using System; using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using EFEM.RT.Devices; using EFEM.RT.Modules; using Aitex.Sorter.Common; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots; namespace EFEM.RT.Routines { public class PickRoutineInter : CommonRoutine, IRoutine, IEfemPickRoutine { enum Pick { QueryState, CheckBeforePick, OpenLoadLockDoor, SetWaferSizeParameter0000, SetWaferSizeParameter0114, PickWafer, WaitPick, XMove, CloseLoadLockDoor, RobotTurnToReadyPosition, WaitRobotTurn, CheckAfterPick, } protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue("MultiWaferSize") ?? false; private SCConfigItem _scPickTimeout = null; private int _timeout = 0; private int _axisTimeout = 0; private int _axisSpeed = 0; public PickRoutineInter(string module, string name) { Module = module; name = "Pick"; } public bool Initalize() { _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer); if (HaveMotionAxis) { _axisTimeout = SC.GetValue("MotionAxis.MoveTimeout"); _axisSpeed = SC.GetValue("MotionAxis.AutoSpeed"); } return true; } public ModuleName Source { get; set; } public int Slot { get; set; } public Hand Blade { get; set; } private LoadPortBaseDevice _lpDevice; public Result Start(params object[] objs) { Reset(); _timeout = _scPickTimeout.IntValue; Name = "Pick"; Reset(); EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString())); _lpDevice = DEVICE.GetDevice(Source.ToString()); //获取offset(两种情况) if (ModuleHelper.IsLoadLock(Source)) { if (!RobotOffsetConfig.Instance.GetOffset(Source, RobotOffsetConfig.MotionName.GET, ref OffsetX, ref OffsetY, ref OffsetZ, out string reason)) { EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}"); return Result.FAIL; } } else { if (!RobotOffsetConfig.Instance.GetOffset(Source, ref OffsetX, ref OffsetY, ref OffsetZ, out string reason)) { EV.PostAlarmLog(ModuleName.System.ToString(), $"Can not {Name}, {reason}"); return Result.FAIL; } } return Result.RUN; } public Result Monitor() { try { //if (ModuleHelper.IsLoadPort(Source)) // QueryLoadportState((int)Pick.QueryState, Source.ToString(), _timeout); if (ModuleHelper.IsLoadLock(Source) && LoadLockDoorControlByStation && !Singleton.Instance.IsOnlineMode) { LoadLockOpenAtmDoor((int)Pick.OpenLoadLockDoor, DEVICE.GetDevice(Source.ToString()), "Wait Atm Door Open", _timeout, Notify, Stop); } CheckBeforePick((int)Pick.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop); if (ModuleHelper.IsLoadPort(Source) && MultiWaferSize) { SetWaferSize((int)Pick.SetWaferSizeParameter0000, "Set Wafer Size Parameter 0000", 0000, Source, Slot, _timeout, Notify, Stop); SetWaferSize((int)Pick.SetWaferSizeParameter0114, "Set Wafer Size Parameter 0114", 0114, Source, Slot, _timeout, Notify, Stop); } PickWafer((int)Pick.PickWafer, "Pick wafer", Source, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop); this.WaitRobotMotion((int)Pick.WaitPick, robot, "Wait picked", _timeout, Notify, Stop); if (ModuleHelper.IsLoadLock(Source) && LoadLockDoorControlByStation && !Singleton.Instance.IsOnlineMode) { LoadLockCloseAtmDoor((int)Pick.CloseLoadLockDoor, DEVICE.GetDevice(Source.ToString()), "Wait Atm Door Close", _timeout, Notify, Stop); } if (ModuleHelper.IsLoadLock(Source)) { RobotMoveToPickReadyPosition((int)Pick.RobotTurnToReadyPosition, "Robot turn to ready position", ModuleName.LP1, 22, Blade, Notify, Stop); WaitRobotMotion((int)Pick.WaitRobotTurn, robot, "Wait robot turn", _timeout, Notify, Stop); } CheckAfterPick((int)Pick.CheckAfterPick, "Check wafer information", Source, Slot, Blade, Notify, Stop); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberEnds, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString())); return Result.DONE; } public void RobotMoveToPickReadyPosition(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(String.Format("Pick ready position at {0}", chamber.ToString())); string reason = string.Empty; return robot.GoTo((RobotArmEnum)blade, chamber.ToString(), slot, RobotPostionEnum.PickReady); }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } } } public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(name); string reason = string.Empty; if (!CheckRobotMotionInterlock(chamber, slot, out reason)) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason)); return false; } notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot)); if (blade == Hand.Blade1) { if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); } else { bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1)); return false; } } bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } if (ModuleHelper.IsBuffer(chamber)) { bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor if (!bHasWafer) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer."); return false; } } } else if (blade == Hand.Blade2) { bool bHasWafer = true; for (int i = 0; i < robot.Blade2Slots; i++) { if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); } else bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal); bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } if (ModuleHelper.IsBuffer(chamber)) { bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor if (!bHasWafer) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer."); return false; } } } if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1)); return false; } } else { bool bHasWafer = true; for (int i = 0; i < robot.Blade2Slots + 1; i++) { if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); } else bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal); bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both) { bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor if (!bHasWafer) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer."); return false; } } } if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot)); return false; } } if (ModuleHelper.IsCoolingBuffer(chamber)) { IoCoolingBuffer buffer = DEVICE.GetDevice(chamber.ToString()); if (!buffer.CheckPinUp()) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position."); return false; } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { error(String.Format("Failed to check wafer information.")); throw (new RoutineFaildException()); } } } public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(name); if (blade == Hand.Blade1) { bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick); return false; } } else if (blade == Hand.Blade2) { for (int i = 0; i < robot.Blade2Slots; i++) { bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick); return false; } } } else { for (int i = 0; i < robot.Blade2Slots + 1; i++) { bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick); return false; } } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { error(String.Format("Failed to check wafer information.")); throw (new RoutineFaildException()); } } } } }