  11. public static IoSensor SensorWaterFlowSW;
  12. public static IoSensor SensorGratingSensorIN1;
  13. public static IoSensor SensorEFEMCSTDoorClosed;
  14. public static IoSensor SensorFFUalarm;
  15. public static IoSensor SensorCDAPressureSW;
  16. public static IoSensor SensorVACPressureSW;
  17. public static IoSensor SensorIONCDAPressureSW;
  18. public static IoSensor SensorIONAlarmSIGNAL;
  19. public static IoSensor SensorEFEMSideDoorClosed;
  20. public static IoSensor SensorPMASystemInterlock;
  21. public static IoSensor SensorPMBSystemInterlock;
  22. public static IoSensor SensorMaintenanceMode;
  23. public static IoSensor SensorEFEMPowerON;
  24. public static IoSensor SensorRobotTPusing;
  25. public static IoSensor SensorRobotEMStoEFEM;
  26. public static IoSensor SensorRobotEnabletoEFEM;
  27. public static IoSensor SensorRobotRemotetoEFEM;
  28. public static IoSensor SensorRBReady;
  29. public static IoSensor SensorRobotError;
  30. public static IoSensor SensorRBNotExtendPMA;
  31. public static IoSensor SensorRBNotExtendPMB;
  32. public static IoSensor SensorRBNotExtendSIMF1;
  33. public static IoSensor SensorRBNotExtendSIMF2;
  34. public static IoSensor SensorRBupperArmhavewafer;
  35. public static IoSensor SensorRBlowerArmhavewafer;
  36. public static IoSensor SensorSMIF1PODOPEN;
  37. public static IoSensor SensorSMIF1PODPRESENT;
  38. public static IoSensor SensorSMIF1READY;
  39. public static IoSensor SensorSMIF1MAPPINGSENSORLASER;
  40. public static IoSensor SensorSMIF2PODOPEN;
  41. public static IoSensor SensorSMIF2PODPRESENT;
  42. public static IoSensor SensorSMIF2READY;
  43. public static IoSensor SensorSMIF2MAPPINGSENSORLASER;
  44. public static IoSensor SensorCstDoorClosed;
  45. public static IoSensor Sensor4InchCstPresence;
  46. public static IoSensor Sensor4InchCstProtrusion1;
  47. public static IoSensor Sensor4InchCstProtrusion2;
  48. public static IoSensor Sensor6InchCstPresence;
  49. public static IoSensor Sensor6InchCstProtrusion1;
  50. public static IoSensor Sensor6InchCstProtrusion2;
  51. public static IoSensor Sensor8InchCstPresence;
  52. public static IoSensor Sensor8InchCstProtrusion1;
  53. public static IoSensor Sensor8InchCstProtrusion2;
  54. public static IoSensor SensorCoolingStageSLOT1WaferON;
  55. public static IoSensor SensorCoolingStageSLOT2WaferON;
  56. public static IoSensor SensorCoolingStageSLOT3WaferON;
  57. public static IoSensor SensorCoolingStageSLOT4WaferON;
  58. public static IoSensor SensorCoolingStageSLOT5WaferON;
  59. public static IoSensor SensorCoolingStageSLOT6WaferON;
  60. public static IoSensor SensorPreAlignerWaferOn;
  61. public static IoSensor SensorPAorFLPDoorClosed;
  62. public static IoSensor SensorPAEnableToRobot;
  63. public static IoSensor SensorRobotTeachingModeToEFEM;
  64. public static IoSensor SensorRBNotExtendPreAligner;
  65. public static IoSensor SensorRBNotExtendFlipper;
  66. public static IoSensor SensorLP1OperationStatus;
  67. public static IoSensor SensorLP1FoupOpen;
  68. public static IoSensor SensorLP1FoupPlacement;
  69. public static IoSensor SensorLP1Ready;
  70. public static IoSensor SensorLP1Presence;
  71. public static IoSensor SensorLP2OperationStatus;
  72. public static IoSensor SensorLP2FoupOpen;
  73. public static IoSensor SensorLP2FoupPlacement;
  74. public static IoSensor SensorLP2Ready;
  75. public static IoSensor SensorLP2Presence;
  76. #endregion
  77. #region DO Component Definition
  78. public static IoTrigger TrigEFEMSideDoorClosed;
  79. public static IoTrigger TrigRBNotExtendPMA;
  80. public static IoTrigger TrigRBNotExtendPMB;
  81. public static IoTrigger TrigPauseResumetoRobot;
  82. public static IoTrigger TrigEnableToRobot;
  83. public static IoTrigger TrigEMSToRobot;
  84. public static IoTrigger TrigSafetytoPMA;
  85. public static IoTrigger TrigSafetytoPMB;
  86. public static IoTrigger TrigSafetytoSMIF1;
  87. public static IoTrigger TrigSafetytoSMIF2;
  88. public static IoTrigger TrigIonizerInterrupt;
  89. public static IoTrigger TrigRBbusytoSIMF1;
  90. public static IoTrigger TrigWaterLeakOkToPM;
  91. public static IoTrigger TrigCDAPressureOkToPM;
  92. public static IoTrigger TrigRBbusytoSIMF2;
  93. public static IoTrigger TrigFlipperTurnOverMotor0or180;
  94. public static IoTrigger TrigFlipperTurnOverStepMotionStart;
  95. public static IoTrigger TrigFlipperTurnOverJOGP;
  96. public static IoTrigger TrigFlipperTurnOverJOGN;
  97. public static IoTrigger TrigFlipperTurnOverSetOrigin;
  98. public static IoTrigger TrigFlipperTurnOverALMRST;
  99. public static IoTrigger TrigFlipperClampMotorCloseorOpen;
  100. public static IoTrigger TrigFlipperClampStepMotionSTART;
  101. public static IoTrigger TrigFlipperClampJOGP;
  102. public static IoTrigger TrigFlipperClampJOGN;
  103. //public static IoTrigger TrigRobotSafetytoLP1;
  104. //public static IoTrigger TrigRobotSafetytoLP2;
  105. public static IoTrigger TrigEnableToOperateLP1;
  106. public static IoTrigger TrigEnableToOperateLP2;
  107. #endregion
  108. //public static IoWaferSizeDetector LP1WaferDetector;
  109. //public static IoWaferSizeDetector LP2WaferDetector;
  110. }
  111. }