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- using Aitex.Core.RT.Device.Unit;
- namespace EFEM.RT.Devices
- {
- public class DeviceModel
- {
- public static IoSignalTower SignalTower;
- //public static IoCoolingBuffer CoolingBuffer1;
- //public static IoCoolingBuffer CoolingBuffer2;
- #region DI Component Definition
- public static IoSensor SensorWaterLeakSW;
- public static IoSensor SensorWaterFlowSW;
- public static IoSensor SensorGratingSensorIN1;
- public static IoSensor SensorEFEMCSTDoorClosed;
- public static IoSensor SensorFFUalarm;
- public static IoSensor SensorCDAPressureSW;
- public static IoSensor SensorVACPressureSW;
- public static IoSensor SensorIONCDAPressureSW;
- public static IoSensor SensorIONAlarmSIGNAL;
- public static IoSensor SensorEFEMSideDoorClosed;
- public static IoSensor SensorPMASystemInterlock;
- public static IoSensor SensorPMBSystemInterlock;
- public static IoSensor SensorMaintenanceMode;
- public static IoSensor SensorEFEMPowerON;
- public static IoSensor SensorRobotTPusing;
- public static IoSensor SensorRobotEMStoEFEM;
- public static IoSensor SensorRobotEnabletoEFEM;
- public static IoSensor SensorRobotRemotetoEFEM;
- public static IoSensor SensorRBReady;
- public static IoSensor SensorRobotError;
- public static IoSensor SensorRBNotExtendPMA;
- public static IoSensor SensorRBNotExtendPMB;
- public static IoSensor SensorRBNotExtendSIMF1;
- public static IoSensor SensorRBNotExtendSIMF2;
- public static IoSensor SensorRBupperArmhavewafer;
- public static IoSensor SensorRBlowerArmhavewafer;
- public static IoSensor SensorSMIF1PODOPEN;
- public static IoSensor SensorSMIF1PODPRESENT;
- public static IoSensor SensorSMIF1READY;
- public static IoSensor SensorSMIF1MAPPINGSENSORLASER;
- public static IoSensor SensorSMIF2PODOPEN;
- public static IoSensor SensorSMIF2PODPRESENT;
- public static IoSensor SensorSMIF2READY;
- public static IoSensor SensorSMIF2MAPPINGSENSORLASER;
- public static IoSensor SensorCstDoorClosed;
- public static IoSensor Sensor4InchCstPresence;
- public static IoSensor Sensor4InchCstProtrusion1;
- public static IoSensor Sensor4InchCstProtrusion2;
- public static IoSensor Sensor6InchCstPresence;
- public static IoSensor Sensor6InchCstProtrusion1;
- public static IoSensor Sensor6InchCstProtrusion2;
- public static IoSensor Sensor8InchCstPresence;
- public static IoSensor Sensor8InchCstProtrusion1;
- public static IoSensor Sensor8InchCstProtrusion2;
- public static IoSensor SensorCoolingStageSLOT1WaferON;
- public static IoSensor SensorCoolingStageSLOT2WaferON;
- public static IoSensor SensorCoolingStageSLOT3WaferON;
- public static IoSensor SensorCoolingStageSLOT4WaferON;
- public static IoSensor SensorCoolingStageSLOT5WaferON;
- public static IoSensor SensorCoolingStageSLOT6WaferON;
- public static IoSensor SensorPreAlignerWaferOn;
- public static IoSensor SensorPAorFLPDoorClosed;
- public static IoSensor SensorPAEnableToRobot;
- public static IoSensor SensorRobotTeachingModeToEFEM;
- public static IoSensor SensorRBNotExtendPreAligner;
- public static IoSensor SensorRBNotExtendFlipper;
- public static IoSensor SensorLP1OperationStatus;
- public static IoSensor SensorLP1FoupOpen;
- public static IoSensor SensorLP1FoupPlacement;
- public static IoSensor SensorLP1Ready;
- public static IoSensor SensorLP1Presence;
- public static IoSensor SensorLP2OperationStatus;
- public static IoSensor SensorLP2FoupOpen;
- public static IoSensor SensorLP2FoupPlacement;
- public static IoSensor SensorLP2Ready;
- public static IoSensor SensorLP2Presence;
- #endregion
- #region DO Component Definition
- public static IoTrigger TrigEFEMSideDoorClosed;
- public static IoTrigger TrigRBNotExtendPMA;
- public static IoTrigger TrigRBNotExtendPMB;
- public static IoTrigger TrigPauseResumetoRobot;
- public static IoTrigger TrigEnableToRobot;
- public static IoTrigger TrigEMSToRobot;
- public static IoTrigger TrigSafetytoPMA;
- public static IoTrigger TrigSafetytoPMB;
- public static IoTrigger TrigSafetytoSMIF1;
- public static IoTrigger TrigSafetytoSMIF2;
- public static IoTrigger TrigIonizerInterrupt;
- public static IoTrigger TrigRBbusytoSIMF1;
- public static IoTrigger TrigWaterLeakOkToPM;
- public static IoTrigger TrigCDAPressureOkToPM;
- public static IoTrigger TrigRBbusytoSIMF2;
- public static IoTrigger TrigFlipperTurnOverMotor0or180;
- public static IoTrigger TrigFlipperTurnOverStepMotionStart;
- public static IoTrigger TrigFlipperTurnOverJOGP;
- public static IoTrigger TrigFlipperTurnOverJOGN;
- public static IoTrigger TrigFlipperTurnOverSetOrigin;
- public static IoTrigger TrigFlipperTurnOverALMRST;
- public static IoTrigger TrigFlipperClampMotorCloseorOpen;
- public static IoTrigger TrigFlipperClampStepMotionSTART;
- public static IoTrigger TrigFlipperClampJOGP;
- public static IoTrigger TrigFlipperClampJOGN;
- //public static IoTrigger TrigRobotSafetytoLP1;
- //public static IoTrigger TrigRobotSafetytoLP2;
- public static IoTrigger TrigEnableToOperateLP1;
- public static IoTrigger TrigEnableToOperateLP2;
- #endregion
- //public static IoWaferSizeDetector LP1WaferDetector;
- //public static IoWaferSizeDetector LP2WaferDetector;
- }
- }
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