ZZ-EFEM/Jet/Jet_001_2P_Jet/EfemRT/Routines/PickRoutineInter.cs

using System;
using Aitex.Core.Common;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using EFEM.RT.Devices;
using EFEM.RT.Modules;

using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;

namespace EFEM.RT.Routines
{
    public class PickRoutineInter : CommonRoutine, IRoutine, IEfemPickRoutine
    {
        enum Pick
        {
            QueryState,
            CheckBeforePick,
            OpenLoadLockDoor,

            SetWaferSizeParameter0000,
            SetWaferSizeParameter0114,

            PickWafer,
            WaitPick,
            XMove,
            CloseLoadLockDoor,
            RobotTurnToReadyPosition,
            WaitRobotTurn,
            CheckAfterPick,
        }

        protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
        private SCConfigItem _scPickTimeout = null;

        private int _timeout = 0;
        private int _axisTimeout = 0;
        private int _axisSpeed = 0;

        public PickRoutineInter(string module, string name)
        {
            Module = module;
            name = "Pick";
        }

        public bool Initalize()
        {
            _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
            if (HaveMotionAxis)
            {
                _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
                _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
            }

            return true;
        }

        public ModuleName Source { get; set; }
        public int Slot { get; set; }
        public Hand Blade { get; set; }

        private LoadPortBaseDevice _lpDevice;

        public Result Start(params object[] objs)
        {
            Reset();
            _timeout = _scPickTimeout.IntValue;
            Name = "Pick";
            Reset();

            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));

            _lpDevice = DEVICE.GetDevice<LoadPortBaseDevice>(Source.ToString());

            //获取offset(两种情况)
            if (ModuleHelper.IsLoadLock(Source))
            {
                if (!RobotOffsetConfig.Instance.GetOffset(Source, RobotOffsetConfig.MotionName.GET, ref OffsetX, ref OffsetY, ref OffsetZ, out string reason))
                {
                    EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}");
                    return Result.FAIL;
                }

            }
            else
            {
                if (!RobotOffsetConfig.Instance.GetOffset(Source, ref OffsetX, ref OffsetY, ref OffsetZ, out string reason))
                {
                    EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}");
                    return Result.FAIL;
                }
            }
            return Result.RUN;
        }


        public Result Monitor()
        {
            try
            {
                //if (ModuleHelper.IsLoadPort(Source))
                //    QueryLoadportState((int)Pick.QueryState, Source.ToString(), _timeout);

                if (ModuleHelper.IsLoadLock(Source) && LoadLockDoorControlByStation && !Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    LoadLockOpenAtmDoor((int)Pick.OpenLoadLockDoor, DEVICE.GetDevice<LoadLockDevice>(Source.ToString()), "Wait Atm Door Open", _timeout, Notify, Stop);
                }

                CheckBeforePick((int)Pick.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
 
                if (ModuleHelper.IsLoadPort(Source) && MultiWaferSize)
                {
                    SetWaferSize((int)Pick.SetWaferSizeParameter0000, "Set Wafer Size Parameter 0000", 0000, Source, Slot, _timeout, Notify, Stop);
                    SetWaferSize((int)Pick.SetWaferSizeParameter0114, "Set Wafer Size Parameter 0114", 0114, Source, Slot, _timeout, Notify, Stop);
                }

                PickWafer((int)Pick.PickWafer, "Pick wafer", Source, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop);

                this.WaitRobotMotion((int)Pick.WaitPick, robot, "Wait picked", _timeout, Notify, Stop);

                if (ModuleHelper.IsLoadLock(Source) && LoadLockDoorControlByStation && !Singleton<EfemEntity>.Instance.IsOnlineMode)
                {
                    LoadLockCloseAtmDoor((int)Pick.CloseLoadLockDoor, DEVICE.GetDevice<LoadLockDevice>(Source.ToString()), "Wait Atm Door Close", _timeout, Notify, Stop);
                }
                if (ModuleHelper.IsLoadLock(Source))
                {
                    RobotMoveToPickReadyPosition((int)Pick.RobotTurnToReadyPosition, "Robot turn to ready position", ModuleName.LP1, 22, Blade, Notify, Stop);
                    WaitRobotMotion((int)Pick.WaitRobotTurn, robot, "Wait robot turn", _timeout, Notify, Stop);
                }

