using Aitex.Core.RT.Device.Unit; namespace EFEM.RT.Devices { public class DeviceModel { public static IoSignalTower SignalTower; //public static IoCoolingBuffer CoolingBuffer1; //public static IoCoolingBuffer CoolingBuffer2; #region DI Component Definition public static IoSensor SensorWaterLeakSW; public static IoSensor SensorWaterFlowSW; public static IoSensor SensorGratingSensorIN1; public static IoSensor SensorEFEMCSTDoorClosed; public static IoSensor SensorFFUalarm; public static IoSensor SensorCDAPressureSW; public static IoSensor SensorVACPressureSW; public static IoSensor SensorIONCDAPressureSW; public static IoSensor SensorIONAlarmSIGNAL; public static IoSensor SensorEFEMSideDoorClosed; public static IoSensor SensorPMASystemInterlock; public static IoSensor SensorPMBSystemInterlock; public static IoSensor SensorMaintenanceMode; public static IoSensor SensorEFEMPowerON; public static IoSensor SensorRobotTPusing; public static IoSensor SensorRobotEMStoEFEM; public static IoSensor SensorRobotEnabletoEFEM; public static IoSensor SensorRobotRemotetoEFEM; public static IoSensor SensorRBReady; public static IoSensor SensorRobotError; public static IoSensor SensorRBNotExtendPMA; public static IoSensor SensorRBNotExtendPMB; public static IoSensor SensorRBNotExtendSIMF1; public static IoSensor SensorRBNotExtendSIMF2; public static IoSensor SensorRBupperArmhavewafer; public static IoSensor SensorRBlowerArmhavewafer; public static IoSensor SensorSMIF1PODOPEN; public static IoSensor SensorSMIF1PODPRESENT; public static IoSensor SensorSMIF1READY; public static IoSensor SensorSMIF1MAPPINGSENSORLASER; public static IoSensor SensorSMIF2PODOPEN; public static IoSensor SensorSMIF2PODPRESENT; public static IoSensor SensorSMIF2READY; public static IoSensor SensorSMIF2MAPPINGSENSORLASER; public static IoSensor SensorCstDoorClosed; public static IoSensor Sensor4InchCstPresence; public static IoSensor Sensor4InchCstProtrusion1; public static IoSensor Sensor4InchCstProtrusion2; public static IoSensor Sensor6InchCstPresence; public static IoSensor Sensor6InchCstProtrusion1; public static IoSensor Sensor6InchCstProtrusion2; public static IoSensor Sensor8InchCstPresence; public static IoSensor Sensor8InchCstProtrusion1; public static IoSensor Sensor8InchCstProtrusion2; public static IoSensor SensorCoolingStageSLOT1WaferON; public static IoSensor SensorCoolingStageSLOT2WaferON; public static IoSensor SensorCoolingStageSLOT3WaferON; public static IoSensor SensorCoolingStageSLOT4WaferON; public static IoSensor SensorCoolingStageSLOT5WaferON; public static IoSensor SensorCoolingStageSLOT6WaferON; public static IoSensor SensorPreAlignerWaferOn; public static IoSensor SensorPAorFLPDoorClosed; public static IoSensor SensorPAEnableToRobot; public static IoSensor SensorRobotTeachingModeToEFEM; public static IoSensor SensorRBNotExtendPreAligner; public static IoSensor SensorRBNotExtendFlipper; public static IoSensor SensorLP1OperationStatus; public static IoSensor SensorLP1FoupOpen; public static IoSensor SensorLP1FoupPlacement; public static IoSensor SensorLP1Ready; public static IoSensor SensorLP1Presence; public static IoSensor SensorLP2OperationStatus; public static IoSensor SensorLP2FoupOpen; public static IoSensor SensorLP2FoupPlacement; public static IoSensor SensorLP2Ready; public static IoSensor SensorLP2Presence; #endregion #region DO Component Definition public static IoTrigger TrigEFEMSideDoorClosed; public static IoTrigger TrigRBNotExtendPMA; public static IoTrigger TrigRBNotExtendPMB; public static IoTrigger TrigPauseResumetoRobot; public static IoTrigger TrigEnableToRobot; public static IoTrigger TrigEMSToRobot; public static IoTrigger TrigSafetytoPMA; public static IoTrigger TrigSafetytoPMB; public static IoTrigger TrigSafetytoSMIF1; public static IoTrigger TrigSafetytoSMIF2; public static IoTrigger TrigIonizerInterrupt; public static IoTrigger TrigRBbusytoSIMF1; public static IoTrigger TrigWaterLeakOkToPM; public static IoTrigger TrigCDAPressureOkToPM; public static IoTrigger TrigRBbusytoSIMF2; public static IoTrigger TrigFlipperTurnOverMotor0or180; public static IoTrigger TrigFlipperTurnOverStepMotionStart; public static IoTrigger TrigFlipperTurnOverJOGP; public static IoTrigger TrigFlipperTurnOverJOGN; public static IoTrigger TrigFlipperTurnOverSetOrigin; public static IoTrigger TrigFlipperTurnOverALMRST; public static IoTrigger TrigFlipperClampMotorCloseorOpen; public static IoTrigger TrigFlipperClampStepMotionSTART; public static IoTrigger TrigFlipperClampJOGP; public static IoTrigger TrigFlipperClampJOGN; //public static IoTrigger TrigRobotSafetytoLP1; //public static IoTrigger TrigRobotSafetytoLP2; public static IoTrigger TrigEnableToOperateLP1; public static IoTrigger TrigEnableToOperateLP2; #endregion //public static IoWaferSizeDetector LP1WaferDetector; //public static IoWaferSizeDetector LP2WaferDetector; } }