                CheckAfterPick((int)Pick.CheckAfterPick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                return Result.FAIL;
            }

            EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberEnds, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));

            return Result.DONE;
        }

        public void RobotMoveToPickReadyPosition(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(String.Format("Pick ready position at {0}", chamber.ToString()));
                string reason = string.Empty;

                return robot.GoTo((RobotArmEnum)blade, chamber.ToString(), slot, RobotPostionEnum.PickReady);
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }
        }

        public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(name);
                string reason = string.Empty;

                if (!CheckRobotMotionInterlock(chamber, slot, out reason))
                {
                    EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
                    return false;
                }

                notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));

                if (blade == Hand.Blade1)
                {
                    if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                    {
                        //online mode, CreateWafer in LoadLock
                        WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
                    }
                    else
                    {
                        bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
                        if (!bHasWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
                            return false;
                        }
                    }

                    bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
                    if (!bNoWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
                        return false;
                    }

                    bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0);  //check sensor
                    if (!bNoWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
                        return false;
                    }

                    if (ModuleHelper.IsBuffer(chamber))
                    {
                        bool bHasWafer = CheckSeneorHasWafer(chamber, slot);  //check sensor
                        if (!bHasWafer)
                        {
                            EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
                            return false;
                        }
                    }
                }
                else if (blade == Hand.Blade2)
                {
                    bool bHasWafer = true;
                    for (int i = 0; i < robot.Blade2Slots; i++)
                    {
                        if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                        {
                            //online mode, CreateWafer in LoadLock
                            WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
                        }
                        else
                            bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);


                        bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
                            return false;
                        }

                        bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i);  //check sensor
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
                            return false;
                        }

                        if (ModuleHelper.IsBuffer(chamber))
                        {
                            bHasWafer = CheckSeneorHasWafer(chamber, slot + i);  //check sensor
                            if (!bHasWafer)
                            {
                                EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
                                return false;
                            }
                        }
                    }

                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
                        return false;
                    }
                }
                else
                {
                    bool bHasWafer = true;
                    for (int i = 0; i < robot.Blade2Slots + 1; i++)
                    {
                        if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
                        {
                            //online mode, CreateWafer in LoadLock
                            WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
                        }
                        else
                            bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);


                        bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
                            return false;
                        }
                        bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i);  //check sensor
                        if (!bNoWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
                            return false;
                        }

                        if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
                        {
                            bHasWafer &= CheckSeneorHasWafer(chamber, slot + i);  //check sensor
                            if (!bHasWafer)
                            {
                                EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
                                return false;
                            }
                        }
                    }

                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
                        return false;
                    }
                }

                if (ModuleHelper.IsCoolingBuffer(chamber))
                {
                    IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());

                    if (!buffer.CheckPinUp())
                    {
                        EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
                        return false;
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    error(String.Format("Failed to check wafer information."));
                    throw (new RoutineFaildException());
                }
            }
        }


        public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                notify(name);

                if (blade == Hand.Blade1)
                {

                    bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);

                    if (!bHasWafer)
                    {
                        EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
                        return false;
                    }
                }
                else if (blade == Hand.Blade2)
                {

                    for (int i = 0; i < robot.Blade2Slots; i++)
                    {
                        bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
                        if (!bHasWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
                            return false;
                        }
                    }
                }
                else
                {
                    for (int i = 0; i < robot.Blade2Slots + 1; i++)
                    {
                        bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
                        if (!bHasWafer)
                        {
                            EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
                            return false;
                        }

                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    error(String.Format("Failed to check wafer information."));
                    throw (new RoutineFaildException());
                }
            }
        }


    }
}